MicroSensors and MicroActuators

Georgia Tech MEMS group

 

 

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Chang-Hyeon Ji (Post-Doc)

 

Biographical Sketch

Chang-Hyeon Ji received the B.S. and M.S. degrees in electrical engineering and the Ph.D. degree in electrical engineering and computer science from Seoul National University, Seoul, Korea, in 1995, 1997, and 2001, respectively. His doctoral dissertation concerned the design, fabrication, and testing of electromagnetic micromirrors for microphotonic applications. He was with LG Electronics Institute of Technology, Seoul, from 2001 to 2006, where he developed microactuators for various types of applications including optical communications and scanning laser displays. He is currently a Postdoctoral Fellow with the School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta. His current research interests include micro power generation, micromachined components and interconnection technology

for high-power electronics, and BioMEMS.

 

 

Resume (PDF)

 

Office: 404-894-8807

Home:

Fax: 404-894-5028

cji6@mail.gatech.edu

Projects:

 

        1. Microscale, Axial-flux- Permanent Magnet Generator  à

 

Develop integrated microsystems that are capable of generating electrical power and that can be driven by either cold (i.e., pressurized) or hot (e.g., combustion products) gases

 

         2. Micro Power Convertor   à

 

Develop an integrated power converter using power inductors with micromachined laminations that could meet multi-watt conversion specifications such as micro fuel cells, micro power generator and portable electronics

 

Publications:

Journal

 

1.        C.-H. Ji, F. Herrault, P. Hopper, P. Smeys, P. Johnson, and M. G. Allen, “Electroplated Metal Buried Interconnect and Through-Wafer Metal-Filled Via Technology for High-Power Integrated Electronics,” accepted for publication in IEEE Transactions on Advanced Packaging.

2.        F. Herrault, C.-H. Ji, and M. G. Allen, “Ultraminiaturized, High-Speed, Permanent Magnet Generators for Milliwatt-Level Power Generation,” Journal of Microelectromechanical Systems, Vol. 17, No. 6, pp. 1376-1387, 2008. (PDF)

3.        C.-H. Ji, F. Herrault, and M. G. Allen, “Metallic Buried Interconnect Process for Through-Wafer Interconnection,” Journal of Micromechanics and Microengineering, Vol. 18, 085016 (10pp), 2008. (PDF)

4.        C.-H. Ji, K.-C. Song, M. Choi, S.-C. Kim, J.-U. Bu, and H.-J. Nam, “Electromagnetic Two-Dimensional Scanner Using Radial Magnetic Field,” Journal of Microelectromechanical Systems, Vol. 16, No. 4, pp. 989-996, 2007. (PDF)

5.        J.-H. Park, H.-C. Lee, Y.-H. Park, Y-D. Kim, C.-H. Ji, J. Bu, and H.-J. Nam, “A Fully Wafer-Level Packaged RF MEMS Switch with Low Actuation Voltage Using a Piezoelectric Actuator,” Journal of Micromechanics and Microengineering, Vol. 16, pp. 2281-2286, 2006. (PDF)

6.        C.-H. Ji, M. Choi, S.-C. Kim, S.-H. Lee, and J.-U. Bu, “Performance of a Raster Scanning Laser Display System Using Diamond Shaped Frame Supported Micromirror,” IEEE Photonics Technology Letters, Vol. 18, No. 16, pp. 1702-1704, 2006. (PDF)

7.        C.-H. Ji, M. Choi, S.-C. Kim, S.-H. Lee, S.-H. Kim, Y. Yee, and J.-U. Bu, “Electrostatic Scanning Micromirror with Diaphragm Mirror Plate and Diamond Shaped Reinforcement Frame,” Journal of Micromechanics and Microengineering, Vol. 16, pp. 1033-1039, 2006. (PDF)

8.        C.-H. Ji, Y. Yee, J. Choi, S.-H. Kim, and J.-U. Bu, “Electromagnetic 2x2 MEMS Optical Switch,” IEEE Journal of Selected Topics in Quantum Electronics, Vol. 10, No. 3, pp. 545-550, 2004. (PDF)

9.        T.-S. Lim, C.-H. Ji, Y. Yee, H. Kwon, C.-H. Oh, and J.-U. Bu, “Electrostatic MEMS Variable Optical Attenuator with Rotating Folded Micromirror,” IEEE Journal of Selected Topics in Quantum Electronics, Vol. 10, No. 3, pp. 558-562, 2004. (PDF)

10.    C.-H. Ji and Y.-K. Kim, “Electromagnetic Micromirror Array with Single-Crystal Silicon Mirror Plate and Aluminum Spring,” Journal of Lightwave Technology, Vol. 21, No. 3, pp. 584-590, 2003. (PDF)

11.    C.-H. Ji, Y.-K. Kim, and G.-B. Chung, “Design and Fabrication of Electromagnetic Micromirror with Bulk Silicon Mirror Plate and Aluminum Spring,” Japanese Journal of Applied Physics, Vol. 39, Part 1, No. 12B, pp. 7138-7141, 2000.

