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(click on titles or years to view the papers) 2009 2008 2007 2006 2005 2004 2003 2002 2001 2009 2008 2007 2006 2005 2004 2003 2002 2001 2000 1999 1998 1997 1996 1995 1994 1993 1992 1991 1990 1989 1988 1987 1986 1985 1.
P.-C. Wang, B. A. Wester, S. Rajaraman, S.-J. Paik, S.-H. Kim, M. G.
Allen, “Hollow Polymer Microneedle Array Fabricated by Photolithography
Process Combined with Micromolding Technique,” IEEE EMBC conference, Minneapolis, MN, Sept. 2-6, 2009. (PDF) 2.
B.A. Wester, J.D. Ross, S. Rajaraman, and M.G. Allen, “Packaging and
characterization of mechanically actuated microtweezers for biomedical
applications,” IEEE EMBC Conference,
Minneapolis, MN, Sept 2-6, 2009. (PDF) 3.
Z. Liu, D. G. Bucknall, M. G. Allen, “Fabrication of molecular-scale
patterns with chemically tunable functionalities,” Tech. Dig. Int. Solid-State Sensors, Actuators and
Microsystems Conference, 2009. TRANSDUCERS 2009, pp. 449-452, Denver,
June 2009. (PDF) 4.
W. Xu, M. G. Allen, “Fabrication of patterned carbon nanotube (CNT) /
elastomer bilayer material and its utilization as force sensors,” Tech. Dig. Int. Solid-State Sensors, Actuators and
Microsystems Conference, 2009. TRANSDUCERS 2009, pp. 2242-2245,
Denver, June 2009. (PDF) 5.
C.-H. Ji, F. Herrault, M. G. Allen, “Micro projection lithography
inside deep trenches using microlens on a mask,” Tech. Dig. Int. Solid-State Sensors, Actuators and
Microsystems Conference, 2009. TRANSDUCERS 2009, pp. 1908-1911,
Denver, June 2009. (PDF) 6.
C. Song, A.
R. Aiyar, S.-H. Kim, M. G. Allen, “Exploitation of aeroelastic effects for
drift reduction in an all-polymer air flow sensor,” Tech. Dig. Int. Solid-State Sensors, Actuators and Microsystems
Conference, 2009. TRANSDUCERS 2009, pp. 1545-1548, Denver, June 2009. (PDF) 7.
N. Naik, J.
Caves,V. Kumar,E. Chaikof, M. G. Allen, “A template-based fabrication
technique for spatially-designed polymer micro/nanofiber composites,” Tech. Dig. Int. Solid-State Sensors,
Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009, pp.
1869-1872, Denver, June 2009. (PDF) 8.
F.
Herrault, S. Yorish, T. Crittenden, M. G. Allen, “Microfabricated, ultra-dense,
three-dimensional metal coils,” Tech.
Dig. Int. Solid-State Sensors, Actuators and Microsystems Conference, 2009.
TRANSDUCERS 2009, pp. 1718-1721, Denver, June 2009. (PDF) 9.
Avishek
Aiyar, Chao Song, Seong-Hyok Kim, Mark G. Allen, “An all polymer air-flow
sensor array using a piezoresistive composite elastomer”, Tech. Dig. 22nd IEEE Int. Conf.
Micro Electro Mechanical Systems (MEMS 2009), pp. 447-451, Sorrento,
Italy, Jan. 2009. (PDF) 10. Wenjun Xu, Chang-Hyeon Ji, Richard Shafer, Mark G.
Allen, “Fast and controlled integration of carbon nanotubes into
microstructures”, in Proc. Materials
Research Society conference, Vol. 1139, No.:1139-GG03-06, Boston, Dec.
2008. (PDF) 11. Z. Liu, D. Bucknall, M. Allen, “Recognition and Absorption
of the water-soluble X-ray contrast medium iodixanol using molecularly
imprinted polymers for biomedical applications,” in Proc. Materials Research
Society conference, Boston, Dec. 2008. 12. S.-H. Kim, C.-H. Ji, P. Galle, F. Herrault, X. Wu,
J.-H. Lee, C.-A. Choi, and M. G. Allen, “An Electromagnetic Energy Scavenger
from Direct Airflow,” in Proc.
PowerMEMS 2008, pp. 133-136, Nov. 2008. (PDF) 13. B. C. Yen, F. Herrault, K. J. Hillman, M. G. Allen,
F. F. Ehrich, S. Jacobson, C.-H. Ji, J. H. Lang, H. Li, Z. S. Spakovszky, and
D. R. Veazie, “Characterization of a fully-integrated permanent-magnet
turbine generator,” in Proc. PowerMEMS
2008, pp. 121-124, Nov. 2008. (PDF) 14. Maxine McClain, Michelle C LaPlaca, Mark Allen, “An integrated elastomer mesh and microelectrode array for neurophysiology,” Georgia Life Sciences Summit, September, 2008. 15. Swaminathan Rajaraman, Yanzhu Zhao, Xiaosong Wu, Seong-Hyok Kim and Mark G. Allen, “Metal transfer micromolding (MTM) process for high-aspect-ratio 3-D structures with functional metal surfaces,” in Tech. Dig. International Symposium on Flexible Automation (ISFA 2008), Atlanta, USA, June 2008. (PDF) 16. Yanzhu Zhao, Seong-Hyok Kim, Yuan Li, Bo Pan, Xiaosong Wu, Emmanouil M. Tentzeris, John Papapolymerou, Mark G. Allen, “A micromachined airflow sensor based on RF evanescent-mode cavity tesonator,” in Tech. Dig. International Microwave Symposium (IMS 2008), Atlanta, USA, June 2008. (PDF) 17. Florian Herrault, Thomas Crittenden, Svyatoslav Yorish, Edward Birdsell, Ari Glezer, and Mark G. Allen, “A self-resonant, MEMS-fabricated, air-breathing engine,” Tech. Dig. Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2008), pp. 348-351, June 2008. (PDF) 18. Xiaosong Wu, Seong-Hyok Kim, Chang-Hyeon Ji, and Mark G. Allen,”A piezoelectrically-driven high flow rate axial polymer microvalve with solid hydraulic amplification,” Tech. Dig. 21st IEEE Int. Conf. Micro Electro Mechanical Systems (MEMS 2008), pp.523-526, Tucson, USA, January 2008. (PDF) 19. Jungkwun Kim, Mark G.
Allen, and Yong-Kyu Yoon, “Automated dynamic mode multidirectional UV
lithography for complex 3-D microstructures,” Tech. Dig. 21st IEEE Int. Conf. Micro Electro Mechanical Systems
(MEMS 2008), pp.399-402, Tucson, USA, January 2008. (PDF) 20. Florian Herrault,
Chang-Hyeon Ji, Seong-Hyok Kim, Xiaosong Wu, and Mark G. Allen, “A
microfluidic-electric package for Power MEMS generators,” Tech. Dig. 21st IEEE Int. Conf. Micro Electro
Mechanical Systems (MEMS 2008), pp.112-115, Tucson, USA, January 2008. (PDF) 2007 21. Maxine McClain, Michelle C
LaPlaca, Mark Allen, “ The development of
strand-like microelectrode arrays for in vitro neuron culture,” Society for Neuroscience, November
2007. 22. Zhan Liu, David G.
Bucknall, and Mark G. Allen,
“Fabrication of Three-Dimensional Nano-Patterns by Inclined
Nanoimprinting Lithography,” In Proc. Transducers 2007:
The 14th International Conference on Solid-State Sensors,
Actuators and Microsystems, pp.1621-1624, Lyon, France, June 10-14, 2007. (PDF) 23. Swaminathan Rajaraman,
Maxine A. McClain, Seong-O Choi, James D. Ross, Stephen P. DeWeerth, Michelle
C. LaPlaca, and Mark G. Allen, “Three-Dimensional
Metal Transfer Micromolded Microelectrode Arrays (MEAS) For In-Vitro Brain
Slice Recordings,” In Proc. Transducers 2007:
The 14th International Conference on Solid-State Sensors,
Actuators and Microsystems, pp.1251-1254, Lyon, France, June 10-14, 2007. (PDF) 24. F. Herrault,
C.-H. Ji, R.H. Shafer, S.-H. Kim, and M.G. Allen “Ultraminiaturized Milliwatt-Scale Permanent
Magnet Generators,” In Proc. Transducers 2007: The 14th
International Conference on Solid-State Sensors, Actuators and Microsystems, pp.899-902, Lyon,
France, June 10-14, 2007. (PDF) 25. F. Herrault,
C.-H. Ji, S. Rajaraman, R.H. Shafer, and M.G. Allen, “Electrodeposited Metal Structures In High Aspect Ratio
Cavities Using Vapor Deposited Polymer Molds And Laser Micromachining” In
Proc. Transducers 2007: The 14th International
Conference on Solid-State Sensors, Actuators and Microsystems, pp.513-516, Lyon,
France, June 10-14, 2007. (PDF) 26. Seungkeun Choi, Seong-Hyok Kim, Yong-Kyu Yoon, and
Mark G. Allen “Exploitation of Nonlinear Effects for Enhancement of the
Sensing Performance of Resonant Sensors” In Proc. Transducers 2007: The 14th
International Conference on Solid-State Sensors, Actuators and Microsystems,
pp.745-748, Lyon, France, June 10-14, 2007. (PDF) 27. Priya D. Gadiraju, Jung-Hwan Park, Jeong Woo Lee,
and Mark G. Allen, “Micro-Ablation of Skin by Arc-Discharge Jet Ejection for
Transdermal Drug Delivery” In Proc. Transducers 2007: The 14th
International Conference on Solid-State Sensors, Actuators and Microsystems,
pp.1947-1950, Lyon, France, June 10-14, 2007. (PDF) 28. Xiaosong Wu, Haihong Zhu, Seong-Hyok Kim, and Mark
G. Allen, “A portale pneumatically-actuated refreshable Braille cell,” In Proc. Transducers
2007: The 14th International Conference on Solid-State Sensors,
Actuators and Microsystems, Lyon, France, June 10-14, 2007. (PDF) 29. Zhao, Yanzhu; Yoon, Yong-Kyu; Wu, Xiaosong; Allen,
Mark G.; “Metal-Transfer-Micromolding of Air-Lifted RF Components,” In Proc. Transducers
2007: The 14th International Conference on Solid-State Sensors,
Actuators and Microsystems, Lyon, France, June 10-14, 2007. (PDF) 30. Zhao, Yanzhu; Yoon, Yong-Kyu; Allen, Mark G.;
“Metal-Transfer-Micromolded RF Components for System-On-Package (SOP),” in
Proc. 57 Electronic Components and
Technology Conference, 2007. ECTC '07. (PDF) 31. Galle, Preston; Wu,
Xiaosong; Milner, Luke; Kim, Seong-Hyok;
Johnson, Peter; Smeys, Peter; Hopper,
Peter; Hwang, Kyuwoon; and Allen, Mark G.,
“Ultra-Compact Power Conversion Based on a CMOS-Compatible Microfabricated
Power Inductor with Minimized Core Losses,” in Proc. 57 Electronic Components and Technology Conference, 2007. ECTC '07.
