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2013

Journal

  1. P. Wang, S.-J. Paik, S. Chen, S. Rajaraman, S.-H. Kim, and M. G. Allen, “Fabrication and Characterization of Polymer Hollow Microneedle Array Using UV Lithography into Micromolds,” Journal of Microelectromechanical Systems, v 22, n 5, p 1041-1053, Oct. 2013. (PDF)
  2. J. Kim, M. Kim, P. Galle, F. Herrault, R. Shafer, J.Y. Park, and M.G. Allen, "Nanolaminated permalloy core for high-flux high-frequency ultracompact power conversion," Transactions on Power Electronics, v 28, n 9, p 4376-4383, Sept. 2013. (PDF)
  3. M. Araghchini, J. Chen, V. Doan-Nguyen, D.V. Harburg, D. Jin, J. Kim, M. Kim, S. Lim, B. Lu, D. Piedra, J. Qiu, J. Ranson, M. Sun, X. Yu, H. Yun, M.G. Allen, J.A. del Alamo, G. DesGroseilliers, F. Herrault, J.H. Lang, C.G. Levey, C.B. Murray, D. Otten, T. Palacios, D.J. Perreault, and C.R. Sullivan, "A technology overview of the powerchip development program," Transactions on Power Electronics, v 28, n 9, p 4182-4201, Sept. 2013. (PDF)
  4. W. Xu, M.G. Allen, "Deformable Strain Sensors Based on Patterned MWCNTs/ Polydimethylsiloxane Composites," Journal of Polymer Science, Part B: Polymer Physics, v 51, p 1505-1512, Aug. 2013. (PDF)
  5. X. Yu, M. Kim, F. Herrault, C.-H. Ji, J. Kim, and M.G. Allen, "Silicon-Embedding Approaches to 3-D Toroidal Inductor Fabrication," Journal of Microelectromechanical Systems, v 22, n 3, June 2013. (PDF)
  6. J.K. Kim, F. Herrault, X. Yu, M. Kim, R.H. Shafer, and M.G. Allen, "Microfabrication of air core inductors with metal-encapsulated polymer vias," Journal of Micromechanics and Microengineering, v 23, n 3, p 035006 (7 pp.), March 2013. (PDF)
  7. Conference

  8. M. Kim, F. Herrault, J. Kim, J.K. Kim, and M.G. Allen, "Monolithically-fabricated laminated inductors with electrodeposited silver windings," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), p 873-876, Jan. 2013. (PDF)
  9. M. Tsang, F. Herrault, R.H. Shafer, and M.G. Allen, "Methods for the microfabrication of magnesium," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), p 347-350, Jan. 2013. (PDF)
  10. 2012

    Journal

  11. M. Kranz, M.G. Allen, and T. Hudson, "In situ wafer-level polarization of electret films in MEMS acoustic sensor arrays," Sensors and Actuators A: Physical, v 188, p 181-9, Dec. 2012. (PDF)
  12. B.A. Peterson, F. Herrault, O.D. Oniku, Z.A. Kaufman, D.P. Arnold, and M.G. Allen, "Assessment of laser-induced damage in laser-micromachined rare-earth permanent magnets at the sub-millimeter scale," Transactions on Magnetics, v 48, n 11, p 3606-9, Nov. 2012. (PDF)
  13. X. Wu, S.-H. Kim, H. Zhu, C.-H. Ji, and M.G. Allen, "A refreshable Braille cell based on pneumatic microbubble actuators," Journal of Microelectromechanical Systems, v 21, n 4, p 908-916, Aug. 2012. (PDF)
  14. S. Chen, and M.G. Allen, "Extracellular matrix based materials for neural interfacing," MRS Bulletin, v 37, June 2012. (PDF)
  15. S.O. Choi, Y.C. Kim, J.W. Lee, J.H. Park, M.R. Prausnitz, and M.G. Allen, "Intracellular protein delivery and gene transfection by electroporation using a microneedle electrode array," Small, v 8, n 7, p 1081-1091, April 2012. (PDF)
  16. Conference

