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Biographical Sketch
Dr.
Mark G. Allen received the B.A. degree in Chemistry, the B.S.E. degree in
Chemical Engineering and the B.S.E. degree in E.E. from the University of Pennsylvania in 1984, and
the S.M. degree and the Ph.D. degree in microelectronic materials from Massachusetts Institute of Technology in
1986 and 1989 respectively. His research at Massachusetts
Institute of Technology focused on micromachining techniques to create
structures for the in-situ measurement of mechanical properties and
adhesion of thin films for use in microelectronic processing. He was also
engaged in microsensors, microactuators, and in feedback-stabilized
micromachined mirrors for laser applications. He joined the faculty of Georgia Institute of Technology after a
postdoctoral appointment at Massachusetts
Institute of Technology.
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Research Interests
Professor
Allen's current research interests are in the field of micromachining and
in microsensor and microactuator fabrication that is compatible with the IC
fabrication. Other interests are in micromachined pressure and in
acceleration sensors, micromotors, in integrated flow valves, in
piezoelectric materials combined with semiconductor circuits and optical
materials, in multi-chip packaging for integrated circuits and
microstructures, in integration of organic piezoelectric materials with
semiconductor circuits for sensing and actuation, and in materials and
mechanical property issues in micromachining.
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