(PDF)
2006 32. Pan, B., DeJean, G., Papapolymerou, J., Tentzeris, M.M., Yoon, Y., Allen, M.G., “High performance system-on-package integrated Yagi-Uda antennas for W-band applications and mm-wave ultra-wideband data links,” 56th Electronic Components & Technology Conference (IEEE Cat. No. 06CH37766C), 2006. (PDF) 33. E.D. Birdsell, and M.G. Allen, “Wireless Chemical Sensors for High Temperature Environments,” Tech. Dig. Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF) 34. S-O. Choi, S. Rajaraman, Y-K. Yoon, X. Wu, and M.G. Allen, “3-D Metal Patterned Microstructure using Inclined UV Exposure and Metal Transfer Micromolding Technology,” Tech. Dig. Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF) 35. M.A. Fonseca, J. Kroh, J. White, and M.G. Allen, “Flexible Wireless Passive Pressure Sensors for Biomedical Applications,” Tech. Dig. Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF) 36. X. Wu, G. Yuan, S-O. Choi, Y. Zhao, S-H. Kim, Y-K. Yoon, and M. G. Allen, "Lateral lamination approach for multilayer piezoelectric microactuator,” Tech. Dig. Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF) 37. Y-K. Yoon, and M.G. Allen, “Proximity Mode Inclined UV Lithography,” Tech. Dig. Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF) 38. Florian Herrault, David P. Arnold, Iulica Zana, Preston Galle, Mark G. Allen, “Multi-Watt, Microscale, Axial-Flux, Permanent-Magnet Generators Operating at High Temperatures,” Intermag 2006 Technical Digest, May 8-12, San Diego CA. (PDF) 39. Seungkeun Choi, Seong-Hyok Kim, Yong-Kyu Yoon, Mark G. Allen, "A Magnetically Excited And Sensed MEMS-Based Resonant Compass," Intermag 2006 Technical Digest, May 8-12, San Diego CA. (PDF) 40. Xiaosong Wu, Yanzhu Zhao, Yong-Kyu Yoon, Seong-O Choi, Jung-Hwan Park and Mark G. Allen, “Enhanced Wettability polymer micromolding by a 3-D metal transfer process,” ACS 2006, March 26-30, Atlanta GA. (PDF) 41. J.S. Kenney, Y.K. Yoon, M. Ahn, M.G. Allen, Z. Zhao, X. Wang, A. Hunt, and D. Kim, “Low-Voltage Ferroelectric Phase Shifters from L- to C-Band,” IEEE Aerospace Conference, March 4-11, Big Sky, MT, 2006. (PDF) 42. 43. W. Ye, Y.-K Yoon, and M. G. Allen, “Investigation of Gas Separation Induced by Thermal Loading,” IEEE Nano/Micro Engineered and Molecular Systems (NEMS) conference, Zhuhai, China, Jan. 18-20, 2006. (PDF) 44. B Pan, Y. Yoon, J. Papapolymerou, M. Tentzeris, and M. Allen, “Design and Fabrication of Substrate-Independent Integrated Antennas Utilizing Surface Micromachining”, presented in Asian-Pacific Microwave Conference (APMC), Dec. 4-7, Suzhou, China, 2005. (PDF) 45. Zana, I., Herrault, F., Arnold, D. P., and Allen, M. G., "Magnetic patterning of permanent-magnet rotors for microscale motor/generators," in Proc. 5th Int. Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), Tokyo, Japan, pp. 116-119, November 2005. (PDF) 46. Arnold, D. P., Galle, P., Herrault, F., Das, S., Lang, J. H., and Allen, M. G., "A self-contained, flow-powered microgenerator system," in Proc. 5th Int. Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), Tokyo, Japan, pp. 113-115, November 2005. (PDF) 47. Arnold, D. P., Zana, I., Herrault, F., Galle, P., Park, J.-W., Das, S., Lang, J. H., and Allen, M. G., "Optimization of a microscale, axial-flux, permanent-magnet generator," in Proc. 5th Int. Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), Tokyo, Japan, pp. 165-168, November 2005. (PDF) 48. Y. Zhao, X. Wu, Yong-Kyu Yoon, J.-H. Park, S.J. Kennedy, Z. Schwartz, B.D. Boyan, and M.G. Allen, “Fabrication of Micromachined Mold Masters for 3-D, High-aspect-ratio Cell Culturing Substrates”, Proceeding of 2005 ASME IMECE, Paper number IMECE2005-81991, pp.1-7, Nov. 5-11, Orlando, FL, 2005. (PDF) 49. N.Naik, C. Courcimault, H. Hunter, J. Berg, J. Lee, K. Naeli, T. Wright, M. G. Allen, O. Brand, A. Glezer, W. King, “Fabrication and characterization of liquid and gaseous micro-and nanojets,“ Proceeding of 2005 ASME IMECE, Paper number IMECE2005-81698, Nov. 5-11, Orlando, FL, 2005. (PDF) 50. J. Lee, K. Naeli, H. Hunter, J. Berg, T. Wright, C. Courcimault, N.Naik, M. G. Allen, O. Brand, A. Glezer, W. King, “Micro-cantilever based metrology tool for flow characterization of liquid and gaseous micro/nanojets,“ Proceeding of 2005 ASME IMECE, Paper number IMECE2005-81732, Nov. 5-11, Orlando, FL, 2005. (PDF) 51. X. Wu, Y. Zhao, Yong-Kyu Yoon, S.-O. Choi, J.-H. Park, and M.G. Allen, “Wafer-scale Micromolding of Unitary Polymeric Microstructures with Simultaneously Formed Functional Metal Surface”, Proceeding of International Conference on micro Total Analysis Systems (-TAS), Boston MA, pp.205-207, Oct. 2005. (PDF) 52. J. H. Park, J.-W. Park, Y.-K. Yoon, Y. Joung, S. Choi, J. Lee, M.G. Allen, M.R. Prausnitz, “Wireless thermal micro-ablation of skin for transdermal drug delivery”, presented BMES conference, Sep. 28-Oct. 1, 2005, Baltimore, MD. (PDF) 53. Allen, M.G., “Implantable micromachined wireless pressure sensors: approach and clinical demonstration,” 2nd International Workshop on BSN 2005 Wearable and Implantable Body Sensor Networks, 2005, p 40-1. 54. Yong-Kyu Yoon, B. Pan, J. Papapolymerou, M.M. Tentzeris, and M.G. Allen, “A Vertical W-band Surface-Micromachined Yagi-Uda Antenna”, presented in IEEE AP-S International Symposium and USNC/URSI National Raid Science Meeting in Washington, DC, July 3-8, 2005. (PDF) 55. B. Pan, Yong-Kyu Yoon, J. Papapolymerou, M.M. Tentzeris, and M.G. Allen, “A High Performance Surface-Micromachined Elevated Patch Antenna”, presented in IEEE AP-S International Symposium and USNC/URSI National Raid Science Meeting in Washington, DC, July 3-8, 2005. (PDF) 56. S.O. Choi, J.H. Park, Y. Choi, Y. Kim, H.S. Gill, Y.K. Yoon, M.R. Prausnitz and M.G. Allen, ”An electrically active microneedle array for electroporation of skin for gene delivery”, in Tech. Dig. 13th Int. Conf. Solid-State Sensors, Actuators, and Microsystems (Transducers 05), Seoul, Korea, June 2005. (PDF) 57. Yong-Kyu Yoon, B. Pan, M.M. Tentzeris, J. Papapolymerou, and M.G. Allen, “Surface-Micromachined Millimeter-Wave Antennas”, in Tech. Dig. 13th Int. Conf. Solid-State Sensors, Actuators, and Microsystems (Transducers 05), Seoul,Korea, Vol. 1 pp. 1986-1989, Seoul,Korea, June 5-9, 2005. (PDF) 58. Arnold, D. P., Zana, I., Park, J.-W., Das, S., Joung, Y.-H., Veazie, D., Lang, J. H., and Allen, M. G., "High-speed characterization and mechanical modeling of microscale, axial-flux, permanent-magnet generators," in Tech. Dig. 13th Int. Conf. Solid-State Sensors, Actuators, and Microsystems (Transducers 05), Seoul, Korea, Vol. 1, pp. 701-704, June 2005. (PDF) 59. Yoonsu Choi, S. Choi, R.H. Shafer, and M.G. Allen, “Highly Inclined Electrodeposited Metal Lines Using an Excimer Laser Patterning Technique,” in Tech. Dig. 13th Int. Conf. Solid-State Sensors, Actuators, and Microsystems (Transducers 05), Seoul, Korea, June 2005. (PDF) 60. W.
Martanto, Yoonsu Choi, Y. Joung, M.G. Allen, M.R. Prausnitz, “Side-Opening
Hollow Microneedles for Transdermal Drug Delivery,” 32nd 61. S.O. Choi, J.H. Park, Y. Kim, H.S. Gill, Y. Choi, M.G. Allen and M.R. Prausnitz, “Microneedle electrode array for electroporation of skin for gene therapy”, 32nd Annual Meeting & Exposition of the Controlled Release Society (CRS, 2005), Miami, FL, USA. (PDF) 62. B. Pan, Yong-Kyu Yoon, Y. Zhao, J. Papapolymerou, M.M. Tentzeris, and M.G. Allen, “A Broadband Surface-Micromachined 15-45 GHz Microstrip Coupler”, presented in IEEE International Microwave Symposium in Long Beach, CA, June 12-17, 2005. (PDF) 63. G. Yuan, X. Wu, Yong-Kyu Yoon, and M.G. Allen, “Kinematically-Stabilized Microbubble Actuator Arrays”, Tech. Dig. 18th IEEE Int. Conf. MicroElectro Mechanical Systems (MEMS 2005), Miami Beach, FL, pp. 411-414, January 2005.(PDF) 64. Das, S., Arnold, D. P., Zana, I., Park, J.-W., Lang, J. H., and Allen, M. G., "Multi-watt electric power from a microfabricated permanent-magnet generator," Tech. Dig. 18th IEEE Int. Conf. MicroElectro Mechanical Systems (MEMS 2005), Miami Beach, FL, pp. 287-290, January 2005. (PDF) 65. Jacobson, S. A., Das, S., Savoulides, N., Steyn, J. L., Lang, J. H., Li, H. Q., Livermore, C., Schmidt, M. A., Teo, C. J., Umans, S. D., Epstein, A. H., Arnold, D. P., Park, J. W., Zana, I., and Allen, M. G., "Progress toward a microfabricated gas turbine generator for soldier portable power applications," Proc. 24th Army Science Conf., Orlando, FL, November 2004. (PDF) 66. E. Birdsell, J. Park, M.G. Allen, “Wireless Ceramic Sensors Operating in High Temperature Environments,” 40th AIAA Joint Propulsion Conference, July 2004. (PDF) 67. Arnold, D. P., Das, S., Cros, F., Zana, I., Lang, J. H., and Allen, M. G., "Magnetic induction machines embedded in fusion-bonded silicon," Tech. Dig. Solid-State Sensor, Actuator, and MicrosystemsWorkshop (Hilton Head 2004), pp. 129-132, June 2004. (PDF) 68. Yoonsu Choi, Seungkeun Choi, Richard Powers, Mark G. Allen, “Three-Dimensional Tower structures with integrated cross-connects for 3-D culturing of neurons,” Tech. Dig. Solid-State Sensor, Actuator, and MicrosystemsWorkshop (Hilton Head 2004), June 2004. (PDF) 69. Yong-Kyu Yoon, Bo Pan, Peter Kirby, John Papapolymerou, Manos Tentzeris, Mark G. Allen, “Surface micromachined electromagnetically radiating RF MEMS,” Tech. Dig. Solid-State Sensor, Actuator, and MicrosystemsWorkshop (Hilton Head 2004), June 2004. (PDF) 70. Zana, I., Arnold, D. P., and Allen, M. G., "Large volume, high performance electroplated Co-Pt micromagnets for MEMS applications," Proc. 205th Meet. Electrochem. Soc., Austin, TX, May 2004. (PDF) 71. Arnold, D. P., Cros, F., Zana, I., Allen, M. G., Das, S., and Lang, J. H., "Second-generation, silicon-based magnetic induction machines for microengine power generation," Army Research Lab Collaborative Technology Alliances Conf., Power and Energy Technical Paper Session, Washington, DC, May 2004. 72. Choi, S.O., Yoon, Y.K., Allen, M.G., Hunt, A.T., “A tunable capacitor using an immiscible bifluidic dielectric,” 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535), 2004, pt. 2, p 873-6 Vol.2. (PDF) 73. Bo Pan, Y, Yoon, P. Kirby, J. Papapolymerou, M. M. Tentzeris, M. G. Allen, “A W-band surface micromachined monopole for low-cost wireless communication systems,” 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535), 2004. (PDF) 74. Jung-Hwan
Park,
Allen, M.G., Prausnitz, M.R., “Biodegradable
polymer microneedles: fabrication, mechanics and transdermal drug delivery,”
Conference Proceedings. 26th Annual International Conference of the IEEE
Engineering in Medicine and Biology Society (IEEE Cat. No.04CH37558),
2004, pt. 4, p 2654-7 Vol.4. (PDF) 75. Yanzhu
Zhao, English, B.A., Yoonsu Choi, DiBiaso, H.,
Guang, Yuan., Allen, M.G., ”Polymeric
microcombustors for solid-phase conductive fuels,” 17th IEEE
International Conference on Micro Electro Mechanical Systems. Maastricht MEMS
2004 Technical Digest (IEEE Cat. No.04CH37517), 2004, p 498-501. (PDF) 76. Arnold, D. P., Zana, I., Cros, F., and Allen, M. G., "Vertically-laminated magnetic cores by electroplating Ni-Fe into micromachined Si," 9th Joint MMM-Intermag Conf., Anaheim, CA, January 2004. (PDF) 77. Jung-Hwan
Park, Yong-Kyu Yoon, Prausnitz, M.R., Allen, M.G., “High-aspect-ratio tapered structures using an integrated lens
technique,” 17th IEEE International Conference on Micro Electro
Mechanical Systems. Maastricht MEMS 2004 Technical Digest (IEEE Cat.
