MicroSensors and MicroActuators

Georgia Tech MEMS group

 

 

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Conference Papers

2008     2007     2006     2005    2004    2003    2002    2001

Journal Papers

2008     2007     2006     2005    2004    2003    2002    2001

Papers Published Before 2001

2000     1999     1998     1997     1996     1995     1994     1993

1992     1991     1990     1989     1988    1987     1986     1985

Thesis

 

Conference Papers

     2008

Top of page

 

1.        S.-H. Kim, C.-H. Ji, P. Galle, F. Herrault, X. Wu, J.-H. Lee, C.-A. Choi, and M. G. Allen, “An Electromagnetic Energy Scavenger from Direct Airflow,” in Proc. PowerMEMS 2008, pp. 133-136, 2008. (PDF)

 

2.        B. C. Yen, F. Herrault, K. J. Hillman, M. G. Allen, F. F. Ehrich, S. Jacobson, C.-H. Ji, J. H. Lang, H. Li, Z. S. Spakovszky, and D. R. Veazie, “Characterization of a fully-integrated permanent-magnet turbine generator,” in Proc. PowerMEMS 2008, pp. 121-124, 2008. (PDF)

 

3.        Swaminathan Rajaraman, Yanzhu Zhao, Xiaosong Wu, Seong-Hyok Kim and Mark G. Allen, “Metal transfer micromolding (MTM) process for high-aspect-ratio 3-D structures with functional metal surfaces,” in Tech. Dig. International Symposium on Flexible Automation (ISFA 2008), Atlanta, USA, June 2008. (PDF)

 

4.        Yanzhu Zhao, Seong-Hyok Kim, Yuan Li, Bo Pan, Xiaosong Wu, Emmanouil M. Tentzeris, John Papapolymerou, Mark G. Allen, “A micromachined airflow sensor based on RF evanescent-mode cavity tesonator,” in Tech. Dig. International Microwave Symposium (IMS 2008), Atlanta, USA, June 2008. (PDF)

 

5.        Florian Herrault, Thomas Crittenden, Svyatoslav Yorish, Edward Birdsell, Ari Glezer, and Mark G. Allen, “A self-resonant, MEMS-fabricated, air-breathing engine,” Tech. Dig. Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2008), pp. 348-351, June 2008. (PDF)

 

6.        Xiaosong Wu, Seong-Hyok Kim, Chang-Hyeon Ji, and Mark G. Allen,”A piezoelectrically-driven high flow rate axial polymer microvalve with solid hydraulic amplification,” Tech. Dig. 21st IEEE Int. Conf. Micro Electro Mechanical Systems (MEMS 2008), pp.523-526, Tucson, USA, January 2008. (PDF)

 

7.        Jungkwun Kim, Mark G. Allen, and Yong-Kyu Yoon, “Automated dynamic mode multidirectional UV lithography for complex 3-D microstructures,” Tech. Dig. 21st IEEE Int. Conf. Micro Electro Mechanical Systems (MEMS 2008), pp.399-402, Tucson, USA, January 2008. (PDF)

 

8.        Florian Herrault, Chang-Hyeon Ji, Seong-Hyok Kim, Xiaosong Wu, and Mark G. Allen, “A microfluidic-electric package for Power MEMS generators,” Tech. Dig. 21st IEEE Int. Conf. Micro Electro Mechanical Systems (MEMS 2008), pp.112-115, Tucson, USA, January 2008. (PDF)

 

 

     2007

Top of page

 

9.        Zhan Liu, David G. Bucknall, and Mark G. Allen,  “Fabrication of Three-Dimensional Nano-Patterns by Inclined Nanoimprinting Lithography,”  In Proc. Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.1621-1624, Lyon, France, June 10-14, 2007. (PDF)

 

10.     Swaminathan Rajaraman, Maxine A. McClain, Seong-O Choi, James D. Ross, Stephen P. DeWeerth, Michelle C. LaPlaca, and Mark G. Allen, “Three-Dimensional Metal Transfer Micromolded Microelectrode Arrays (MEAS) For In-Vitro Brain Slice Recordings,In Proc. Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.1251-1254, Lyon, France, June 10-14, 2007. (PDF)

