MicroSensors and MicroActuators

Georgia Tech MEMS group

 

 

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Wireless flow sensor based on RF evanescent-mode cavity resonator

                                                                                                           

Yanzhu Zhao, Mark G. Allen

 

The objective of this research is to develop an embedded passive wireless flow sensor, which does not need any on-board power and can be interrogated wirelessly. High sensitivity is achieved by utilizing ‘compressed’ evanescent electro-magnetic waves in the RF cavity. The cavity can be made from a broad range of materials such as plastic, metal or ceramic, which enable the senor can work in various environments, including high temperature and pressure.

 

Other projects:

Miniaturized high-performance RF passive components  ŕ

 

Last modified on December 11, 2007

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