MicroSensors and MicroActuators

Georgia Tech MEMS group

 

 

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Seong-Hyok Kim (Post-Doc)

 

Biographical Sketch

Dr. Seong-Hyok Kim received the B.S.E. and M.S. degree at the Department of Electrical Engineering of Seoul National University in 1996, 1998 respectively, and the Ph. D. degree in Electrical Engineering and Computer Science from Seoul National University in 2002. He was a member of Lab. for MISA(Micro Sensors and Actuators). His research at Seoul National University specially focused on the design and the fabrication of a silicon microgyroscope operating at atmospheric pressure. Since he joined LG Electronics Institute of Technology as a Senior Research Engineer in 2002, he had participated in the design and fabrication of a wide variety of MEMS devices for portable electronics; an electrostatic/electromagnetic actuator for an objective lens positioning in the optical drive system, a MEMS optical switch in the optical communication system, a miniaturized and magnetically levitated linear-expansion valve for the home appliances, a high-speed scanning mirror for the next generation display device, a micro fluidic devices, a large -displacement micro iris actuator for a camera phone and micro PZT sensors for proximity power sensing. He joined Micro Sensors and Actuators Laboratory in Georgia Institute of Technology.

Dr. Seong-Hyok Kim's current research interest is in power MEMS. Other research interests are in integrated micro systems for ubiquitous sensor network (USN), biosensors and micro fluidic devices for human health and environmental monitoring, and in the field of micromachining processes for micro sensors and actuators.

 

Resume (PDF)

Office: 404-894-8807

Home:

Fax: 404-894-5028

sk250@mail.gatech.edu

Past projects:

 

        1. Microscale, Axial-flux- Permanent Magnet Generator  à

 

Develop integrated microsystems that are capable of generating electrical power and that can be driven by either cold (i.e., pressurized) or hot (e.g., combustion products) gases

 

         2. Micro Power Convertor à

 

Develop an integrated power converter using power inductors with micromachined laminations that could meet multi-watt conversion specifications such as micro fuel cells, micro power generator and portable electronics

 

             3. Micromachined magnetic sensor  à

 

Design and fabrication of a low power micromachined magnetic sensor.

 

 

Publications:

Journal
  1. Chang-Hyeon Ji, Moongoo Choi, Sang-Cheon Kim, See-Hyung Lee, Seong-Hyok Kim , Youngjoo Yee, and Jong-Uk Bu, "Electrostatic Scanning Micromirror with Diaphragm Mirror Plate and Diamond Shaped Reinforcement Frame," in review of Journal of Micromechanics and Microengineering
  2. Sookyung Kim, Jinmoo Park, Gunsoon Park, Jungkyu Lee, Jeonguk Lee, Hewon Jung, Jin-Yong Kim, Seong-Hyok Kim, Youngjoo Yee, Jong Hwan Kim, Jin Hong Kim, and Jong-Uk Bu, "An optical flying head assembly for a small-form-factor plastic disk in PCMCIA-Like Drive," Japanese Journal of Applied Physics, Vol. 43, No. 7B, pp.4752-4758, 2004
  3. Chang-Hyeon Ji, Youngjoo Yee, Junghoon Choi, Seong-Hyok Kim, and Jong-Uk Bu, "Latchable electromagnetic 2/spl times/2 photonic switch for low power operation," IEEE Journal of Selected Topics in Quantum Electronics, accepted and will be published.
  4. Seong-Hyok Kim, Youngjoo Yee, Junghoon Choi , Hyouk Kwon, Man-Hyo Ha, Changhoon Oh, and Jong-Uk Bu, "Integrated MEMS optical flying head with lens positioning actuator for small form factor optical data storage," Sensors and Actuators A: Physical, Vol. 114/2-3, pp 429-437, 2004
  5. June-Young Lee, Seong-Hyok Kim, Hyung-Taek Lim, Che-Heung Kim, Chang-Wook Baek, and Yong-Kweon Kim, "Electric spring modeling for a comb actuator deformed by the footing effect in deep reactive ion etching," Journal of Micromechanics and Microengineering, Vol. 13, pp. 72-79, 2003
  6. Seong-Hyok Kim, Sang-Hoon Lee, and Yong-Kweon Kim, "A high-aspect-ratio comb actuator using UV-LIGA surface micromachining and (110) silicon bulk micromachining," Journal of Micromechanics and Microengineering, Vol. 12, No. 2, pp. 128-135, 2002
  7. Seong-Hyok Kim, Yong-Kweon Kim, Jin-Woo Song, and Jang-Gyu Lee, "A surface-bulk-micromachined electromagnetic gyroscope operating at atmospheric pressure, " Japanese Journal of Applied Physics, Vol. 39, No. 12B, 2000
  8. Seong-Hyok Kim, Sang-Hun Lee, Hyung-Taek Lim, Yong-Kweon Kim, and Seung-Ki Lee, " Anisotropic Bulk Etching of (110) Silicon with High Aspect Ratio," Technical Digest of IEE Japan, Vol. 118-E, No. 1, pp. 32-36, 1998
Conferences
  1. Xiaosong Wu, Guang Yuan, Seong-O Choi, Yanzhu Zhao, Seong-Hyok Kim, Yong-Kyu Yoon and Mark G. Allen, "LATERAL LAMINATION APPROACH FOR MULTILAYER PIEZOELECTRIC MICROACTUATOR," HiltonHead 2006 (PDF)
  2. Seungkeun Choi, Seong-Hyok Kim, Yong-Kyu Yoon, Mark G. Allen, "A Magnetically Excited And Sensed MEMS-Based Resonant Compass," InterMag 2006. (PDF)
  3. Chang-Hyeon Ji, Seong-Hyok Kim, and Jong-Uk Bu, "Diamond Shaped Frame Supported Electrostatic Scanning Micromirror," submitted to the 14th International Conference on Solid-State Sensors and Actuators(Transducers '05)
  4. Seong-Hyok Kim, Youngjoo Yee, Junghoon Choi, Hyouk Kwon, Man-Hyo Ha, Changhoon Oh, and Jong-Uk Bu, "A micro optical flying head for a PCMCIA-sized optical data storage," in the 17th IEEE International Conference on Micro Electro Mechanical Systems(MEMS 2004), 2004, pp. 85 - 88
  5. Chang-Hyeon Ji, Youngjoo Yee, Junghoon Choi, Seong-Hyok Kim, and Jong-Uk Bu, "Latchable electromagnetic 2/spl times/2 photonic switch for low power operation," in IEEE/LEOS International Conference on Optical MEMS 2003(MOEMS 2003), 2003, pp. 51-52
  6. Sookyung Kim, Jungkyu Lee, Jinmoo Park, Gunsoon Park, Jeonguk Lee, Choongwoo Lee, Dohyeon Son, Jin-Yong Kim, Seong-Hyok Kim, and Youngjoo Yee, "PCMCIA like ultra small form factor optical drive," in Optical Data Storage(ODS) 2003, 2003, pp. 5-13
  7. Seong-Hyok Kim, Youngjoo Yee, Junghoon Choi, Hyouk Kwon, Man-Hyo Ha, Changhoon Oh, and Jong-Uk Bu, "Integrated micro optical flying head with lens positioning actuator for small form factor data storage," in the 12th International Conference on Solid-State Sensors and Actuators(Transducers '03), 2003, pp. 607-610
  8. June-Young Lee, Seong-Hyok Kim, Hyung-Taek Lim, Che-Heung Kim, and Yong-Kweon Kim, "Modeling of the comb actuator deformed by microloading effect in deep reactive ion etching," in Micromachining and Microfabrication 2001, 2001, pp. 250-260
  9. June-Young Lee, Che-Heung Kim, Hyung-Taek Lim, Seong-Hyok Kim, and Yong-Kweon Kim, "Stable position control of comb actuator with large displacement," in the International Conference on Electrical Engineering(ICEE) 2001, 2001, pp. 1490-1493
  10. Seong-Hyok Kim, June-Young Lee, Che-Heung Kim, and Yong-Kweon Kim, "A single crystal silicon gyroscope operating at atmospheric pressure," in Technical Digest of 19th Sensor Symposium, 2001, pp.293-296
  11. Seong-Hyok Kim, June-Young Lee, Che-Heung Kim, and Yong-Kweon Kim, "A bulk-micromachined single crystal silicon gyroscope operating at atmospheric pressure," in the 11th International Conference on Solid-State Sensors and Actuators(Transducers 01), 2001, pp. 476-479
  12. Seong-Hyok Kim and Yong-Kweon Kim, "A surface-bulk micromachined electromagnetic gyroscope operating at atmospheric pressure," in International Microprocesses and Nanotechnology Conference(MNC), 2000, pp. 148-149