 

Conferences

 

1.        B. C. Yen, F. Herrault, K. J. Hillman, M. G. Allen, F. F. Ehrich, S. Jacobson, C.-H. Ji, J. H. Lang, H. Li, Z. S. Spakovszky, and D. R. Veazie, “Characterization of A Fully-Integrated Permanent-Magnet Turbine Generator,” Proc. of PowerMEMS 2008 + microEMS 2008, pp. 121-124, 2008.

2.        S.-H. Kim, C.-H. Ji, P. Galle, F. Herrault, X. Wu, J.-H. Lee, C.-A. Choi, and M. G. Allen, “An Electromagnetic Energy Scavenger from Direct Airflow,” Proc. of PowerMEMS 2008 + microEMS 2008, pp. 133-136, 2008.

3.        F. Herrault, C.-H. Ji, S.-H. Kim, X. Wu, and M. G. Allen, “A Microfluidic-Electric Package for Power MEMS Generators,” Proc. of IEEE Micro Electro Mechanical Systems, MEMS 2008, pp. 112-115, 2008.

4.        X. Wu, S.-H. Kim, C.-H. Ji, and M. G. Allen, “A Piezoelectrically-Driven High Flow Rate Axial Polymer Microvalve with Solid Hydraulic Amplification,” Proc. of IEEE Micro Electro Mechanical Systems, MEMS 2008, pp. 523-526, 2008.

5.        F. Herrault, C.-H. Ji, S. Rajaraman, R. H. Shafer, and M. G. Allen, “Electrodeposited Metal Structures in High Aspect Ratio Cavities Using Vapor Deposited Polymer Molds and Laser Micromachining,” Transducers ’07, pp.513-516, 2007.

6.        F. Herrault, C.-H. Ji, R. H. Shafer, S.-H. Kim and M. G. Allen, “Ultraminiaturized Milliwatt-Scale Permanent Magnet Generators,” Transducers ’07, pp.899-902, 2007.

7.        C.-H. Ji, S.-H. Ahn, K.-C. Song, H.-K. Yoon, M. Choi, S.-C. Kim, and J.-U. Bu, “Dual-Axis Electromagnetic Scanning Micromirror Using Radial Magnetic Field,” Proc. of IEEE Micro Electro Mechanical Systems, MEMS 2006, pp. 32-35, 2006.

8.        C.-H. Ji, S.-H. Kim, Y. Yee, M. Choi, S.-C. Kim, S.-H. Lee, and J.-U. Bu, “Diamond Shaped Frame Supported Electrostatic Scanning Micromirror,” Transducers ‘05, pp. 992-995, 2005.

9.        C.-H. Ji, Y. Yee, J. Choi, S.-H. Kim, and J.-U. Bu, “Latchable Electromagnetic 2x2 Photonic Switch for Low Power Operation,” Proc. of IEEE/LEOS Optical MEMS, pp. 51-52, 2003.

10.    T.-S. Lim, C.-H. Ji, C.-H. Oh, Y. Yee, and J.-U. Bu, “Electrostatic MEMS Variable Optical Attenuator with Folded Micromirror,” Proc. of IEEE/LEOS Optical MEMS, pp. 143-144, 2003.

11.    C.-H. Ji, Y. Yee, J. Choi, H.-H. Oh, and J.-U. Bu, “Latchable Electromagnetic 2x2 MEMS Optical Switch,” Proc. of IEEE Micro Electro Mechanical Systems, MEMS 2003, pp. 239-242, 2003.

12.    C.-H. Ji, Y. Yee, J. Choi, and J.-U. Bu, “Electromagnetic Variable Optical Attenuator,” Proc. of IEEE/LEOS Optical MEMS, pp. 49-50, 2002.

13.    C.-H. Ji and Y.-K. Kim, “Addressable Electromagnetic Micromirror Array with Single Crystal Silicon Mirror Plate and Aluminum Spring,” Proc. of IEEE/LEOS Optical MEMS, pp. 17-18, 2001.

14.    C.-H. Ji and Y.-K. Kim, “Fabrication and Experiments on Electromagnetic Micromirror Array with Bulk Silicon Mirror Plate and Aluminum Spring,” Transducers ‘01, pp. 1320-1323, 2001.

15.    C.-H. Ji, Y.-K. Kim, and B.-K. Choi, “Design and Fabrication of Electromagnetic Micromirror with Bulk Silicon Mirror Plate and Aluminum Spring,” Proc. of IEEE/LEOS Optical MEMS, pp. 97-98, 2000.