 

11.     F. Herrault, C.-H. Ji, R.H. Shafer, S.-H. Kim, and M.G. Allen “Ultraminiaturized Milliwatt-Scale Permanent Magnet Generators,” In Proc. Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.899-902, Lyon, France, June 10-14, 2007. (PDF)

 

12.     F. Herrault, C.-H. Ji, S. Rajaraman, R.H. Shafer, and M.G. Allen, “Electrodeposited Metal Structures In High Aspect Ratio Cavities Using Vapor Deposited Polymer Molds And Laser Micromachining” In Proc. Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.513-516, Lyon, France, June 10-14, 2007. (PDF)

 

13.     Seungkeun Choi, Seong-Hyok Kim, Yong-Kyu Yoon, and Mark G. Allen “Exploitation of Nonlinear Effects for Enhancement of the Sensing Performance of Resonant Sensors” In Proc. Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.745-748, Lyon, France, June 10-14, 2007. (PDF)

 

14.     Priya D. Gadiraju, Jung-Hwan Park, Jeong Woo Lee, and Mark G. Allen, “Micro-Ablation of Skin by Arc-Discharge Jet Ejection for Transdermal Drug Delivery” In Proc. Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.1947-1950, Lyon, France, June 10-14, 2007. (PDF)

 

15.     Xiaosong Wu, Haihong Zhu, Seong-Hyok Kim, and Mark G. Allen, “A portale pneumatically-actuated refreshable Braille cell,” In Proc. Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, France, June 10-14, 2007. (PDF)

 

16.     Zhao, Yanzhu; Yoon, Yong-Kyu; Wu, Xiaosong; Allen, Mark G.; “Metal-Transfer-Micromolding of Air-Lifted RF Components,” In Proc. Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, France, June 10-14, 2007. (PDF)

 

17.      Zhao, Yanzhu; Yoon, Yong-Kyu; Allen, Mark G.; “Metal-Transfer-Micromolded RF Components for System-On-Package (SOP),” in Proc. 57 Electronic Components and Technology Conference, 2007. ECTC '07. (PDF)

 

18.     Galle, Preston;   Wu, Xiaosong;   Milner, Luke;   Kim, Seong-Hyok;  Johnson, Peter;   Smeys, Peter;   Hopper, Peter;   Hwang, Kyuwoon; and   Allen, Mark G., “Ultra-Compact Power Conversion Based on a CMOS-Compatible Microfabricated Power Inductor with Minimized Core Losses,” in Proc. 57 Electronic Components and Technology Conference, 2007. ECTC '07. (PDF

 

 

 

 

     2006

Top of page

 

19.     Pan, B., DeJean, G., Papapolymerou, J., Tentzeris, M.M., Yoon, Y., Allen, M.G., “High performance system-on-package integrated Yagi-Uda antennas for W-band applications and mm-wave ultra-wideband data links,” 56th Electronic Components & Technology Conference (IEEE Cat. No. 06CH37766C), 2006. (PDF)

 

20.     E.D. Birdsell, and M.G. Allen, “Wireless Chemical Sensors for High Temperature Environments,” Tech. Dig. Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF)

 

21.     S-O. Choi, S. Rajaraman, Y-K. Yoon, X. Wu, and M.G. Allen, “3-D Metal Patterned Microstructure using Inclined UV Exposure and Metal Transfer Micromolding Technology,” Tech. Dig. Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF)

 

22.     M.A. Fonseca, J. Kroh, J. White, and M.G. Allen, “Flexible Wireless Passive Pressure Sensors for Biomedical Applications,” Tech. Dig. Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF)

 

23.     X. Wu, G. Yuan, S-O. Choi, Y. Zhao, S-H. Kim, Y-K. Yoon, and M. G. Allen, "Lateral lamination approach for multilayer piezoelectric microactuator,” Tech. Dig. Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF)

 

24.     Y-K. Yoon, and M.G. Allen, “Proximity Mode Inclined UV Lithography,” Tech. Dig. Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF)

 

