MicroSensors and MicroActuators

Georgia Tech MEMS group

 

 

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Soft-lithography for 3-D structural and electrical patterning

                                                                                                           

Yanzhu Zhao, Yong-Kyu Yoon, Mark G. Allen

 

 

This research seeks to exploit interesting characteristics of 'soft' materials, such as polymers. The aim is to control and develop new 'soft lithographic' approaches for structurally and electrically patterning them and guiding their growth, such as three-dimensional (3-D) metal pattern transferring for molded structures. The applications include broadband antenna system, electrical interconnects, neuron probes and more.

 

 

 

Last modified on March 10, 2006

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