16.    C.-H. Ji and Y.-K. Kim, “Design and Fabrication of Magnetically Driven Micromirror with Large Angular Deflection,” Microprocesses and Nanotechnology 2000 Digest of Papers, pp. 132-133, 2000.

17.    C.-H. Ji and Y.-K. Kim, “Design, Fabrication, and Experiment of Micromirror with Aluminum Pin-joints,” Proc. of MOEMS ‘99, pp. 44-48, 1999.

18.    C.-H. Ji and Y.-K. Kim, “Design and Fabrication of Micromirror Array with Hidden Joint Structures,” Proc. of SPIE, Vol. 3513, pp. 71-77, 1998.

19.    C.-H. Ji and Y.-K. Kim, “Fabrication of Micro Mirror Array with Hidden Joint Structures,” Proc. of IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA ’97, pp. 243-247, 1997.

20.    C.-H. Ji, Y.-K. Kim, and B.-K. Choi, “Novel Micro Mirror Array with Hidden Pin and Staples,” Proc. of International Conference on Micromechatronics for Information and Precision Equipment, MIPE ‘97, pp. 755-758, 1997.

 

Patents

 

1.        T.-S. Lim and C.-H. Ji, “Scanning Micromirror,” Korea patent 0789574, Korea patent pending, 2008-0067064

2.        C.-H. Ji, “Shutter Apparatus for Micro Camera,” Korea patent 0775211

3.        M.-H. Ha and C.-H. Ji, “Control apparatus for focus of the camera and its manufacture method,” Korea patent pending, 2005-0112153

4.        C.-H. Ji, “Micro Method for Manufacturing Scanning Micromirror,” Korea patent 0706319

5.        C.-H. Ji, “Micro-mirror Device and Micro-mirror Device Array Using the Same,” Korea patent 0743315, “Micro-mirror Device and Array Thereof,” U. S. patent pending, 2006-508821

6.        J-H. Choi, S.-H. Kim, C.-H. Ji, and C.-H. Oh, “Moving Control Apparatus and Method for Camera Lens of the Portable Terminal,” Korea patent pending, 2005-059455

7.        S.-H. Kim, J-H. Choi, and C.-H. Ji, “Position Detection Apparatus of Camera Lens in the Mobile Terminal,” Korea patent pending, 2005-060002

8.        C.-H. Ji, “MEMS Scanning Micromirror and Dual-axis Electromagnetic MEMS Scanning Micromirror Device,” Korea patent pending, 2005-045822

9.        J-H. Choi, S.-H. Kim, C.-H. Ji, and J.-U. Bu, “Small Form Factor Camera Module with a Mechanical Iris and Shutter,” Korea patent pending, 2005-035062

10.    S.-H. Kim, J-H. Choi, C.-H. Ji, S.-C. Kim, and J.-U. Bu, “Small Form Factor Camera Module with a Mechanical Iris and Shutter,” Korea patent 0760544, U. S. patent pending, 2006-404905

11.    C.-H. Ji, S.-H. Lee, and Y. Yee, “Scanning Micromirror Package, Manufacturing Method Thereof, and Optical Scanning Device Thereby,” Korea patent 0772039, “Scanning Micro-mirror Package, Method for Fabricating the Same, and Optical Scanning Device Employing the Same,” U. S. patent pending, 2006-317109

12.    C.-H. Ji, J.-H. Park, M.-H. Ha, S.-H. Kim, Y. Yee, and J.-U. Bu, “Driving Unit for Movement of Lens,“ Korea patent 0762992, “Lens Driving Device,” U. S. patent 7412157

13.    T.-S. Lim, C.-H. Ji, and Y. Yee, “Optical Attenuator,” Korea patent pending, 2003-026464

14.    C.-H. Ji, Y. Yee, and S.-H. Kim, “Micro Actuator for Controlling the Focal Length,“ Korea patent pending, 2003-039185, “Micro Actuator for Controlling Focal Depth,” U. S. patent 7079329

15.    C.-H. Ji, Y. Yee, and J.-U. Bu, “Electrostatic Dual Axis Micro Mirror and Manufacturing Method Thereof,” Korea patent pending, 2002-057057

16.    C.-H. Ji, Y. Yee, and J.-U. Bu, “Focal Length Control Device of Optical Recorder/Player and Fabrication Method Thereof,” Korea patent pending, 2002-065569

17.    C.-H. Ji, Y. Yee, and J.-U. Bu, “Minute Structure Assembling Optical Fiber,” Korea patent pending, 2002-067950

18.    C.-H. Ji, Y. Yee, J. Choi, and S.-H. Kim, “Electromagnetic Actuator for Reducing the Degeneration of Image Quality in Display Systems,” Korea patent 0595519, “Device for reducing deterioration of image quality in display using laser,” U. S. patent 7116017