  17. A. Armutlulu, S.A. Bidstrup Allen, and M.G. Allen, "3D microstructures for fast charge and discharge batteries," PowerMEMS 2012, p 203-206, Dec. 2012. (PDF)
  18. J. Kim, J.K. Kim, M. Kim, F. Herrault, and M.G. Allen, "Integrated toroidal inductors with nanolaminated metallic magnetic cores," PowerMEMS 2012, p 18-21, Dec. 2012. (PDF)
  19. J.K. Kim, F. Herrault, X. Yu, and M.G. Allen, "Microfabrication of air-core toroidal inductor with very high aspect ratio metal-encapsulated polymer vias," PowerMEMS 2012, p 30-33, Dec. 2012. (PDF)
  20. J.K. Kim, A. Armutlulu, M. Kim, S. Paik, S.A. Bidstrup Allen, and M.G. Allen "A fabric-based Ni-Zn battery using a microfiber substrate and separator," PowerMEMS 2012, p , Dec. 2012. (PDF)
  21. B.A. Peterson, W.C. Patterson, F. Herrault, D.P. Arnold, and M.G. Allen, "Laser-micromachined permanent magnet arrays with spatially alternating magnetic field distribution," PowerMEMS 2012, p 319-322, Dec. 2012. (PDF)
  22. X. Yu, M. Araghchini, F. Herrault, J.K. Kim. J.H. Lang, and M.G. Allen, "Fabrication, modeling and performance analysis of silicon-embedded 3-D toroidal inductors," PowerMEMS 2012, p 58-61, Dec. 2012. (PDF)
  23. M. Araghchini, M. Kim, X. Yu, F. Herrault, M.G. Allen, and J.H. Lang, "Modeling and measured verification of loss in MEMS toroidal inductors," IEEE Energy Conversion Congress and Exposition (ECCE), p 3293-3300, Sept. 2012. (PDF)
  24. J.K. Kim, S.J. Paik, F. Herrault, and M.G. Allen, "UV-LED lithography for 3-D high aspect ratio microstructure patterning," 14th Solid State Sensors, Actuators, and Microsystems Workshop, p 481-484, June 2012. (PDF)
  25. M. Luo, C. Song, F. Herrault, and M.G. Allen, "A microfabricated RF wireless pressure sensor made completely of biodegradable materials," 14th Solid State Sensors, Actuators, and Microsystems Workshop, p 38-41, June 2012. (PDF)
  26. S.J. Paik, S. Park, V. Zamitsyn, S. Choi, X. Guo, M. Prausnitz, and M.G. Allen, "A highly dense nanoneedle array for intracellular gene delivery," 14th Solid State Sensors, Actuators, and Microsystems Workshop, p 149-152, June 2012. (PDF)
  27. B.A. Peterson, F. Herrault, O.D. Oniku, Z.A. Kaufman, D.P. Arnold, and M.G. Allen, "Assessment of laser-induced damage in laser-micromachined rare-earth permanent magnets at the sub-millimeter scale," Intermag 2012, May 2012.
  28. M. Kranz, M.G. Allen, and T. Hudson, "In situ polarization of polymer films in microsensors," of SPIE - The International Society for Optical Engineering - Behavior and Mechanics of Multifunctional Materials and Composites, v 8342, March 2012. (PDF)
  29. M. Kranz, M.G. Allen, and T. Hudson, "MEMS-based spectral decomposition of acoustic signals," of SPIE - The International Society for Optical Engineering - Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems, v 8345, March 2012. (PDF)
  30. D.V. Harburg, X. Yu, F. Herrault, C.G. Levey, M.G. Allen, and C.R. Sullivan, "Micro-fabricated thin-film inductors for on-chip power conversion," 2012 7th International Conference on Integrated Power Electronics Systems (CIPS), p. 6ff, March 2012. (PDF)
  31. F. Herrault, P.A. Hidalgo, C.-H. Ji, A. Glezer, and M.G. Allen, "Cooling performance of micromachined self-oscillating reed actuators in heat transfer channels with integrated diagnostics," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), p 1217-1220, Jan. 2012. (PDF)
  32. X. Yu, M.S. Kim, F. Herrault, C.-H. Ji, J.K. Kim, and M.G. Allen, "Silicon-embedded 3D toroidal air-core inductor with through-wafer interconnect for on-chip integration," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), p 325-328, Jan. 2012. (PDF)
  33. 2011