No.04CH37517), 2004, p 383-6. (PDF) 78. S.J. Hong, S. Choi, Y. Choi, M.G. Allen, G. S. May “Characterization of Low-temperature SU-8 photoresist processing for MEMS Applications”, Presented in ASMC2004. (PDF) 79. B.A.English, B.A., Hude, H., Allen, M.G.,"Microcombustors Based on Controllable Solid Fuel Elements," Proceedings of the 2003 ASME International Mechanical Engineering Conference and Exposition, IMECE2003-42823, Washington, D.C., November 16-21, 2003. (PDF) 80. Yoonsu Choi, R. Powers, V. Vernekar, A. B. Frazier, M. LaPlaca, and M.G. Allen, "High Aspect Ratio SU-8 Structures for 3-D Culturing of Neurons," Proceedings of the 2003 ASME International Mechanical Engineering Conference and Exposition, IMECE2003-42794, Washington, D.C., November 16-21, 2003. (PDF) 81. Arnold, D. P., Cros, F., Glover, T., Allen, M. G., Hillman, K., and Veazie, D., "Materials and fabrication methods for high-temperature micro-magnetic machines for micro-turbine power generation," Proc. Army Research Lab Collaborative Technology Alliances Conf., Power and Energy, College Park, MD, pp. 77-81, April 2003. (PDF) 82. Cros, F., Arnold, D. P., Allen, M. G., Das, S., Koser, H., and Lang, J. H., "Micro-magnetic induction machines for portable power applications," Proc. Army Research Lab Collaborative Technology Alliances Conf., Power and Energy, College Park, MD, pp. 17-21, April 2003. (PDF) 83. Koser, H. (MIT, Cambridge, MA, USA); Cros, F.; Allen, M.G.; Lang, J.H., “Magnetic diffusion modeling in nonlinear micro-media: a modified finite-difference time-domain approach,” 2003 Nanotechnology Conference and Trade Show. Nanotech 2003. Nanotech 2003 Joint Meeting. 6th International Conference on Modeling and Simulation of Microsystems, MSM 2003. 3rd International Conference on Computational Nanoscience and Technology, ICCN 2003. 2003 Workshop on Compact Modeling, WCM 2003, 2003, pt. 1, p 280-3 vol.1. 84. 85. Davis, S.P., Prausnitz, M.R.; Allen, M.G., “Fabrication and characterization of laser micromachined hollow microneedles,” TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003, pt. 2, p 1435-8 vol.2. (PDF) 86. Hong-seok Noh, Yoonsu Choi; Chi-fu Wu; Hesketh, P.J.; Allen, M.G., “Rapid, low-cost fabrication of parylene microchannels for microfluidic applications,” TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003, pt. 1, p 798-801 vol.1. (PDF) 87. Yoonsu Choi, R. Powers, Y. Yoon, M. G. Allen, "A Three-Dimensional Microfluidic Network for Cellular Perfusion," presented at µTAS 2003, 7th International Conference on Miniaturized Chemical and BioChemical Analysis Systems, Oct. 2003. (PDF) 88. J. Ross, G. Prado, Yoonsu Choi, M. G. Allen, M. LaPlaca, S. DeWeerth, "A Novel System for Measurement of Electrophysiological Signals Associated with Traumatic Neuronal Injury," presented at µTAS 2003, 7th International Conference on Miniaturized Chemical and BioChemical Analysis Systems, Oct. 2003. (PDF) 89. Yong-Kyu Yoon, R. Powers, Y. Choi, C. Courcimault, and M.G. Allen, "Micromachined Polymeric Microvasculatures: A Three-Dimensional Microfluidic System Using Inclined SU-8 Structures and Laser Machining," presented at 226th American Chemical Society National Meeting, September 2003. (PDF) 90. Allen, M.G., “MEMS technology for the fabrication of RF magnetic components,” Digest of INTERMAG 2003. International Magnetics Conference (Cat. No.03CH37401), 2003, p FC-05. (PDF) 91. Jin-Woo Park, Allen, M.G., “Ultra-low-profile micromachined power inductors with highly laminated NiFe cores: application to low MHz DC-DC converters,” Digest of INTERMAG 2003. International Magnetics Conference (Cat. No.03CH37401), 2003, p EA-04. (PDF) 92. Yeun-Ho Joung, Allen, M.G., “High density electroplating bonding interconnect technology: chip packaging and high aspect ratio passive elements,” 53rd Electronic Components and Technology Conference. Proceedings (Cat. No.03CH37438), 2003, p 640-6. (PDF) 93. Yong-Kyu Yoon, Allen, M.G., “Tunable ferroelectric capacitor with low-loss electrodes fabricated using reverse side exposure,” 53rd Electronic Components and Technology Conference. Proceedings (Cat. No.03CH37438), 2003, p 1534-40. (PDF) 94. Yong-Kyu Yoon, Jung-Hwan Park; Cros, F.; Allen, M.G., “Integrated vertical screen microfilter system using inclined SU-8 structures,” Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.03CH37426), 2003, p 227-30. (PDF) 95. 96. Leichle, T.C., Wenjing Ye; Allen, M.G., “A sub-μW micromachined magnetic compass,” Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.03CH37426), 2003, p 514-17. (PDF) 97. Pinel, S., Cros, F.; Nuttinck, S.; Yoon, S.-W.; Allen, M.G.; Laskar, J., “Very high-Q inductors using RF-MEMS technology for System-On-Package wireless communication integrated module,” 2003 IEEE MTT-S International Microwave Symposium Digest (Cat. No.03CH37411), 2003, pt. 3, p 1497-500 vol.3. (PDF) 98. Yong-Kyu Yoon, J.-W. Park, and M.G. Allen, “RF MEMS Based on Epoxy-Core Conductors,” Digest of Solid-State Sensor, Actuator, and Microsystems Workshop 2002, Hilton Head Island, South Carolina, pp.374-375, 2002. (PDF) 99. Dongsu Kim, Yoonsu Choi; Allen, M.G.; Kenney, J.S.; Stollberg, D.W.; Kiesling, D., “An S-band reflection-type phase shifter-a design example using ferroelectrics,” Materials Issues for Tunable RF and Microwave Devices III. Symposium (Materials Research Society Symposium Proceedings Vol.720), 2002, p 154-9 100. Davis, S.P., Allen, M.G.; Prausnitz, M.R., “The mechanics of microneedles,” Conference Proceedings. Second Joint EMBS-BMES Conference 2002. 24th Annual International Conference of the Engineering in Medicine and Biology Society. Annual Fall Meeting of the Biomedical Engineering Society (Cat. No.02CH37392), 2002, pt. 1, p 498-9 vol.1 101. Yeun-Ho Joung; Nuttinck, S.;
Sang-Woong Yoon; Allen, M.G.; Laskar, J., "Integrated inductors in the
chip-to-board interconnect layer fabricated using solderless electroplating
bonding," IEEE MTT-S International Microwave Symposium Digest (Cat.
No.02CH37278) p.1409-12 vol.3 (2002) (PDF) 102. Dongsu Kim; Yoonsu Choi; Allen, M.G.; Kenney, J.S.; Kiesling, D., "A wide bandwidth monolithic BST reflection-type phase shifter using a coplanar waveguide Lange coupler," IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278) p.1471-4 vol.3 (2002) (PDF) 103. Yoonsu Choi, Kieun Kim, and Allen, M.G., "Continuously-varying, three-dimensional SU-8 structures: fabrication of inclined magnetic actuators," Proc. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, p.176-9 (2002) (PDF) 104. Jin-Woo Park, Cros, F., Allen, M.G., "A sacrificial layer approach to highly laminated magnetic cores," Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, p.380-3 (2002) (PDF) 105. T. Crittenden, A. Glezer, E. Birdsell, M.G. Allen, “Microfabricated, Combustion-Driven Jet Actuators for Flow Control Applications,” Brussels, 2002. (PDF) 106. Yoonsu Choi, Kieun Kim; Allen, M.G., “A magnetically actuated, electrostatically clamped high current MEMS switch,” Micro-Electro-Mechanical Systems (MEMS). 2001 ASME International Mechanical Engineering Congress and Exposition, 2001, p 83-7. 107. Fonseca, M.A., English, J.M.; von Arx, M.; Allen, M.G., “High temperature characterization of ceramic pressure sensors,” TRANSDUCERS '01. EUROSENSORS XV. 11th International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, 2001, pt. 1, p 486-9 vol.1. (PDF) 108. Marquordt, C., Allen, M.G., “Fabrication of micromechanical structures of titania and titanium with electrophoretic deposition,” TRANSDUCERS '01. EUROSENSORS XV. 11th International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, 2001, pt. 1, p 616-19 vol.1. (PDF) 109. 110. Yong-Kyu Yoon, Chen, E.; Allen, M.G.; Laskar, J., “Embedded solenoid inductors for RF CMOS power amplifiers,” TRANSDUCERS '01. EUROSENSORS XV. 11th International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, 2001, pt. 2, p 1114-17 vol.2. (PDF) 111. Leichle, T.C., von Arx, M.; Allen, M.G., “A micromachined resonant magnetic field sensor,” Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090), 2001, p 274-7. (PDF) 112. O'Brien, D.P., Nichols, T.R.; Allen, M.G., “Flexible microelectrode arrays with integrated insertion devices,” Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090), 2001, p 216-19. (PDF) 113. Yong-Kyu Yoon Allen, M.G., “Pt heater/sensor microarray for distributed fluidic cooling assessment,” Micro-Electro-Mechanical Systems (MEMS). 2001 ASME International Mechanical Engineering Congress and Exposition, 2001, p 669-75. (PDF) 114. Yeun-Ho Joung, Allen, M.G., “Micromachined flexible interconnect for wafer level packaging,” Micro-Electro-Mechanical Systems (MEMS). 2001 ASME International Mechanical Engineering Congress and Exposition, 2001, p 745-9. (PDF) 115. Y.E. Chen, Yong Kyu Yoon, J. Laskar, and M. Allen, “A 2.4GHz Integrated CMOS Power Amplifier with Micromachined Inductors”, International microwave symposium digest, 2001 IEEE MTT-s 200, Vol. 1, pp. 523-526, 2001. (PDF) 116. M. A. McClain, M. C.
