MicroSensors and MicroActuators

Georgia Tech MEMS group

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Magnetic Devices BioMEMS, Microfluidics, and Polymers Sensors

Combustion Devices Nanostructure Fabrication Recently Completed Projects

Magnetic Devices

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	Microscale, Axial-Flux, Permanent Magnet Generator Florian Herrault, Chang-Hyeon Ji, Seong-Hyok Kim, Mark G. Allen Sponsor: ARL
	Ultraminiaturized, Permanent Magnet Generators Florian Herrault, Chang-Hyeon Ji, Mark G. Allen
	Micro Power Converter Preston Galle, Urvi Shah, Seong-Hyok Kim, Mark G. Allen Sponsor: National Semiconductor

BioMEMS, Microfluidics, and Polymers

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	Thermal Micro/Nano Poration System for Transdermal Drug Delivery Yong-Kyu Yoon, Jung-Hwan Park, Jung-Woo Lee, Mark Prausnitz, Mark G. Allen Sponsor: Tyco Healthcare Co
	Gas Flow System Using Thermal Transpiration Yong-Kyu Yoon, Wenjing Ye, Mark G. Allen Sponsor: NSF
	Nano Fiber/Texture Formation for Artificial Tissue Engineering Yong-Kyu Yoon, Jeff Cave, Mark G. Allen, Elliot Chaikof
	Development of 3-D Micro-Electrode Arrays (MEAs) for neuronal culturing, stimulation and recording Swaminathan Rajaraman, Seong-O Choi, Maxine McClain, Richard Shafer, Mark G. Allen Sponsor: NIH
	Exploring Applications of 3-D MEA Swaminathan Rajaraman, James D. Ross, Edgar A. Brow, and Mark G. Allen Sponsor: NIH, Axion Biosystems
	Electrically Active Electroporation Microneedle Array for Gene Delivery Seong-O Choi, Jung-Hwan Park, Yeuchun Kim, Harvinder S. Gill, Yong-Kyu Yoon, Mark R. Prausnitz, Mark G. Allen Sponsor: NIH
	Digital Clay Sharon Wu, Mark G. Allen Sponsor: NSF
	Dynamic Flight Maneuvering Using Virtual Control Surfaces Generated by Trapped Vorticity Avishek Aiyar, Mark G. Allen Sponsor: AFOSR
	Fabrication of Morphology in Nanoscale by Polymer Nanolithography Jennifer Liu, David Bucknall, Mark G. Allen

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Sensors

	Wireless Chemical Sensors for Harsh Environments Edward Birdsell, Mark G. Allen
	Development of a Wireless Ceramic Sensing Platform that can Operate in a High Temperature (500-1000ºC+) Environment Edward Birdsell, Mark G. Allen
	Wireless Pressure Sensor for Biomedical Applications Michael Fonseca, Mark. G. Allen
	Wireless flow sensor based on RF evanescent-mode cavity resonator Yanzhu Zhao, Mark G. Allen Sponsor: GTRC ID 4210

RF MEMS

Miniaturized high-performance RF passive components Yanzhu Zhao, Mark G. Allen

Combustion Devices

Development of Conductive-Fuel-Based Chemical Microactuators Priya Gadiraju, Brian English, Mark G. Allen Sponsor: DARPA

Nanostructure Fabrication

Fabrication and Characterization of Micro- and Nanojets Nisarga Naik, Mark G. Allen Sponsor: NSF

Recently Completed Projects

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Millimeter-Wave Atenna for System-On-Chip (SOC) Applications Yong-Kyu Yoon, Bo Pan, Mark G. Allen, John Papapolymerou , Manos Tentzeris

BioMEMS, Microfluidics and Polymers

	Three-Dimensional High-Aspect-Ratio Cell Culturing Scaffolds Yanzhu Zhao, Xiaosong Wu, Yong-kyu Yoon, Mark G. Allen
	Soft-Lithography for 3-D Structural and Electrical Patterning Yanzhu Zhao, Yong-kyu Yoon, Mark G. Allen

Magnetic Devices and RF Components

		MEMS-Based Resonant Compass Seungkeun Choi, Seong-Hyok Kim, Yong-Kyu Yoon, Mark G. Allen
		Electrodeposited Helical Coils Using Excimer Laser Micromachining Priya Gadiraju, Mark G. Allen
		Automated Electroplating System for MEMS Device Fabrication Urvi Shah, Richard Shafer, Mark G. Allen Sponsor: ARL
		MEMS Laminated Magnetic Components for Portable Electronics (PDF) Jin-Woo Park, Florent Cros, Mark G. Allen
			Ferroelectric Tunable Capacitor for RF Application (PDF) Yong Kyu Yoon, Mark G. Allen
			RF Inductors (PDF) Yong Kyu Yoon, Mark G. Allen
			Embedded RF Inductor (PDF) Yong Kyu Yoon, Mark G. Allen

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Combustion Devices

	Polymeric Conductive-Fuel-Based Chemical Microactuators Yanzhu Zhao, Mark G. Allen
	Permanent Magnet MEMS Arrays: Application to Combustion-Driven Power Generation (PDF) Edward Birdsell, Mark G. Allen

Nanostructure Fabrication

Microsystems for the Fabrication of Nano-Scale Structures (PDF) Christophe Courcimault, Mark G. Allen

Devices and Packaging

	Thermomigrated Junction of Bulk-Micromachined Silicon Devices and its Application to Inertial Navigation Systems (PDF) Charles Chung, Mark G. Allen
	Wafer-Level Packaging (PDF) Yeun-Ho Joung, Mark G. Allen

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Last modified on January 18, 2008

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