    Journal

  34. B.A. English, and M.G. Allen, "Control of ignition delay in microfabricated hot-wire igniters: Simulation, fabrication, and experimental results," Sensors and Actuators, A: Physical, v 172, n 2, p 483-490, Dec. 2011. (PDF)
  35. A. Armutlulu, Y. Fang, S.H. Kim, C.H. Ji, S.A. Bidstrup Allen, and M.G. Allen, " A MEMS-enabled 3D zinc-air microbattery with improved discharge characteristics based on a multilayer metallic substructure," Journal of Micromechanics and Microengineering, v 21, n 10, Oct. 2011. (PDF)
  36. X. Wu, S.-H. Kim, C.-H. Ji, and M.G. Allen, "A solid hydraulically amplified piezoelectric microvalve," Journal of Micromechanics and Microengineering, v 21, n 9, p 095003 (11 p), Sept. 2011. (PDF)
  37. S. Zhang, Z. Liu, D.G. Bucknall, L. He, K. Hong, J.W. Mays, and M.G. Allen, "Thermally switchable thin films of an ABC triblock copolymer of poly(n-butyl methacrylate)-poly(metrhyl methacrylate)-poly(2-fluoroethyl methacrylate)," Applied Surface Science, v 257, n 22, p 9673-7, Sept. 2011. (PDF)
  38. J.W. Lee, P. Gadiraju, J.H. Park, M.G. Allen, and M.R. Prausnitz, "Microsecond thermal ablation of skin for transdermal drug delivery," Journal of Controlled Release, v 154, n 1, p 58-68, Aug, 2011. (PDF)
  39. S. Rajaraman, J.A. Bragg, J.D. Ross and M.G. Allen, "Micromachined three-dimensional electrode arrays for transcutaneous nerve tracking," Journal of Micromechanics and Microengineering, v 21, n 8, p 080514 (13 p), Aug. 2011. (PDF)
  40. B.A. Wester, S. Rajaraman, J.D. Ross, M.C. LaPlaca, and M.G. allen, "Development and characterization of a packaged mechanically actuated microtweezer system," Sensors and Actuators: A Physical, v 167, n 2, p 502-11, June 2011. (PDF)
  41. Z. Liu, D.G. Bucknall, and M.G. Allen, "Inclined nanoimprinting lithography-based 3D nanofabrication," Journal of Micromechanics and Microengineering, v 21, n 6, p 060536 (11 p), June 2011. (PDF)
  42. Z. Liu, D.G. Bucknall, and M.G. Allen, "Inclined nanoimprinting lithography for 3D nanopatterning," Nanotechnology, v 22, n 22, p 225302 (8 p), June 2011. (PDF)
  43. S. Rajaraman, S.-O. Choi, M.A. McClain, J.D. Ross, M.C. LaPlaca, and M.G. Allen, "Metal-transfer-micromolded three-dimensional microelectrode arrays for in-vitro brain-slice recordings," Journal of Microelectromechanical Systems, v 20, n 2, p 396-409, April 2011. (PDF)
  44. M.A. McClain, I.P. Clements, R.H. Shafer, R.V. Bellamkonda, M.C. Laplaca, and M.G. Allen, "Highly-compliant, microcable neuroelectrodes fabricated from thin-film gold and PDMS," Biomedical Microdevices, v 13, n 2, p 361-373, April 2011. (PDF)
  45. S. Choi, Y.-K. Yoon, S.-H. Kim, and M.G. Allen, "Nonlinear sensitivity enhancement of resonant microsensors and its application to low lower magnetic sensing," Journal of Micromechanics and Microengineering, v 21, n 4, p 045004, April 2011. (PDF)
  46. J.K. Kim, M.G. Allen, and Y.-K. Yoon, "Computer controlled dynamic mode multidirectional UV lithography for 3-D microfabrication," Journal of Micromechanics and Microengineering, v 21, n 3, p 035003, March 2011. (PDF)
  47. Y.-K. Yoon, J.-H. Park, J.-W. Lee, M.R. Prausnitz, and M.G. Allen, "A thermal microjet system with tapered micronozzles fabricated by inclined UV lithography for transdermal drug delivery," Journal of Micromechanics and Microengineering, v 21, n 2, p 025014 (9 p), Feb 2011. (PDF)
  48. C. Song, A.R. Aiyar, S.-H. Kim, and M.G. Allen, "Exploitation of aeroelastic effects for drift reduction, in an all-polymer air flow sensor," Sensors and Actuator: A Physical, v 165, n 1, p 66-72, Jan. 2011. (PDF)
  49. Conference