25.     Florian Herrault, David P. Arnold, Iulica Zana, Preston Galle, Mark G. Allen, “Multi-Watt, Microscale, Axial-Flux, Permanent-Magnet Generators Operating at High Temperatures,” Intermag 2006 Technical Digest, May 8-12, San Diego CA. (PDF)

 

26.     Seungkeun Choi, Seong-Hyok Kim, Yong-Kyu Yoon, Mark G. Allen, "A Magnetically Excited And Sensed MEMS-Based Resonant Compass," Intermag 2006 Technical Digest, May 8-12, San Diego CA. (PDF)

 

27.     Xiaosong Wu, Yanzhu Zhao, Yong-Kyu Yoon, Seong-O Choi, Jung-Hwan Park and Mark G. Allen, “Enhanced Wettability polymer micromolding by a 3-D metal transfer process,” ACS 2006, March 26-30, Atlanta GA. (PDF)

 

28.     J.S. Kenney, Y.K. Yoon, M. Ahn, M.G. Allen, Z. Zhao, X. Wang, A. Hunt, and D. Kim, “Low-Voltage Ferroelectric Phase Shifters from L- to C-Band,” IEEE Aerospace Conference, March 4-11, Big Sky, MT, 2006. (PDF)

 

29.     B.A. English, P. Gadiraju, C.S. Rinehart, A. Glezer, and M.G. Allen, “Gas Generator Actuator Arrays For Flight Control Of Spinning Body Projectiles” Tech. Dig. 19th IEEE Int. Conf. MicroElectro Mechanical Systems (MEMS 2006), Istanbul, Turkey, January 2006. (PDF)

 

30.     W. Ye, Y.-K Yoon, and M. G. Allen, “Investigation of Gas Separation Induced by Thermal Loading,” IEEE Nano/Micro Engineered and Molecular Systems (NEMS) conference, Zhuhai, China, Jan. 18-20, 2006. (PDF)

 

 

     2005

Top of page

 

31.     B Pan, Y. Yoon, J. Papapolymerou, M. Tentzeris, and M. Allen, “Design and Fabrication of Substrate-Independent Integrated Antennas Utilizing Surface Micromachining”, presented in Asian-Pacific Microwave Conference (APMC), Dec. 4-7, Suzhou,  China, 2005. (PDF)

 

32.     Zana, I., Herrault, F., Arnold, D. P., and Allen, M. G., "Magnetic patterning of permanent-magnet rotors for microscale motor/generators," in Proc. 5th Int. Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), Tokyo, Japan, pp. 116-119, November 2005. (PDF)

 

33.     Arnold, D. P., Galle, P., Herrault, F., Das, S., Lang, J. H., and Allen, M. G., "A self-contained, flow-powered microgenerator system," in Proc. 5th Int. Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), Tokyo, Japan, pp. 113-115, November 2005. (PDF)

 

34.     Arnold, D. P., Zana, I., Herrault, F., Galle, P., Park, J.-W., Das, S., Lang, J. H., and Allen, M. G., "Optimization of a microscale, axial-flux, permanent-magnet generator," in Proc. 5th Int. Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), Tokyo, Japan, pp. 165-168, November 2005. (PDF)

 

35.     Y. Zhao, X. Wu, Yong-Kyu Yoon, J.-H. Park, S.J. Kennedy, Z. Schwartz, B.D. Boyan, and M.G. Allen, “Fabrication of Micromachined Mold Masters for 3-D, High-aspect-ratio Cell Culturing Substrates”, Proceeding of 2005 ASME IMECE, Paper number IMECE2005-81991, pp.1-7, Nov. 5-11, Orlando, FL, 2005. (PDF)

 

36.     N.Naik, C. Courcimault, H. Hunter, J. Berg, J. Lee, K. Naeli, T. Wright, M. G. Allen, O. Brand, A. Glezer, W. King, “Fabrication and characterization of liquid and gaseous micro-and nanojets,“ Proceeding of 2005 ASME IMECE, Paper number IMECE2005-81698, Nov. 5-11, Orlando, FL, 2005. (PDF)

 