LaPlaca, M. G. Allen, “Spun-cast micromolding for etchless micropatterning of
electrically functional PDMS structures,” Journal of Micromechanics and
Microengineering, v 19, n 10, p 107002 (6 pp.), Oct. 2009. (PDF) 117. S.-H. Kim, C.-H. Ji, W. P.
Galle, F. Herrault, Z. Wu, J.-H. Lee, C.-A. Choi, M. G. Allen, “An
electromagnetic energy scavenger from direct airflow,” Journal of
Micromechanics and Microengineering, v 19, n 9, p 094010 (8 pp.), Sept.
2009. (PDF) 118. C.-H. Ji, F. Herrault, P.
Hopper, P. Smeys, P. Johnson, M. G. Allen, “Electroplated Metal Buried
Interconnect and Through-Wafer Metal-Filled Via Technology for High-Power
Integrated Electronics,” IEEE
Transactions on Advanced Packaging, Vol. 32, Issue 3,
pp. 695-702, Aug. 2009. (PDF) 119. Y. Zhao, Y.K. Yoon, S.O.
Choi, X. Wu, Z. Liu, and M.G. Allen, “Three dimensional metal pattern
transfer for replica molded microstructures,” Applied Physics Letters, vol. 94, no. 2, 023301, 2009. (PDF) 120. F. Herrault, C.-H. Ji, and
M. G. Allen, “Ultraminiaturized, high-speed, permanent-magnet generators for
milliwatt-level power generation,” Journal
of Microelectromechanical Systems,Vol. 17, No. 6, pp. 1376-1387, 2008. (PDF) 121. F. Herrault, D. P. Arnold,
I. Zana, P. Galle, and M. G. Allen, “High temperature operation of
multi-watt, axial-flux, permanent-magnet microgenerators,” Sensors and
Actuators A: Physical, Vol. 148, Issue 1, 4 Nov. 2008, pp. 299-305. (PDF) 122. Ji, C.-H.; Herrault, F.; Allen, M. G., “A metallic buried interconnect process for through-wafer interconnection,” Journal of Micromechanics and Microengineering, v 18, n 7, August 2008, p 085016 (10 pp.). (PDF) 123. Choi, Y.; Wester, B.; Allen, M.G., “Mechanically driven microtweezers with integrated microelectrodes,” Journal of Micromechanics and Microengineering, v 18, n 6, June 2008, p 065004 (9 pp.). (PDF) 124. Y.-H. Joung; Allen, M.G., “A micromachined chip-to-board interconnect system using electroplating bonding technology,” IEEE Transactions on Advanced Packaging, v 31, n 2, May 2008, p 357-66. (PDF) 125. Y.-H. Joung; Allen, M.G., “Inter-substrate microstructure formation by electroplating bonding technology,” Journal of Micromechanics and Microengineering, v 18, n 4, April 2008, p 045020-1-12. (PDF) 126. Wu, X.; Yuan, G.; Yoon, Y.-K.; Allen, “Kinematically Stabilized Microbubble Actuator Arrays,” Journal of Microelectromechanical Systems, vol. 17, issue 1, Feb. 2008, p 124 – 132. (PDF)
2007 127. Park, J.-H.; Choi, S.-O.; Kamath, R.; Yoon, J.-K.; Allen, M.G.; Prausnitz, “Polymer particle-based micromolding to fabricate novel microstructures,” Biomedical Microdevices, v 9, n 2, April 2007, p 223-34. (PDF) 128. Choi, Y.; McClain, M.A.; LaPlaca, M.C.; Frazier, A.B.; Allen, M.G., “Three dimensional MEMS microfluidic perfusion system for thick brain slice cultures,” Biomedical Microdevices, v 9, n 1, Feb. 2007, p 7-13. (PDF) 129. J.-H. Park, Y.-K. Yoon, S.-O Choi, M. R. Prausnitz, and M. G. Allen, “Tapered conical polymer microneedles fabricated using an integrated lens technique for transdermal drug delivery,” IEEE Transactions on Biomedical Engineering, v 54, n 5, May 2007, p 903-13. (PDF) 130. Y.-H. Joung, and M. G. Allen, “chip-to-board micromachining for interconnect layer passive components,” IEEE Transactions on Components and Packaging Technologies, v 30, n 1, March 2007, p 15-23. (PDF) 131. J.Lee, K. Naeli, H. Hunter, J. Berg, T. Wright, C. Courcimault, N. Naik, M. Allen, O. Brand, A. Glezer and W. P. King, “Characterization of liquid and gaseous micro- and nanojets using microcantilever sensors,” Sensors and Actuators A: Physical, V. 134, Issue 1, Feb 2007, pp. 128-139. (PDF) 132. N. Naik, C. Courcimault, H. Hunter, J. Berg, J. Lee, K. Naeli, T. Wright, M. Allen, O. Brand, A. Glezer and W. King, “Microfluidics for generation and characterization of liquid and gaseous micro- and nanojets,” Sensors and Actuators A: Physical, V. 134, Issue 1, Feb 2007, pp. 119-127. (PDF) 133. S. Rajaraman, S.-O Choi, R. H. Shafer, J. D. Ross, J. Vukasinovic, Y. Choi, S. P. DeWeerth, A. Glezer, and M. G. Allen., “Microfabrication technologies for a coupled three-dimensional microelectrode, microfluidic array,” Journal of Micromechanics and Microengineering, v 17, n 1, Jan. 2007, p 163-71. (PDF)
2006 134. Pan,
B.; Yoon, Y.-K.; Ponchak, G.E.; Allen, M.G.; Papapolymerou, J.; Tentzeris,
M.M.; “Analysis and Characterization of a High-Performance Ka-Band Surface
Micromachined Elevated Patch Antenna,”
Antennas and Wireless Propagation Letters, Vol. 5, Issue 1,
Dec. 2006, p. 511–514 (PDF) 135. Y.
Wang, G. Yuan, Y.-K. Yoon, Allen, M. G., Bidstrup, S. A., “Optimization of
synthetic jet fluidic structures in printed wiring boards,” Transactions
of the ASME. Journal of Electronic Packaging, v 128, n 4, Dec. 2006, p
353-9. (PDF) 136. Coe,
D.J., Allen, M.G., Rinehart, C.S., Glezer, A., “Pneumatically actuated
micromachined synthetic jet modulators,” Sensors and Actuators A (Physical),
v 132, n 2, 20 Nov. 2006, p 689-700. (PDF) 137. Arnold, D.P.; Das, S.; Jin-Woo Park; Zana, I.; Lang, J.H.; Allen, M.G., “Microfabricated high-speed axial-flux multiwatt permanent-magnet Generators-part II: design, fabrication, and testing,” Journal of Microelectromechanical Systems, v 15, n 5, Oct. 2006, p 1351-63. (PDF) 138. Das, S.; Arnold, D.P.; Zana, I.; Jin-Woo Park; Allen, M.G., Lang, J.H.; “Microfabricated high-speed axial-flux multiwatt permanent-magnet Generators-part I: modeling,” Journal of Microelectromechanical Systems, v 15, n 5, Oct. 2006, p 1330-50. (PDF) 139. S. Choi, S.-H. Kim, Y.-K. Yoon, M. G. Allen. "A Magnetically Excited and Sensed MEMS-Based Resonant Compass," IEEE Transaction on Magnetics, Volume 42, Issue 10, Oct. 2006 Page(s):3506 - 3508. (PDF) 140. Yong-Kyu Yoon, Jung-Hwan Park, Allen, M.G. “Multidirectional UV lithography for complex 3-D MEMS structures,” Journal of Microelectromechanical Systems, v 15, n 5, Oct. 2006, p 1121-30. (PDF) 141. Chung, C.C., Allen, M.G. “Thermomigration-based junction isolation of bulk silicon MEMS devices,” Journal of Microelectromechanical Systems, v 15, n 5, Oct. 2006, p 1131-8. (PDF) 142. Arnold, D. P., Herrault F., Zana I., Galle P., Park J.-W., Das, S., Lang, J. H., and Allen, M. G., " Design optimization of an 8 W, microscale, axial-flux, permanent-magnet generator," Journal of Micromechanics and Microengineering, v 16, n 9, Sept. 2006, p S290-6. (PDF) 143. Bidstrup, S.A., Y. Wang, G Yuan, Y.-K. Yoon, Allen, M.G., “Large eddy simulation (LES) for synthetic jet thermal management,” International Journal of Heat and Mass Transfer, v 49, n 13-14, July 2006, p 2173-9. (PDF) 144. Cros, F.; Koser, H.; Allen, M.G.; Lang, J.H., “Magnetic induction micromachine-part II: fabrication and testing,” Journal of Microelectromechanical Systems, v 15, n 2, April 2006, p 427-39. (PDF) 145. Arnold, D. P., Das, S., Cros, F., Zana, I., Lang, J. H., and Allen, M. G., "Magnetic induction machines integrated into bulk-micromachined silicon," J. Microelectromech. Syst., vol. 16, no. 2, pp. 406- 414, April 2006. (PDF) 146. Yong-Kyu Yoon, Kenney, J.S., Hunt, A.T., Allen, M.G. “Low-loss microelectrodes fabricated using reverse-side exposure for a tunable ferroelectric capacitor application,” Journal of Micromechanics and Microengineering, v 16, n 2, Feb. 2006, p 225-34. (PDF) 147. Yong-Kyu Yoon, Jin-Woo Park, Mark G. Allen, “Polymer-core conductor approaches for RF MEMS,” Journal of Microelectromechanical Systems, v. 14, n. 5, October 2005. (PDF) 148. Yong Wang, Guang Yuan, Yong-Kyu Yoon, Allen, M.G., Bidstrup, S.A. “Active cooling substrates for thermal management of microelectronics,” IEEE Transactions on Components and Packaging Technologies, v 28, n 3, Sept. 2005, p 477-83. (PDF) 149. 