19.    C.-H. Ji, Y. Yee, and S.-H. Kim, “Scanning Micro-mirror Actuated by Electrostatic Force, Manufacturing Method Thereof and optical Scanning Device Using the Same,” Korea patent 0619696, “Scanning Device and Fabrication Method Thereof,” U. S. patent pending, 2005-205355

20.    C.-H. Ji, Y. Yee, and S.-H. Lee, “Raster Scanning Display System,” Korea patent 0636347, U. S. patent pending, 2005-205860

21.    C.-H. Ji, Y. Yee, and S.-H, Kim, “Scanning Micro-mirror,” Korea patent 0636348

22.    C.-H. Ji, and Y. Yee, “Electromagnetic MEMS Scanning Micromirror and Optical Scanning Device Thereby,” Korea patent 0644896, “Electromagnetic Scanning Micro-mirror and Optical Scanning Device Using The Same,” U. S. patent 7324252

23.    C.-H. Ji, “Electromagnetic Variable Focus Mirror, Fabrication Method for the Same, and Operating Method for the Same,” Korea patent 0657002, “Variably Focusing Mirror Driven by Electromagnetic Force and Operating Method Thereof,” U. S. patent pending, 2006-399532

24.    C.-H. Ji, and J.-U. Bu, “SAW Linear Motor, Package and Lens Actuator Using Thereof,” Korea patent 0706317, “Surface Acoustic Wave Linear Motor, Surface Acoustic Wave Linear Motor Package, and Lens Actuator Adopting the Surface Acoustic Wave Linear Motor Package,” U. S. patent pending, 2006-341222

25.    J-H. Choi, S.-H. Kim, and C.-H. Ji, “Linear Actuator Using Voice Coil Motor Type Actuation,” Korea patent 0693421

26.    S.-H. Kim, J-H. Choi, and C.-H. Ji, “Piezo Actuated Linear Motor, Driving Method Thereof and Camera Module Using the Same,” Korea patent 0693752

27.    C.-H. Ji and Y. Yee, “Optical Switch,” Korea patent 0565598, Korea patent pending, 2002-065335, 2002-075488, U. S. patent pending, 2003-688895

28.    C.-H. Ji, and Y. Yee, “Variable Optical Attenuator,” Korea patent 0587327, U. S. patent pending, 2004-892295

29.    C.-H. Ji, Y. Yee, and J. Choi, “Apparatus for Controlling Flux Using Flux-controlling Valve,” Korea patent 0512186, “Flow Control Valve and Flow Control Valve Apparatus Using the Same,” U. S. patent 7014165

30.    C.-H. Ji, Y. Yee, and J. Choi, “Flux-controlling Valve,” Korea patent 0512185

31.    C.-H. Ji, Y. Yee, and J. Choi, “Electromagnetically Actuated Micro Valve,“ Korea patent 0510696, “Micro-actuator, Fabrication Method Thereof, and Micro-actuating Valve,” U. S. patent 7055797

32.    Y. Yee, C.-H. Ji, J. Choi, and S.-H. Kim, “Valve for Fluidic Mass Flow Control and Fabrication Method Thereof,” Korea patent 0504794

33.    C.-H. Ji, and Y. Yee, “Variable Optical Attenuator and Array of the Same,” Korea patent 0495533

34.    C.-H. Ji, Y. Yee, T.-S. Lim, K.-C. Song, and J.-U. Bu, “Optical Receiver and Transmitter with Integrated Variable Optical Attenuator,” Korea patent 0492544

35.    C.-H. Ji, Y. Yee, and J.-U. Bu, “Electro-magnetically Actuated Optical Switch,” Korea patent 0447212

36.    C.-H. Ji, Y.-K. Kim, and H. Choi, “Apparatus for Dividing Optical Signal,” Korea patent 0708073

37.    C.-H. Ji, Y.-K. Kim, and B.-K. Choi, “Movable Micro Mirror for a Video Display Apparatus and Manufacturing Method Therefor,” Korea patent 0270812

38.    C.-H. Ji, Y.-K. Kim, and B.-K. Choi, “Movable Micro Mirror for a Video Display Apparatus,” Korea patent 0270813

 

10 U. S., 16 E. P. O., 7 Japan, 2 Taiwan, 6 China, 13 Korea patents pending.

6 U. S., 28 Korea patents issued as of October, 2008.

 

 

 

AWARDS

 

2006     Best Paper Award (Second Prize) – The 8th Korean MEMS Conference

2005     Prominent Researcher Award – LG Electronics Institute of Technology

 

Last modified on December 10, 2008

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