  13. Seong-Hyok Kim, Sang-Hun Lee, and Yong-Kweon Kim, " A novel fabrication process for high-aspect ratio comb actuator combining (110) silicon anisotropic etching with electroplating," in the 10th International Conference on Solid-State Sensors and Actuators(Transducers '99), 1999, pp. 110-113
  14. Sang-Hun Lee, Hyung-Taek Lim, Seong-Hyok Kim, Yong-Kweon Kim, and Seung-Ki Lee, " Design of a planar vibratory gyroscope using electrostatic actuation and electromagnetic detection," in Symposium Gyro Technology, 1997, pp.10.0-10.11
  15. Seong-Hyok Kim, Sang-Hun Lee, Hyung-Taek Lim, Seung-Ki Lee, and Yong-Kweon Kim, "(110) silicon etching for high aspect ratio comb structures," in IEEE 6th International Conference on Emerging Technology and Factory Automation(ETFA '97), 1997, pp.248-252
  16. Seong-Hyok Kim, Sang-Hun Lee, Hyung-Taek Lim, Seung-Ki Lee, and Yong-Kweon Kim, "Anisotropic bulk etching of (110) silicon with high aspect ratio," in Technical Digest of 15th Sensor Symposium, 1997, pp.193-196
Patents
  1. Seong-Hyok Kim, Jung-Hoon Choi, Youngjoo Yee, In Kyu Kim, and Byung Hwa Chung, "Electromagnetic control valve," US Publication No. 20050006611, 2005
  2. Seong-Hyok Kim, Chang-Hyeon Ji, and Youngjoo Yee, "Micro actuator for controlling focal depth," US Publication No. 20040257672, 2005
  3. Seong-Hyok Kim, Jung-Hoon Choi, Chang-Hoon Oh, and Youngjoo Yee, "Optical pickup head of optical recording reproducing apparatus, fabrication method thereof, lubricant-coated optical pickup head of optical recording reproducing apparatus and lubricant coating method thereof," US Publication No. 20040202101, 2005
  4. Seong-Hyok Kim, Tae-Sun Lim, Hyeok Kweon, Chang-Hoon Oh, and Youngjoo Yee, "Bright Enhancement Film with cone structure array for Liquid crystal display backlight unit," Korea, patent pending, 2004
  5. Seong-Hyok Kim, Chang-Hyeon Ji, Sang-Chun Kim, Junghoon Choi, and Jong-Uk Bu, "Small Form Factor Camera module with a Mechanical Iris and Shutter," Korea, patent pending, 2004
  6. Seong-Hyok Kim, Junghoon Choi, Man-Hyo Ha, Youngjoo Yee, and Jong-Uk Bu, "Micro Coil for Micro Magneto-Optical Head for Magneto-Optical Recording/Regenerating," Korea, patent pending, 2004
  7. Seong-Hyok Kim, Junghoon Choi, Youngjoo Yee, and Jong-Uk Bu, "A low-power and proximity AC current sensor," Korea, patent pending, 2004
  8. Seong-Hyok Kim, Junghoon Choi, and Youngjoo Yee, "Magnetically Levitated, Electromagnetically Actuated and Structurally Guided Valve having Coaxial Inlet and Outlet Ports for Fluidic Mass Flow Control," Korea, patent pending, 2004
  9. Seong-Hyok Kim, Junghoon Choi, and Youngjoo Yee, "Micro Fuel Cell System," Korea, U.S., China, Japan, and EU, patent pending, 2004
  10. Seong-Hyok Kim, Junghoon Choi, and Youngjoo Yee, "Micro Fuel Cell Stack," Korea, U.S., China, Japan, and EU, patent pending, 2004
  11. Chang-Hyeon Ji, Seong-Hyok Kim, Jae-Hyoung Park Man-Hyo Ha and Jong-Uk Bu, "Linear Motor and Lens Actuator using the same," Korea, patent pending, 2004
  12. Chang-Hyeon Ji, Seong-Hyok Kim, Junghoon Choi and Youngjoo Yee, "ElectroMagnetic Actuator for Reducing the Degeneration of Image Quality in Display Systems," Korea, patent pending, 2004
  13. Seong-Hyok Kim and Youngjoo Yee, "A Washing Machine using of Vibration Sensor and the Method for Vibration Sensing," Korea, patent pending, 2003
  14. Junghoon Choi, Seong-Hyok Kim, and Youngjoo Yee, "Fluidic Mass Flow Control Valve Actuated by Electromagnetic Force," Korea, U.S., China, Japan, and EU, patent pending, 2003
  15. Seong-Hyok Kim, Junghoon Choi, and Youngjoo Yee, "Valve for Fluidic Mass Flow Control and Fabrication Thereof," Korea, patent pending, 2003
  16. Seong-Hyok Kim and Youngjoo Yee, "Fabrication Method of Micro Vertical Mirror," Korea, patent pending, 2003
  17. Seong-Hyok Kim and Youngjoo Yee, "Micro Actuator for Controlling the Focal Length," Korea, patent pending, 2002
  18. Seong-Hyok Kim and Youngjoo Yee, "Micro Magneto-Optical Head for Magneto-Optical Recording/Regenerating and Manufacturing Method Thereof," Korea, U.S., China, Japan, and EU, patent pending, 2002
  19. Seong-Hyok Kim and Yong-Kweon Kim, "A Gyroscope and a Manufacturing Method of the same," KR 2002-0066486, 2002
  20. Seong-Hyok Kim and Yong-Kweon Kim, "Gyroscope and Fabrication Method Thereof," US 2003-0159509, 2003
  21. Sang-Hun Lee, Seong-Hyok Kim, Hyung-Taek Lim, Yong-Kweon Kim, and Seung-Ki Lee, "Vibratory Gyroscope," KR 1998-006970, 1998
Awards
  • 2005 Information and Telecommunication National Scholarship Program, The Ministry of Information and Communication, Republic of Korea
  • 2002 Silver Prize, Samsung Humantech Thesis Prize: "A Non-Vacuum Packaged Silicon Vibratory Micro Gyroscope"
  • 1993 Korean Representative, Expo '93 International Microrobot Competition with Participating Micromouse : "Sigma-3" composed of a NEC v25 microprocessor, IR sensors, and stepping motors.

 

Seong-Hyok Kim's Personal Homepage

 

Last modified on September 14, 2009

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