150. Arnold, D. P., Zana, I., and Allen, M. G., "Analysis and optimization of vertically oriented, through-wafer, laminated magnetic cores in silicon," J. Micromech. Microeng, vol. 15, pp. 971-977, May 2005. (PDF) 151. Charles Chung and Mark G. Allen, “Uncrosslinked SU-8 as a sacrificial material,” J. Micromech. Microeng., v.15, no.1, pp. N1-N5, 2005. (PDF) 152. Arnold, D. P., Cros, F., Zana, I., Veazie, D., and Allen, M. G., "Electroplated metal microstructures embedded in fusion-bonded silicon: conductors and magnetic materials," J. Microelectromech. Syst., Vol. 13, No. 5, pp. 791- 798, October 2004. (PDF) 153. Sung-Pil Chang, Allen, M.G., “Demonstration for integrating capacitive pressure sensors with read-out circuitry on stainless steel substrate,” Sensors and Actuators A (Physical), v A116, n 2, 15 Oct. 2004, p 195-204. (PDF) 154. Davis, S.P., Landis, B.J., Adams, Z.H., Allen, M.G., Prausnitz, M.R., “Insertion of microneedles into skin: measurement and prediction of insertion force and needle fracture force,” Journal of Biomechanics, v 37, n 8, Aug. 2004, p 1155-63. (PDF) 155. Arnold, D. P., Zana, I., Cros, F., and Allen, M. G., "Vertically-laminated magnetic cores by electroplating Ni-Fe into micromachined Si," IEEE Trans. Magn., Vol. 40, No. 4, pp. 3060-3062, July 2004. (PDF) 156. Jin-Woo Park, Florent Cros, and Mark G. Allen, “Planar spiral inductors with multilayer micrometer-scale laminated cores for compact-packaging power converter applications”, IEEE Trans. Magn., Vol. 40, No. 4, July 2004. (PDF) 157. Leichle, T.C., Von Arx, M.; Reiman, S.; Zana, I.; Wenjing Ye; Allen, M.G., “A low-power resonant micromachined compass,” Journal of Micromechanics and Microengineering, v 14, n 4, April 2004, p 462-70. (PDF) 158. Sung-Pil Chang, Allen, M.G., “Capacitive pressure sensors with stainless steel diaphragm and substrate,” Journal of Micromechanics and Microengineering, v 14, n 4, April 2004, p 612-18. (PDF) 159. 160. Yong-Kyu Yoon, Dongsu Kim; Allen, M.G.; Kenney, J.S.; Hunt, A.T., “A reduced intermodulation distortion tunable ferroelectric capacitor-architecture and demonstration,” IEEE Transactions on Microwave Theory and Techniques, v 51, n 12, Dec. 2003, p 2568-76. (PDF) 161. Jin-Woo Park, and Mark G. Allen, “Ultra low-profile micromachined power Inductors with highly laminated Ni/Fe cores: Application to low-megahertz DC-DC converters”, IEEE Trans. Magn., vol. 39, no. 5, Sept. 2003. pp. 3184-3186. (PDF) 162. Dongsu Kim, Yoonsu Choi; Minsik Ahn; Allen, M.G.; Kenney, J.S., “Monolithic 180° and 360° analog phase shifters based on barium strontium titanate coated sapphire substrates,” IEICE Transactions on Electronics, v E86-C, n 8, Aug. 2003, p 1607-12. 163. Kercher, D.S., Jeong-Bong Lee; Brand, O.; Allen, M.G.; Glezer, A., “Microjet cooling devices for thermal management of electronics,” IEEE Transactions on Components and Packaging Technologies, v 26, n 2, June 2003, p 359-66. (PDF) 164. Kaiser, T.J., Allen, M.G., “A pendulous oscillating gyroscopic accelerometer fabricated using deep-reactive ion etching,” Journal of Microelectromechanical Systems, v 12, n 1, Feb. 2003, p 21-8. (PDF) 165. Dongsu
Kim; Yoonsu Choi; Allen, M.G.; Kenney, J.S.; Kiesling, D., “A wide-band
reflection-type phase shifter at S-band using BST coated substrate” Microwave
Theory and Techniques, IEEE Transactions on v. 50, Issue 12,
Dec. 2002 Page(s):2903 – 2909 (PDF) 166. Park,
J.W.; Park, J.Y.; Joung, Y.H.; Allen, M.G., "Fabrication of High Current
and Low Profile Micromachined Inductor with Laminated Ni/Fe Core,"
IEEE Transactions on Components and Packaging Technologies, vol. 25, no.
1, p. 106-111 (2002) (PDF) 167. Fonseca,
M.A.; English, J.M.; von Arx, M.; and Allen, M.G., "Wireless
Micromachined Ceramic Pressure Sensor for High Temperature
Applications," IEEE J. Microelectromechanical Systems, vol. 11,
no.4, p. 337-43 (2002) (PDF) 168. Chang,
S.P.; Lee, J.B.; and Allen, M.G., "A Robust Capacitive Pressure Sensor
Array," Sensors and Actuators A (Physical), vol. A101, no. 1-2,
p. 231-8 (2002) (PDF) 169. Seriburi,
P., Kercher, D.; Allen, M.G., ”An experimental study of microfabricated
spark gaps: wear and erosion characteristics,” Journal of Micromechanics and
Microengineering, v 11, n 3, May 2001, p 165-74. (PDF) 170. Fonseca,
M., English, J., Von Arx, M., and Allen, M.G., “Wireless Micromachined Ceramic
Pressure Sensors,” IEEE Journal of Microelectromechanical Systems,
letter of acceptance received January, 2001. Journal 171. Park,
J.Y. and Allen, M.G., "Integrated Electroplated Micromachined Magnetic
Devices Using Low Temperature Fabrication Processes," IEEE
Transactions on Electronics Packaging Manufacturing, vol. 23, no.
1, p. 48-55 (2000). (PDF) 172. Bhattacharya,
S.K., Park, J.Y., Tummala, R.R., and Allen, M.G., “Fabrication of a fully
integrated passive module for filter application using MCM-D compatible
processes,” Journal of Materials Science: Materials in Electronics,
vol.11, no.6, p.455-60 (2000) (PDF) 173. McAllister,
D.V., Allen, M.G., and Prausnitz, M.R., “Microfabricated Microneedles for
Gene and Drug Delivery,” Annual Review of Biomedical Engineering, vol.
2, p. 289-313 (2000) (PDF) 174. Seriburi,
P., Kercher, D., and Allen, M.G., “An Experimental Study of Microfabricated
Spark Gaps: Wear and Erosion Characteristics,” Journal of Micromechanics
and Microengineering, (2000) (PDF) Conference 175. Allen,
M.G., and Glezer, A., “Alternative Micromachining Technologies for the
Realization of Robust MEMS,” American Institute of Aeronautics and
Astronautics (AIAA) Paper 2000-0248, presented at Reno, NV, January, 2000
(invited address) (PDF) 176. Chung,
C.C. and Allen, M.G., “Electrical Isolation of Bulk Silicon MEMS Devices via
Thermomigration,” Proceedings IEEE Thirteenth Annual International
Conference on Micro Electro Mechanical Systems, p.153-7, Miyazaki
, Japan, January 2000. (PDF) 177. Cros,
F., Kim, K., and Allen, M.G., “A Single-Mask Process for Micromachined
Magnetic Devices,” Proceedings Solid
State Sensor and Actuator Conference, p. 138-141, Hilton Head, SC,
June, 2000. (PDF) 178. Kaiser T.J., and Allen, M.G.,
“A Micromachined Pendulous Oscillating Gyroscopic Accelerometer,” Proceedings
Solid State Sensor and Actuator Conference, p. 85-88, Hilton Head, SC,
June, 2000. (PDF) Journal 179. Lagorce, L., Brand, O., and Allen, M.G., "Magnetic Microactuators Based on Polymer Magnets," IEEE/ASME Journal of Microelectromechanical Systems, vol.8, no.1, p.2-9, March, 1999). (PDF) 180. Taylor
, W.P.; Schneider, M.; Baltes, H.; Allen, M.G., “A NiFeMo electroplating bath
for micromachined structures,” Electrochemical and Solid-State Letters,
vol.2, no.12, p.624-6 (1999) (PDF) 181. Kim,
Y.J.; Allen, M.G., “In situ measurement of mechanical properties of polyimide
films using micromachined
resonant string structures,” IEEE Transactions on Components and Packaging
Technologies, vol.22, no.2, p.282-90 (1999) (PDF) 182. Park,
J.Y.; Han, S.H.; Allen, M.G., “Batch-fabricated microinductors with electroplated
magnetically anisotropic and laminated alloy cores,” IEEE Transactions on
Magnetics, vol.35, no.5, pt.3, p.4291-4300 (1999) (PDF) 183. Park,
J.Y. and Allen, M.G., "Packaging-Compatible High Q-Microinductors and
Microfilters for Wireless Applications," accepted by IEEE
Transactions on Components, Packaging, and Manufacturing Technology
(IEEE CPMT-part B) (letter of acceptance received September, 1998; to be
published February, 1999) (PDF) 184. Park,
J.Y.; Allen, M.G., “High Q spiral-type microinductors on silicon substrates,”
IEEE Transactions on Magnetics, vol.35, no.5, pt.2, p.3544-6 (1999) (PDF) 185. Park,
J.Y., Allen, M.G., “New micromachined inductors on silicon substrates,” IEEE
Transactions on Magnetics, v 35, n 5, pt.2, Sept. 1999, p 3547-9. (PDF) Conference 186. McAllister,
D.V.; Kaushik, S.; Patel, P.N.; Mayberry, J.L.; Allen, M.G.; Prausnitz,
M.,“Microneedles for transdermal delivery of macromolecules,” Proceedings of the
First Joint BMES/EMBS Conference: IEEE Engineering in Medicine and Biology
21st Annual Conference and the 1999 Annual Fall Meeting of the Biomedical
Engineering Society, vol. 2, p. 836 (1999) (PDF) 187. D.V.
McAllister, F. Cros, S.P. Davis, L.M. Matta, M.R. Prausnitz, M.G. Allen,
“Three Dimensional Hollow Microneedle and Microtube Arrays,”, Proc. Transducers
’99 Sendai, Japan, vol. 2, p. 1098-1101 (1999) (PDF) 188. English,
J.M.; Allen, M.G., “Wireless micromachined ceramic pressure sensors,”
Technical Digest. IEEE International MEMS 99 Conference: Twelfth IEEE
International Conference on Micro Electro Mechanical Systems, p.511-16 (1999)
(PDF) 189. D.S.