37.     J. Lee, K. Naeli, H. Hunter, J. Berg, T. Wright, C. Courcimault, N.Naik, M. G. Allen, O. Brand, A. Glezer, W. King, “Micro-cantilever based metrology tool for flow characterization of liquid and gaseous micro/nanojets,“ Proceeding of 2005 ASME IMECE, Paper number IMECE2005-81732, Nov. 5-11, Orlando, FL, 2005. (PDF)

 

38.     X. Wu, Y. Zhao, Yong-Kyu Yoon, S.-O. Choi, J.-H. Park, and M.G. Allen, “Wafer-scale Micromolding of Unitary Polymeric Microstructures with Simultaneously Formed Functional Metal Surface”, Proceeding of International Conference on micro Total Analysis Systems (-TAS), Boston MA, pp.205-207, Oct. 2005. (PDF)

 

39.     J. H. Park, J.-W. Park, Y.-K. Yoon, Y. Joung, S. Choi, J. Lee, M.G. Allen, M.R. Prausnitz, “Wireless thermal micro-ablation of skin for transdermal drug delivery”, presented BMES conference, Sep. 28-Oct. 1, 2005, Baltimore, MD. (PDF)

 

40.     Allen, M.G., “Implantable micromachined wireless pressure sensors: approach and clinical demonstration,” 2nd International Workshop on BSN 2005 Wearable and Implantable Body Sensor Networks, 2005, p 40-1.

 

41.     Yong-Kyu Yoon, B. Pan, J. Papapolymerou, M.M. Tentzeris, and M.G. Allen, “A Vertical W-band Surface-Micromachined Yagi-Uda Antenna”, presented in IEEE AP-S International Symposium and USNC/URSI National Raid Science Meeting in Washington, DC, July 3-8, 2005. (PDF)

 

42.     B. Pan, Yong-Kyu Yoon, J. Papapolymerou, M.M. Tentzeris, and M.G. Allen, “A High Performance Surface-Micromachined Elevated Patch Antenna”, presented in IEEE AP-S International Symposium and USNC/URSI National Raid Science Meeting in Washington, DC, July 3-8, 2005. (PDF)

 

43.     S.O. Choi, J.H. Park, Y. Choi, Y. Kim, H.S. Gill, Y.K. Yoon, M.R. Prausnitz and M.G. Allen, ”An electrically active microneedle array for electroporation of skin for gene delivery”, in Tech. Dig. 13th Int. Conf. Solid-State Sensors, Actuators, and Microsystems (Transducers 05), Seoul,  Korea, June 2005. (PDF)

 

44.     Yong-Kyu Yoon, B. Pan, M.M. Tentzeris, J. Papapolymerou, and M.G. Allen, “Surface-Micromachined Millimeter-Wave Antennas”, in Tech. Dig. 13th Int. Conf. Solid-State Sensors, Actuators, and Microsystems (Transducers 05), Seoul,Korea, Vol. 1 pp. 1986-1989, Seoul,Korea, June 5-9, 2005. (PDF)

 

45.     Arnold, D. P., Zana, I., Park, J.-W., Das, S., Joung, Y.-H., Veazie, D., Lang, J. H., and Allen, M. G., "High-speed characterization and mechanical modeling of microscale, axial-flux, permanent-magnet generators," in Tech. Dig. 13th Int. Conf. Solid-State Sensors, Actuators, and Microsystems (Transducers 05), Seoul, Korea, Vol. 1, pp. 701-704, June 2005. (PDF)

 

46.     Yoonsu Choi, S. Choi, R.H. Shafer, and M.G. Allen, “Highly Inclined Electrodeposited Metal Lines Using an Excimer Laser Patterning Technique,” in Tech. Dig. 13th Int. Conf. Solid-State Sensors, Actuators, and Microsystems (Transducers 05), Seoul, Korea, June 2005. (PDF)

 

47.     W. Martanto, Yoonsu Choi, Y. Joung, M.G. Allen, M.R. Prausnitz, “Side-Opening Hollow Microneedles for Transdermal Drug Delivery,” 32nd
Annual Meeting of the Controlled Release Society
, Florida, June, 2005. (PDF)

 

