MicroSensors and MicroActuators

Georgia Tech MEMS group

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4 Labs & the MIRC Cleanroom

MIRC -- LAB 152 (404-894-9434)

Metal deposition and SU8 processing

E-beam evaporator

Filament evaporator

Spinner

RIE

Flow hood

Microscope

Probe station

MIRC -- LAB 437 (404-385-0275)

Materials electroplating

Parylene coater

Vacuum oven

Ovens

Plating stations

Flow hoods

Lamination press

Optical microscope

BUNGER-HENRY -- LAB 240-243 (404-385-6216)

Laser micromachining

Box furnace

Tube furnace (ceramic firing, anneal)

Tube furnace (oxidation tube)

Hot press

Drill

Milling machine

IR Laser: Resonetics Impressario Unit

Excimer laser Resonetics

CO2 laser

Optical microscopes

BUNGER-HENRY -- LAB 212

Magnetic lab

VSM Lakeshore model 7300

Magnetizer Oersted Technology model 340 B

Magnetic annealer

MIRC – CLEANROOM

Georgia Tech Microelectronics Research Center

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Last modified on March 3, 2006

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