Kercher, P. Seriburi, and M.G. Allen , “An Experimental Study of
Microfabricated Nickel Spark Plugs,” Proc. Transducers ’99 Sendai, Japan,
vol. 2, p. 1412-1415 (1999) (PDF) 190. Park,
J.Y., Allen, M.G., “Micromachined inductors with electroplated magnetically anisotropic
alloy cores,” Proceedings of the Fifth International Symposium on
Magnetic Materials, Processes, and Devices Applications to Storage and
Microelectromechanical Systems (MEMS), 1999, p 389-401 1998
Journal 191. Taylor
, W.P., Brand, O., and Allen, M.G., "Fully Integrated Magnetically
Actuated Micromachined Relays," IEEE/ASME Journal of
Microelectromechanical Systems, vol. 7, no.2, pp. 181-191, 1998. (PDF) 192. Kim,
Y.J., and Allen, M.G., "Surface Micromachined Solenoid Inductors for
High Frequency Applications," IEEE Transactions on Components,
Packaging & Manufacturing Technology, Part C (Manufacturing),
vol. 21, no. 1, pp. 26-33, 1998. (PDF) 193. Chahal,
P., Tummala, R.R., Allen, M.G., and Swaminathan, M., "A Novel Integrated
Decoupling Capacitor for MCM-L Technology," IEEE Transactions on
Components, Packaging and Manufacturing Technology, Part B: Advanced
Packaging, vol. 21, no. 2, pp.184-193, 1998. (PDF) 194. Henry,
S., McAllister, D.V., Allen, M.G., and Prausnitz, M.R., "Microfabricated
Microneedles: A Novel Approach to Transdermal Drug Delivery," Journal
of Pharmaceutical Sciences, vol. 87, no. 8, pp. 922-925, 1998. (PDF) 195. Park,
J.Y. and Allen, M.G., "Development of Magnetic Materials and Processing
Techniques Applicable to Integrated Micromagnetic Devices," accepted by Journal
of Micromechanics and Microengineering (letter of acceptance
received October, 1998; to be published December, 1998). (PDF) 196. Park,
J.Y. and Allen, M.G., “Packaging-Compatible Microinductors and
Microtransformers with Screen-Printed Ferrite using Low Temperature
Processes,” IEEE Transactions on Magnetics, vol.34, no.4, pt.1, p.1366-8
(1998) (PDF) 197. Ahn,
C.H. and Allen, M.G. “Micromachined Planar Inductors on Silicon Wafers for
MEMS Applications,” IEEE Transactions on Industrial Electronics, vol.45,
no.6, p.866-76 (1998) (PDF) Conference 198. Chahal,
P.; Tummala, R.R.; Allen, M.G.; White, G.E, “Electroless Ni-P/Ni-W-P thin-film resistors
for MCM-L based technologies,” 1998 Proceedings. 48th
Electronic Components and Technology Conference 1998, p 232-239. (PDF) 199. Allen
M.G., Taylor , W.P., and Kim, K., "Integrated Magnetic Microrelays:
Multiple Device Configurations," Proceedings of the National Association
of Relay Manufacturers, Orlando , FL, April, (1998). 200. Park, J.Y., and Allen, M.G., "Electroplated and Screen-Printed Magnetic Materials Applicable to Micromachined Magnetic Devices," Proc. Micromachining & Microfabrication '98 Conference, SPIE, vol. 3512, pp. 154-167, Santa Clara, CA, 1998. 201. Park, J.Y., and Allen, M.G., "Micromachined High Q Inductors for High Frequency Applications," Proc. Micromachining & Microfabrication '98 Conference, SPIE, vol. 3514, pp. 218-228, Santa Clara , CA 1998 (PDF) 202. Chang,
S.P., Lee, J.B., and Allen, M.G., "A Robust 8x8 Capacitive Pressure
Sensor Array," submitted to the American Society of Mechanical Engineers
Winter Annual Meeting, Proc.MEMS 98, p. 513-517, 1998 (from the 1998 ASME
Winter Annual Meeting, Anaheim, CA). (PDF) 203. Agarwal,
V., Chahal, P.; Tummala, R.R.; Allen, M.G., “Improvements and recent advances in
nanocomposite capacitors using a colloidal technique,” 1998
Proceedings. 48th Electronic Components and Technology Conference (Cat.
No.98CH36206), 1998, p 165-70. (PDF) 204. Young-Jun
Kim, Allen, M.G., “Integrated solenoid-type inductors for high frequency applications and
their characteristics,” 1998 Proceedings. 48th Electronic
Components and Technology Conference (Cat. No.98CH36206), 1998, p
1247-52. (PDF) Journal 205. Lee,
J.B., English, J., Ahn, C.-H., and Allen, M.G., "Planarization
Techniques for Vertically Integrated Metallic MEMS on Silicon Foundry
Circuits," Journal of Micromechanics and Microengineering,
vol. 7, no. 2, pp. 44-54, 1997. (PDF) 206. Lagorce,
L.K. and Allen, M.G., "Magnetic and Mechanical Properties of Micromachined
Strontium Ferrite/Polyimide Composites," IEEE/ASME Journal of
Microelectromechanical Systems, vol. 6, no. 4, pp. 307-312, 1997.
(PDF) 207. Frazier,
A.B. and Allen, M.G., "Uses of Electroplated Aluminum for the
Development of Microstructures and Micromachining Processes," IEEE/ASME
Journal of Microelectromechanical Systems, vol. 6, no. 2, pp.
91-98, 1997. (PDF) 208. Park,
J.Y., Lagorce, L.K., and Allen, M.G., "Ferrite-Based Integrated Planar
Inductors and Transformers Fabricated at Low Temperature," IEEE
Transactions on Magnetics, vol. 33, no.5, pt. 1, pp. 3322-3324, 1997. (PDF) Conference 209. Allen,
M.G., "Micromachined Intermediate and High Frequency Inductors,"
Proceedings of 1997 IEEE International Symposium on Circuits and Systems
ISCAS, Hong Kong, pp. 2829-32, vol.4, 1997. (PDF) 210. Brand,
O., English, J.M., Bidstrup, S.A., and Allen, M.G., "Micromachined
Viscosity Sensor for Real-Time Polymerization Monitoring," Proceedings
of the 9th International Conference on Solid State Sensors and Actuators
(Transducers '97), Chicago, IL, pp. 121-124, vol. 1, June, 1997 (PDF) 211. Taylor,
W.P. and Allen, M.G., "Integrated Magnetic Microrelays: Normally Open,
Normally Closed, and Multi-Pole Devices," Proceedings of the 9th
International Conference on Solid State Sensors and Actuators (Transducers
'97), Chicago, IL, pp. 1149-1152, vol.2, June, 1997 (PDF) 212. Taylor,
W.P., Schneider, M., Baltes, H., and Allen, M.G., "Electroplated Soft
Magnetic Materials for Microsensors and
Microactuators," Proceedings of the 9th International Conference on
Solid State Sensors and Actuators (Transducers '97), Chicago, IL, pp. 1445-8,
vol. 2, June, 1997 (PDF) 213. Taylor
, W.P., Dauwalter, C.R., and Allen, M.G., "Fully Integrated Magnetically
Actuated Microrelays," Proceedings of the National Association of Relay
Manufacturers, Orlando , FL, April, 1997. 214. Park,
J.Y., and Allen, M.G., "Low Temperature Fabrication and Characterization
of Integrated Packaging-Compatible, Ferrite-Core Magnetic Devices,"
Proceedings of the IEEE Applied Power Electronics Conference, Atlanta, GA,
pp. 361-367, vol. 1, February, 1997. (PDF) 215. Park,
J.Y., Bhattacharya, S., and Allen, M.G., "Fully Integrated Passives
Modules for Filter Applications using Low Temperature Processes," IMAPS Proceedings
of the 1997 International Symposium on Microelectronics (SPIE vol. 3235),
Philadelphia, PA, pp. 592-597, October, 1997. (PDF) 216. Kim,
Y.J. and Allen, M.G., "Surface Micromachined Solenoid Inductors for High
Frequency Applications," IMAPS Proceedings of the 1997 International
Symposium on Microelectronics (SPIE vol. 3235), Philadelphia , PA, pp. 1-6,
October, 1997. (PDF) Journal 217. Carter-Coman,
C., Brown, A.S., Bicknell-Tassius, R., Jokerst, N.M, and Allen, M.G.,
"Strain-Modulated Epitaxy: A Flexible Approach to 3-D Band Structure
Engineering Without Surface Patterning," Applied Physics Letters,
vol. 69, no. 2 pp. 257-259, 1996. (PDF) 218. Ahn,
C.H. and Allen, M.G., "A Comparison of Two Micromachined Inductors (Bar-
and Meander-Type) for Fully Integrated Boost DC/DC Power Converters," IEEE
Transactions on Power Electronics, vol. 11, no. 2, pp. 239-245,
1996. (PDF) 219. Ahn,
C.H., Allen, M.G., Trimmer, W., Jun, Y.-N., and Erramilli, S., "A Fully
Integrated Micromachined Magnetic Particle Separator," IEEE/ASME
Journal of Microelectromechanical Systems, vol. 5, no. 3, pp.
151-158, 1996. (PDF) 220. Nami,
Z., Ahn, C.H., and Allen, M.G., "An Energy-Based Design Criterion for
Magnetic Microactuators," Journal of Micromechanics and
Microengineering, vol. 6, no. 3, pp. 337-44, 1996. (PDF) 221. Lee,
J.B., Allen, M.G., Hodge, T.C., Bidstrup, S.A., and Kohl, P.A.,
"Modeling of Substrate-Induced Anisotropy in Through-Plane Thermal
Behavior of Polymeric Thin Films," Journal of Polymer Science,
Part B (Polymer Physics), vol. 34, no. 9, pp. 1591-6, 1996. (PDF) Conference 222. Konaka,
Y. and Allen, M.G., "Single and Multilayer Electroplated
Microaccelerometers," Proceedings of the IEEE Microelectromechanical
Systems Workshop, San Diego CA,
pp.168-173, February, 1996. (PDF) 223. Lagorce,
L.K., and Allen, M.G., "Micromachined Polymer Magnets," Proceedings
of the IEEE Microelectromechanical Systems Workshop, San Diego, CA, pp.
85-90, February,1996. (PDF) 224. Lagorce,
L.K. and Allen, M.G., "Ferrite Filled Polymers for Integrated Power
Conversion Devices," IMAPS Proceedings of the 1996 International
Symposium on Microelectronics (SPIE vol. 2920), Minneapolis MN, pp. 176-180, October, 1996. (PDF) 225. Taylor, W.P., Allen, M.G., and Dauwalter, C.R., "A Fully Integrated Magnetically Actuated Micromachined Relay," Technical Digest, Solid State Sensor and Actuator Workshop, Hilton Head, SC, pp. 231-234, June, 1996. (PDF) 226. Chahal,
P., Tummala, R., Allen, M.G., and Swaminathan, M., "A Novel Integrated
Decoupling Capacitor for MCM-L Technology," Proceedings of the 46 th
Electronic Components and Technology Conference, Orlando, FL, pp. 125-132, May,
1996. (PDF) 227. Chahal,
P., Tummala, R.R., and Allen, M.G., "Integrated Capacitors using
Polymer-Ceramic Components for MCM-L", IMAPS Proceedings of the 1996
International Symposium on Microelectronics (SPIE vol. 2920), Minneapolis,
MN, pp. 126-131, October, 1996. (PDF) 228. Baker,
M., Brand, O., Allen, M., and May, G., "A Micromachined Sensor for In-Situ Monitoring of Plasma Etching," Proceedings of the 54th
Device Research Conference, Santa Barbara, CA, pp. 120-121, June, 1996. (PDF) 229. Park,
J.Y. and Allen, M.G., "A Comparison of Micromachined Inductors with
Different Magnetic Core Materials," Proceedings of the 46 th Electronic
Components and Technology Conference, Orlando, FL, pp. 120-125, May, 1996 (PDF) 230. Park,
J.Y. and Allen, M.G., "High Current Integrated Microinductors and
Microtransformers using Low Temperature Fabrication Processes," IMAPS
Proceedings of the 1996 International Symposium on Microelectronics (SPIE
vol. 2920), Minneapolis, MN, pp. 120-125, October, 1996. (PDF) 1995 Journal 231. Lee, J.B., Chen, Z., Allen, M.G., Rohatgi,
A., and Arya, R., "A Miniaturized High-Voltage Solar Cell Array as an Electrostatic
MEMS Power Supply," EEE/ASME Journal of Microelectromechanical Systems,
vol. 4, no. 3,pp. 102-108, 1995. (PDF) Conference 232. Allen,
M.G., "Integrated Inductors for Low Cost Electronic Packages”, Technical
Digest, International Electron Devices Meeting," Washington, DC, pp.