48.     S.O. Choi, J.H. Park, Y. Kim, H.S. Gill, Y. Choi, M.G. Allen and M.R. Prausnitz, “Microneedle electrode array for electroporation of skin for gene therapy”, 32nd Annual Meeting & Exposition of the Controlled Release Society (CRS, 2005), Miami, FL, USA. (PDF)

 

49.     B. Pan, Yong-Kyu Yoon, Y. Zhao, J. Papapolymerou, M.M. Tentzeris, and M.G. Allen, “A Broadband Surface-Micromachined 15-45 GHz Microstrip Coupler”, presented in IEEE International Microwave Symposium in Long Beach, CA, June 12-17, 2005. (PDF)

 

50.     G. Yuan, X. Wu, Yong-Kyu Yoon, and M.G. Allen, “Kinematically-Stabilized Microbubble Actuator Arrays”, Tech. Dig. 18th IEEE Int. Conf. MicroElectro Mechanical Systems (MEMS 2005), Miami Beach, FL, pp. 411-414, January 2005.(PDF)

 

51.     Das, S., Arnold, D. P., Zana, I., Park, J.-W., Lang, J. H., and Allen, M. G., "Multi-watt electric power from a microfabricated permanent-magnet generator," Tech. Dig. 18th IEEE Int. Conf. MicroElectro Mechanical Systems (MEMS 2005), Miami Beach, FL, pp. 287-290, January 2005. (PDF)

 

 

     2004

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52.     Jacobson, S. A., Das, S., Savoulides, N., Steyn, J. L., Lang, J. H., Li, H. Q., Livermore, C., Schmidt, M. A., Teo, C. J., Umans, S. D., Epstein, A. H., Arnold, D. P., Park, J. W., Zana, I., and Allen, M. G., "Progress toward a microfabricated gas turbine generator for soldier portable power applications," Proc. 24th Army Science Conf., Orlando, FL, November 2004. (PDF)

 

53.     E. Birdsell, J. Park, M.G. Allen, “Wireless Ceramic Sensors Operating in High Temperature Environments,” 40th AIAA Joint Propulsion Conference, July 2004. (PDF)

 

54.     Arnold, D. P., Das, S., Cros, F., Zana, I., Lang, J. H., and Allen, M. G., "Magnetic induction machines embedded in fusion-bonded silicon," Tech. Dig. Solid-State Sensor, Actuator, and MicrosystemsWorkshop (Hilton Head 2004), pp. 129-132, June 2004. (PDF)

 

55.     Yoonsu Choi, Seungkeun Choi, Richard Powers, Mark G. Allen, “Three-Dimensional Tower structures with integrated cross-connects for 3-D culturing of neurons,” Tech. Dig. Solid-State Sensor, Actuator, and MicrosystemsWorkshop (Hilton Head 2004), June 2004. (PDF)

 

56.     Yong-Kyu Yoon, Bo Pan, Peter Kirby, John Papapolymerou, Manos Tentzeris, Mark G. Allen, “Surface micromachined electromagnetically radiating RF MEMS,” Tech. Dig. Solid-State Sensor, Actuator, and MicrosystemsWorkshop (Hilton Head 2004), June 2004. (PDF)

 

57.     Zana, I., Arnold, D. P., and Allen, M. G., "Large volume, high performance electroplated Co-Pt micromagnets for MEMS applications," Proc. 205th Meet. Electrochem. Soc., Austin, TX, May 2004. (PDF)

 

58.     Arnold, D. P., Cros, F., Zana, I., Allen, M. G., Das, S., and Lang, J. H., "Second-generation, silicon-based magnetic induction machines for microengine power generation," Army Research Lab Collaborative Technology Alliances Conf., Power and Energy Technical Paper Session, Washington, DC, May 2004.

 

59.     Choi, S.O., Yoon, Y.K., Allen, M.G., Hunt, A.T., “A tunable capacitor using an immiscible bifluidic dielectric,” 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535), 2004, pt. 2, p 873-6 Vol.2. (PDF)

 

60.     Bo Pan, Y, Yoon, P. Kirby, J. Papapolymerou, M. M. Tentzeris, M. G. Allen, “A W-band surface micromachined monopole for low-cost wireless communication systems,” 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535), 2004. (PDF)

 

61.     Jung-Hwan Park, Allen, M.G., Prausnitz, M.R., “Biodegradable polymer microneedles: fabrication, mechanics and transdermal drug delivery,” Conference Proceedings. 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (IEEE Cat. No.04CH37558), 2004, pt. 4, p 2654-7 Vol.4. (PDF)

 

62.     Yanzhu Zhao, English, B.A., Yoonsu Choi, DiBiaso, H., Guang, Yuan., Allen, M.G., ”Polymeric microcombustors for solid-phase conductive fuels,” 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest (IEEE Cat. No.04CH37517), 2004, p 498-501. (PDF)

 

63.     Arnold, D. P., Zana, I., Cros, F., and Allen, M. G., "Vertically-laminated magnetic cores by electroplating Ni-Fe into micromachined Si," 9th Joint MMM-Intermag Conf., Anaheim, CA, January 2004. (PDF)

 

64.     Jung-Hwan Park, Yong-Kyu Yoon, Prausnitz, M.R., Allen, M.G., “High-aspect-ratio tapered structures using an integrated lens technique,” 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest (IEEE Cat. No.04CH37517), 2004, p 383-6. (PDF)

 

65.     S.J. Hong, S. Choi, Y. Choi, M.G. Allen, G. S. May “Characterization of Low-temperature SU-8 photoresist processing for MEMS Applications”, Presented in ASMC2004. (PDF

 

 

     2003

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66.     B.A.English, B.A., Hude, H., Allen, M.G.,"Microcombustors Based on Controllable Solid Fuel Elements," Proceedings of the 2003 ASME International Mechanical Engineering Conference and Exposition, IMECE2003-42823, Washington, D.C., November 16-21, 2003. (PDF)

 

67.     Yoonsu Choi, R. Powers, V. Vernekar, A. B. Frazier, M. LaPlaca, and M.G. Allen, "High Aspect Ratio SU-8 Structures for 3-D Culturing of Neurons," Proceedings of the 2003 ASME International Mechanical Engineering Conference and Exposition, IMECE2003-42794, Washington, D.C., November 16-21, 2003. (PDF)

 

68.     Arnold, D. P., Cros, F., Glover, T., Allen, M. G., Hillman, K., and Veazie, D., "Materials and fabrication methods for high-temperature micro-magnetic machines for micro-turbine power generation," Proc. Army Research Lab Collaborative Technology Alliances Conf., Power and Energy, College Park, MD, pp. 77-81, April 2003. (PDF)

 

69.     Cros, F., Arnold, D. P., Allen, M. G., Das, S., Koser, H., and Lang, J. H., "Micro-magnetic induction machines for portable power applications," Proc. Army Research Lab Collaborative Technology Alliances Conf., Power and Energy, College Park, MD, pp. 17-21, April 2003. (PDF)

 

70.     Koser, H. (MIT, Cambridge, MA, USA); Cros, F.; Allen, M.G.; Lang, J.H., “Magnetic diffusion modeling in nonlinear micro-media: a modified finite-difference time-domain approach,” 2003 Nanotechnology Conference and Trade Show. Nanotech 2003. Nanotech 2003 Joint Meeting. 6th International Conference on Modeling and Simulation of Microsystems, MSM 2003. 3rd International Conference on Computational Nanoscience and Technology, ICCN 2003. 2003 Workshop on Compact Modeling, WCM 2003, 2003, pt. 1, p 280-3 vol.1.