137-141, December 1995.(invited address to Novel Technologies and
Opportunities Symposium of IEDM). (PDF) 233. Schneider,
M., Castagnetti, R., Allen, M.G., and Baltes, H., "Integrated Flux
Concentrator Improves CMOS Magnetotransistors,"
Proceedings of the IEEE Microelectromechanical Systems Workshop, Amsterdam,
Netherlands, pp. 151-156, 1995. (PDF) 234. Ahn,
C.H. and Allen, M.G., "Fluid Micropumps Based on Rotary Magnetic
Actuators, "Proceedings of the IEEE Microelectromechanical Sstems
Workshop, Amsterdam, Netherlands, pp. 408-412, 1995. (PDF) 235. Ahn,
C.H. and Allen, M.G., "Micromachined Planar Inductors with Electroplated
Nickel-Iron Permalloy Cores (spiral type, solenoid type, and toroidal-meander
type)", Proceedings of the Fourth International Symposium on Magnetic
Materials, Processes, and Devices (Electrochemical Society Fall Meeting),
Chicago, Illinois, pp. 411-425, October, 1995. (PDF) 236. Coe, D.J., Allen, M.G., Smith, B.L., and Glezer, A., "Addressable Micromachined Jet Arrays," Proceedings of the 8th International Conference on Solid State Sensors and Actuators (Transducers '95), Stockholm, Sweden, vol. 2, pp. 329-332, June, 1995. (PDF) 1994
Journal 237. Ahn,
C.H. and Allen, M.G., "New Toroidal-Meander-Type Integrated Inductor
with a Multilevel Meander
Magnetic Core," IEEE Transactions on Magnetics, vol. 30, no. 1,
pp. 73-79, 1994. (PDF) 238. Ahn,
C.H., Kim, Y.J., and Allen, M.G., "A Fully Integrated Planar Toroidal
Inductor with a Micromachined Nickel-Iron Magnetic Bar," IEEE Transactions
on Components, Packaging, and Manufacturing Technology, Part A,
vol. 17, no. 3, pp. 463-469, 1994. (PDF) 239. Frazier,
A.B., Olson, C.S, Turner, S.P., and Allen, M.G., "Characterization of
Graphite-Filled Polyimide Thin Films Using Micromachining Techniques," International
Journal of Microcircuits and Electronic Packaging, vol. 17, no. 1,
pp. 37-49, 1994. (PDF) 240. Frazier,
A.B., Ahn, C.H., and Allen, M.G., "Development of Micromachined Devices
using Polyimide-Based Processes," Sensors and Actuators A (Physical),
vol. A45, no. 1, pp. 47-55, 1994. (PDF) 241. Wilkinson,
S.T., Kim, Y.W., Jokerst, N.M., and Allen, M.G., "Integration of Thin
Film Optoelectronic Devices onto Micromachined Movable Platforms," IEEE
Photonics Technology Letters, vol. 6, no. 9, pp. 1115-1118, 1994. (PDF) Conference 242. Frazier, A.B., Powers, R.M., and
Allen, M.G. , “Thin Film Programmable Arrays,” Proceedings of MEMS’04.
(PDF) 243. Bidstrup S.A., Hodge T.C., Linn L.,
Paul A. Kohl, J.B. Lee and Mark G. Allen, “Anisotropy in Thermal,
Electrical and Mechanical Properties of Spin-Coated Polymer
Dielectrics," in Materials
Research Society Symposium Proceedings no. 338, Materials Reliability in
Microelectronics, pp. 577-587, Pittsburgh, PA, 1994 (from the 1994 MRS Spring
Meeting, San Francisco, CA). (PDF) 244. Allen, M.G., “Design, Fabrication, and
Application of Magnetic Microactuators,” Proceedings of the 5th
International Symposium on Micro Machine and Human Science, Nagoya, Japan,
p.5, October, 1994. (invited plenary
address). (PDF) 245. Chung, C. and Allen, M.G., "Measurement of Mechanical Properties of Electroplated Nickel-Iron Alloys," American Society of Mechanical Engineers Dynamic Systems and Control Division, vol. 55, pp. 453-457, ASME, New York, NY, 1996 (from the 1996 ASME Winter Annual Meeting, Atlanta, GA). 246. Ahn,
C.H., and Allen, M.G., "A Comparison of Two Micromachined Inductors
(bar-type and meander-type) for Fully Integrated Boost DC/DC Power Converters,"
Proceedings of the Ninth Annual IEEE Applied Power Electronics Conference,
Orlando, FL, vol. 1, pp. 10-16, February, 1994. (invited plenary address) (PDF) 247. Ahn,
C.H. and Allen, M.G., "A Fully Integrated Micromachined Magnetic
Particle Manipulator and Separator," Proceedings of the IEEE Microelectromechanical
Systems Workshop, Oiso, Japan, pp. 91-96, 1994. (PDF) 248. Ahn,
C.H. and Allen, M.G., "A Comparison of Two Micromachined Inductors for
Fully Integrated Boost DC/DC Power Converters," Proceedings of the IEEE
Applied Power Electronics Conference, Orlando, FL, pp. 10-16, vol. 1,
February, 1994. (PDF) 249. Lee,
J.B., Chen, Z., Allen, M.G., Rohatgi, A., and Arya, R., "A High Voltage
Solar Cell Array as an Electrostatic MEMS Power Supply," Proceedings of
the IEEE Microelectromechanical Systems Workshop, Oiso, Japan, pp. 331-336,
1994. (PDF) 250. Coe, D., Trautman, M.A., Allen, M.G., and Glezer, A., "Micromachined Jets for Manipulation of Macro Flows," Technical Digest, Solid State Sensor and Actuator Workshop, Hilton Head, SC, pp. 243-247, 1994. 251. Wang, Y., Fike, S., Allen, M.G., and Jokerst, N.M., "Measurement of Adhesion of GaAs Thin Films Using the Blister Test," Proceedings of the Annual Meeting of the Adhesion Society, Orlando, FL, February, 1994. 252. Hodge,
T.C., Bidstrup, S.A., Kohl, P.A., Lee, J.B., and Allen, M.G., "An In-Situ
Measurement Technique for Through-Plane Thermal Properties of Thin Dielectric
Films," Proceedings of the 1994 International Conference and Exhibition
on Multichip Modules (SPIE vol. 2256), Denver, CO, pp. 344-349, 1994. (PDF) 253. Hodge, T.C., Kohl, P. A., Bidstrup, S. A., Lee, J. B., and Allen, M. G., "In-Situ Thermal Expansion Measurements of Interlevel Dielectric Polymer Films," Fifth International Conference on Polyimide Films, Ellenville, NY, November, 1994. (PDF) Journal 254. Frazier,
A.B. and Allen, M.G., "Piezoresistive Graphite/Polyimide Thin Films for
Micromachining Applications," Journal of Applied Physics (73), pp.
4428-4433, 1993. (PDF) 255. Frazier,
A.B. and Allen, M.G., "Metallic Microstructures Fabricated Using Photosensitive
Polyimide Electroplating Molds," IEEE/ASME Journal of
Microelectromechanical Systems, vol. 2, no. 2, pp. 87-94, 1993.(PDF) 256. Ahn,
C.H. and Allen, M.G., "A Planar Micromachined Spiral Inductor for
Integrated Magnetic Microactuator Applications," Journal of
Micromechanics and Microengineering, vol. 3, no. 2, pp. 37-44, 1993. (PDF) 257. Ahn,
C.H. and Allen, M.G., "A Fully Integrated Surface Micromachined Magnetic
Microactuator with a Multilevel Meander Magnetic Core," IEEE/ASME
Journal of Microelectromechanical Systems, vol. 2, no. 1, pp.
15-22, 1993. (PDF) 258. Ahn, C.H., Kim, Y.J., and Allen, M.G., "A Planar Variable Reluctance Magnetic Micromotor with Fully Integrated Stator and Coils," IEEE/ASME Journal of Microelectromechanical Systems, vol. 2, no. 4, pp. 165-73, 1993. (PDF) Conference 259. Allen,
M.G., "Polyimide-based Processes
for the Fabrication of Thick Electroplated Microstructures,"
Proceedings of the Seventh International Conference On Solid State Sensors
and Actuators (Transducers '93), Yokohama, Japan, pp. 60-65, June, 1993. (PDF) 260. Nami, Z., Ahn, C.H., and Allen, M.G., "Magnetic Analysis of an Overlapped Cantilever Beam Using Finite Elements," American Society of Mechanical Engineers Dynamic Systems and Control Division, vol. 46, pp. 1-6, ASME, New York, NY, 1993 (from the 1993 ASME Winter Annual Meeting, New Orleans, LA). 261. Ahn,
C.H., Kim, Y.J., and Allen, M.G., "A Planar Variable Reluctance Micromotor
with Fully Integrated Stator and Wrapped Coils," Proceedings of the IEEE
Microelectromechanical Systems Workshop, Fort Lauderdale, FL, pp. 1-6,
February, 1993. (PDF) 262. Ahn,
C.H. and Allen, M.G., "A Fully Integrated Micromachined Toroidal
Inductor With A Nickel-Iron Magnetic Core," Proceedings of the Seventh
International Conference On Solid State Sensors and Actuators (Transducers
'93), Yokohama, Japan, pp. 70-73, June, 1993. (PDF) 263. Rashidian,
B. and Allen, M.G., "Electrothermal Microactuators Based On Dielectric
Loss Heating," Proceedings of the IEEE
Microelectromechanical Systems Workshop, Fort Lauderdale, FL, pp.
24-29, February, 1993. (PDF) 264. Frazier,
A.B., O'Brien, D., and Allen, M.G., "Two Dimensional Metallic
Microelectrode Arrays for Recording and Stimulation of Neurons,"
Proceedings of the IEEE Microelectromechanical Systems Workshop, Fort
Lauderdale, FL, pp. 195-200, February, 1993. (PDF) 265. Wilkinson,
S., Kim, Y. W., Allen, M. G., and Jokerst, N. M., "Integration of Thin
Film Compound Semiconductor Photonic Devices Onto Micromachined Movable
Platforms," Proceedings of the Seventh International Conference On Solid
State Sensors and Actuators (Transducers '93), Yokohama, Japan, pp. 148-151,
June, 1993. (PDF) 266. Wilkinson,
S., Kim, Y., Jokerst, N., and Allen, M.G., "Integration of Thin Film
Devices Onto Micromachined Movable Platforms," Proceedings of the IEEE
Lasers and Electro Optics Society Annual Meeting, pp. 98-99, San Jose, CA,
November, 1993. (PDF) Journal 267. Kim, Y.W. and Allen, M.G., "Single and Multilayer Surface Micromachined Platforms Using Electroplated Sacrificial Layers," Sensors and Actuators , A35, pp. 61-68, 1992. (PDF) 268. Camperi-Ginestet, C., Kim, Y.W., Jokerst, N., Allen, M.G., and Brooke, M., "Vertical electrical interconnection of Compound Semiconductor Thin-Film Devices to Underlying Silicon Circuitry," IEEE Photonics Technology Letters, vol. 4, no. 9, pp. 1003-6, 1992. (PDF) Conference 269. Frazier,
A.B., Kahn, M.R., and Allen, M.G., "Mechanical and Piezoresistive
Properties of Graphite-Filled
Polyimide," in Materials Research Society Symposium Series no. 317,
Smart Materials Fabrication and Materials for Micro-Electro-Mechanical
Systems, pp. 295-301 Materials Research Society Press, Pittsburgh, PA, 1992
(from the 1992 MRS Spring Meeting, San Francisco, California, April, 1992). 270. Frazier,
A.B. and Allen, M.G., "Mechanical and Piezoresistive Properties of
Graphite-Filled Polyimide for Hybrid Micromachined Systems," ISHM '92
Proceedings; Proceedings of the 1992 International Symposium on
Microelectronics (SPIE vol. 1847), Los Angeles, CA, pp.41-46, October, 1992.