 

71.     Courcimault, C.G, Kercher, D.S.; Allen, M.G., “Microsystems for the fabrication of nano-scale structures,” TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003, pt. 1, p 730-3 vol.1. (PDF)

 

72.     Davis, S.P., Prausnitz, M.R.; Allen, M.G., “Fabrication and characterization of laser micromachined hollow microneedles,” TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003, pt. 2, p 1435-8 vol.2. (PDF)

 

73.     Hong-seok Noh, Yoonsu Choi; Chi-fu Wu; Hesketh, P.J.; Allen, M.G., “Rapid, low-cost fabrication of parylene microchannels for microfluidic applications,” TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003, pt. 1, p 798-801 vol.1. (PDF)

 

74.     Yoonsu Choi, R. Powers, Y. Yoon, M. G. Allen, "A Three-Dimensional Microfluidic Network for Cellular Perfusion," presented at µTAS 2003, 7th International Conference on Miniaturized Chemical and BioChemical Analysis Systems, Oct. 2003. (PDF)

 

75.     J. Ross, G. Prado, Yoonsu Choi, M. G. Allen, M. LaPlaca, S. DeWeerth, "A Novel System for Measurement of Electrophysiological Signals Associated with Traumatic Neuronal Injury," presented at µTAS 2003, 7th International Conference on Miniaturized Chemical and BioChemical Analysis Systems, Oct. 2003. (PDF)

 

76.     Yong-Kyu Yoon, R. Powers, Y. Choi, C. Courcimault, and M.G. Allen, "Micromachined Polymeric Microvasculatures: A Three-Dimensional Microfluidic System Using Inclined SU-8 Structures and Laser Machining," presented at 226th American Chemical Society National Meeting, September 2003. (PDF)

 

77.     Allen, M.G., “MEMS technology for the fabrication of RF magnetic components,” Digest of INTERMAG 2003. International Magnetics Conference (Cat. No.03CH37401), 2003, p FC-05. (PDF)

 

78.     Jin-Woo Park, Allen, M.G., “Ultra-low-profile micromachined power inductors with highly laminated NiFe cores: application to low MHz DC-DC converters,” Digest of INTERMAG 2003. International Magnetics Conference (Cat. No.03CH37401), 2003, p EA-04. (PDF)

 

79.     Yeun-Ho Joung, Allen, M.G., “High density electroplating bonding interconnect technology: chip packaging and high aspect ratio passive elements,” 53rd Electronic Components and Technology Conference. Proceedings (Cat. No.03CH37438), 2003, p 640-6. (PDF)

 

80.     Yong-Kyu Yoon, Allen, M.G., “Tunable ferroelectric capacitor with low-loss electrodes fabricated using reverse side exposure,” 53rd Electronic Components and Technology Conference. Proceedings (Cat. No.03CH37438), 2003, p 1534-40. (PDF)

 

81.     Yong-Kyu Yoon, Jung-Hwan Park; Cros, F.; Allen, M.G., “Integrated vertical screen microfilter system using inclined SU-8 structures,” Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.03CH37426), 2003, p 227-30. (PDF)

 

82.     Jung-Hwan Park, Davis, S.; Yong-Kyu Yoon; Prausnitz, M.R.; Allen, M.G., “Micromachined biodegradable microstructures,” Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.03CH37426), 2003, p 371-4. (PDF)

 

83.     Leichle, T.C., Wenjing Ye; Allen, M.G., “A sub-μW micromachined magnetic compass,” Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.03CH37426), 2003, p 514-17. (PDF)

 

84.     Pinel, S., Cros, F.; Nuttinck, S.; Yoon, S.-W.; Allen, M.G.; Laskar, J., “Very high-Q inductors using RF-MEMS technology for System-On-Package wireless communication integrated module,” 2003 IEEE MTT-S International Microwave Symposium Digest (Cat. No.03CH37411), 2003, pt. 3, p 1497-500 vol.3. (PDF)

 

 

     2002

Top of page

 

85.     Yong-Kyu Yoon, J.-W. Park, and M.G. Allen, “RF MEMS Based on Epoxy-Core Conductors,” Digest of Solid-State Sensor, Actuator, and Microsystems Workshop 2002, Hilton Head Island, South Carolina, pp.374-375, 2002. (PDF)

 

86.     Dongsu Kim, Yoonsu Choi; Allen, M.G.; Kenney, J.S.; Stollberg, D.W.; Kiesling, D., “An S-band reflection-type phase shifter-a design example using ferroelectrics,” Materials Issues for Tunable RF and Microwave Devices III. Symposium (Materials Research Society Symposium Proceedings Vol.720), 2002, p 154-9