(PDF) 271. Camperi-Ginestet
C., Jokerst, N., Augustine G.,
Hargis M., Allen, M.G., “Alignable Deposition of Thin Film Semiconductor Materials for Integrated
Micro-Opto-Electronic Systems," in Materials Research Society Symposium
Proceedings no. 317, Smart Materials Fabrication and Materials for
Micro-Electro-Mechanical Systems, pp. 131-136, Materials Research Society Press,
Pittsburgh, PA, 1992 (from the 1992 MRS Spring Meeting, San Francisco, CA,
April, 1992 (PDF) 272. Ahn,
C.H. and Allen, M.G., "A Fully Integrated Micromagnetic Actuator with a
Multilevel Meander Inductive Core," Technical Digest, IEEE Solid State
Sensor and Actuator Workshop, Hilton Head, SC, pp. 14-18, June, 1992. (PDF) 273. Kim,
Y.W., Allen, M.G., and Hartman, N.F., "Micromechanically Based
Integrated Optic Modulators and Switches," Proceedings of the SPIE,
Boston, MA, vol. 1793, pp. 183-189, September, 1992. (PDF) Journal 274. Camperi-Ginestet,
C., Hargis, M., Jokerst, N., and Allen, M.G., "Alignable Epitaxial
Liftoff of Gallium Arsenide Materials with Selective Deposition Using
Polyimide Diaphragms," IEEE Photonics Technology Letters, vol. 3,
no. 12, pp. 1123-1125, 1991. (PDF) Conference 275. Frazier, A.B., Babb, J.W., Allen, M.G., and Taylor, D.G., "Design and Fabrication of Electroplated Micromotor Structures," American Society of Mechanical Engineers Dynamic Systems and Control Division, vol. 32, pp. 135-148, ASME, New York, NY, 1991 (from the1991 ASME Winter Annual Meeting, Atlanta, GA). 276. Rashidian, B. and Allen, M.G.,
"Integrated Piezoelectric Polymers for Microsensing and Microactuation
Applications," American Society of Mechanical Engineers Dynamic Systems
and Control Division, vol. 32, pp. 171-179, ASME, New York, NY, 1991 (from
the 1991ASME Winter Annual Meeting, Atlanta, GA). (PDF) 277. Kim, Y.W. and Allen, M.G., "Surface Micromachined Platforms Using Electroplated Sacrificial Layers," Proceedings of the Sixth International Conference On Solid State Sensors and Actuators (Transducers '91), San Francisco, CA, pp. 651-654, June, 1991. (PDF) 278. Ahn,
C.H. and Allen, M.G., "Measurement of Polymer Mechanical Properties
Using Microfabricated Resonant Structures," Proceedings of the American
Chemical Society Division of Polymeric Materials: Science and Engineering,
Atlanta, Georgia, vol. 64, 1991. (PDF) 279. Camperi-Ginestet,
C., Hargis, M., Jokerst, N. M., Allen, M., and Drabik, T., "Alignable
Epitaxial Lift Off GaAs Materials Using Polyimide Diaphragms,"
Proceedings of the Integrated Photonics Research Topical Meeting, vol. 8, pp.
27-28, IEEE and Optical Society of America, Monterey, California, April,
1991. (PDF) Journal 280. Allen, M.G., Nikolich, A., Scheidl, M., and Smith, R.L., "Movable Micromachined Silicon Plates with Integrated Position Sensing," Sensors and Actuators, A21-A23, pp. 211-214, 1990. (PDF) Conference 281. Allen,
M.G., Nagarkar, P., and Senturia, S.D., “An XPS Analysis of
Polymide/Substrate Fracture Surfaces,” Proceedings of the Society of
Plastics Engineers Annual Technical Conference, vol. 36, Dallas,
Texas, May 1990. (PDF) Journal 282. Allen, M.G. and Senturia, S.D., "Application of the Island Blister Test for Thin Film Adhesion Measurement," Journal of Adhesion, vol. 29, pp. 219-231, 1989. (PDF) Conference 283. Allen,
M.G., Scheidl, M., and Smith, R.L., "Design and Fabrication of Movable
Silicon Plates Suspended by Flexible Supports," Proceedings of the IEEE
Microelectromechanical Systems Workshop, Salt Lake City, UT, pp. 76-81,
February, 1989. (PDF) 284. Allen,
M.G., Nikolich, A., Scheidl, M., and Smith, R.L., "Movable Micromachined
Silicon Plates With Integrated Position Sensing," Proceedings of the
Fifth International Conference On Solid State Sensors and Actuators
(Transducers '89), Montreux, Switzerland, June, 1989. (PDF) 285. Nagarkar,
P.V., Searson, P.C., Belluci, F., Allen, M.G., and Latanision, R.M.,
"Interfacial Interactions Affecting Polyimide Reliability,"
Proceedings of the 39th Electronic Components Conference, Houston, Texas, pp.
160-166, May, 1989. (PDF) Journal 286. Allen,
M.G. and Senturia, S.D., "Analysis of Critical Debonding Pressures of
Stressed Thin Films in the Blister Test," Journal of Adhesion,
vol. 25, pp. 303-315, 1988. (PDF) Conference 287. Maseeh,
F., Schmidt, M.A., Allen, M.G., and Senturia, S.D., "Calibrated
Measurements of Elastic Limit, Modulus, and Residual Stress of Thin Films
Using Micromachined Suspended Membranes," Technical Digest, IEEE Solid
State Sensors Workshop, Hilton Head, SC, pp. 84-87, June, 1988. (PDF) 288. Allen,
M.G. and Senturia, S.D., "Polyimide-Metal Adhesion Measurement Using
Microfabricated Structures," Proceedings of the Society of Plastics
Engineers Annual Technical Conference, Atlanta, Georgia, vol. 34, pp.
997-999, April, 1988. (PDF) 289. Allen,
M.G. and Senturia, S.D., "Measurement of Polyimide Interlayer Adhesion
Using Microfabricated Structures," presented at the Symposium on
Polymeric Materials for Electronic Packaging of the American Chemical
Society, Proceedings of the American Chemical Society Division of Polymeric
Materials: Science and Engineering, Los Angeles, California, vol. 59, pp.
352-356, September, 1988. (PDF) Journal 290. Allen, M.G., Mehregany, M., Howe,
R.T., and Senturia, S.D., “Microfabricated Structures for the In- Situ
Measurement of Residual Stress, Young’s Modulus, and Ultimate Strain of Thin
Films,” Applied Physics Letters, vol. 51, no. 4, pp. 241- 244, 1987.
(PDF) Conference 291. Allen,
M.G. and Senturia, S.D., "Microfabricated Structures for the Measurement
of Adhesion and Mechanical Properties of Polymer Films," Proceedings of
the American Chemical Society Division of Polymeric Materials: Science and
Engineering, Denver, Colorado, vol. 56, pp.735-739, April 1987. (PDF) Conference 292. Mehregany,
M., Allen, M.G., and Senturia, S.D., "The Use of Microfabricated
Structures for the Measurement of Mechanical Properties and Adhesion of
Polymer Films," Technical Digest, IEEE Solid State Sensors Workshop,
Hilton Head, SC, pp. 58-61, June, 1986. (PDF) Journal 293. Hasan,
T., Allen, M.G., and Cooperman, B.S., "Anhydrotetracycline is a Major
Product of Tetracycline Photolysis," Journal of Organic Chemistry, vol.
50, no. 10, pp. 311-313, 1985.
(PDF) Thesis “Microfabricated air-turbine and heat-engine-driven
permanent magnet generators” by
Herrault, Florian (2009) “Laminated chemical and physical microjet actuators
based on conductive media” by
Gadiraju, Priya (2008) “A reconfigurable tactile display based on polymer
MEMS technology” by Wu, Xiaosong
(2008) “A micromachined magnetic field sensor for low power
electronic compass applications” by
Choi, Seungkeun (2007) “An electrically active microneedle electroporation
array for intracellular delivery of biomolecules” by Choi, Seong-O (2007) “Polymer/ceramic wireless MEMS pressure sensors for
harsh environments: High temperature and biomedical applications” by Fonseca, Michael A.(2007) “Laminated gas generator
actuator arrays” by English, Brian Alan (2006) “Magnetic machines for microengine power generation” by Arnold,
David Patrick (2004) “Core lamination technology for micromachined power inductive
components” by Park, Jin-Woo (2004) “Micromachined components for RF systems” by Yoon, Yong-Kyu (2004) “Hollow microneedles for molecular transport across skin” by Davis, Shawn Paul (2003) “Electroplating bonding technology for chip
interconnect, wafer level packaging and interconnect layer structures” by Joung, Yeun-Ho (2003) “Robust micromachined capacitive pressure sensors
for mechanically harsh environments”
by Chang, Sung Pil (2002) “Fabrication technology approaches to micromachined synthetic jets”
by Coe, David James (2002) “Wireless micromachined ceramic pressure sensors for high temperature
environments” by English, Jennifer Marie (2000) “A micromachined pendulous oscillating gyroscopic accelerometer”
by Kaiser, Todd Jeffrey (2000) “Microfabricated needles for transdermal drug delivery” by
McAllister, Devin Vincent (2000) “Micromachined microelectrode arrays for stimulation of neural tissue”
by O'Brien, David Patrick (2000) “Integral resistors and capacitors for mixed-signal packages using
electroless plating and polymer-ceramic nanocomposites” by Chahal,
Premjeet (1999) “Application of polymer/metal multilayer processing techniques to
microelectromechanical systems” by Kim, Yong-Jun (1997) “Micromachined movable platforms as integrated optic devices” by
Kim, Young Woon (1997) “Strategies for realization of integrated microelectromechanical
systems: On-board power, silicon circuitry, multichip modules” by Lee,
Jeong-Bong (1997) “Packaging-compatible micromachined magnetic
devices: Integrated passive components and modules” by Park, Jae Yeong (1997) “The design and fabrication of fully integrated magnetically actuated
micromachined relays” by Taylor, William Patrick (1997) “Micromachined components as integrated inductors and magnetic
microactuators” by Ahn, Chong-Hyuk (1993) “The use of polyimide for the development of micromachined materials,
processes and devices” by Frazier, Albert Bruno (1993) “Micromachined devices based on polyvinylidene
fluoride-trifluoroethylene” by Rashidian, Bizhan (1993) |
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modified on November 12, 2009 |
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