  50. N. Naik, V. Kumar, E.L. Chaikof, and M.G. Allen, "MEMS-assisted spatially homogeneous endothelialization of a high length-to-depth aspect ratio microvascular network," IEEE Engineering in Medicine and Biology Society (EMBC), p 290-293, Sept. 2011. (PDF)
  51. F. Herrault, W.P. Galle, R.H. Shafer, and M.G. Allen, "Electroplating-based approaches for volumetric nanomanufacturing," Technologies for Future Micro-Nano Manufacturing, Aug. 2011. (PDF)
  52. M. Kranz, M.G. Allen, and T. Hudson, "In situ wafer-level polarization of electret films in MEMS acoustic sensor arrays," 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), pp 914-917, June 2011. (PDF)
  53. J.K. Kim, C. Xiaoyu, D.E. Senior, M.G. Allen, and Y.-K. Yoon, "Three dimensional nanoscale fabrication and modeling of dynamic mode multidirectional UV lithography," 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), pp 1737-1740, June 2011. (PDF)
  54. Z. Liu, F. Herrault, S.-H. Kim, D.G. Bucknall, and M.G. Allen, " Fabrication of 3-D hybrid polymer-magnetite nanostructures with geometric shape anisotropy," 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), pp 1630-1633, June 2011. (PDF)
  55. X. Yu, F. Herrault, C.-H. Ji, S.-H. Kim, M.G. Allen, G. Lisi, L. Nguyen, and D.I. Anderson, "Watt-level wireless power transfer based on stacked flex circuit technology," IEEE 61st Electronic Components and Technology Conference (ECTC), p 2185-91, June 2011. (PDF)
  56. J. Kim, S.-J. Paik, P.-C. Wang, S.-H. Kim, and M.G. Allen, "Maskless fabrication of high aspect ratio structures by combination of micromolding and direct drawing," 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2011), p280-283, Cancun, Mexico, Jan. 2011. (PDF)
  57. P.-C. Wang, S.-J. Paik, J. Kim, S.-H. Kim, and M.G. Allen, "Hypodermic-needle-like hollow polymer microneedle array using UV lithography into micromolds," 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2011), v 165, n 1, p 66-72, Jan. 2011. (PDF)
  58. 2010

    Journal

  59. F. Herrault, S. Yorish, T.M. Crittenden, C.-H. Ji, and M.G. Allen, "Parylene-insulated ultradense microfabricated coils," Journal of Microelectromechanical Systems, v 19, n 6, p 1277-83, Dec. 2010. (PDF)
  60. W.J. Xu, M. Kranz, S.-H. Kim, and M.G. Allen, "Micropatternable elastic electrets based on a PDMS/carbon nanotube composite," Journal of Micromechanics and Microengineering, v 20, n 10, p 104003 (7 p), Oct. 2010. (PDF)
  61. Y. Zhao, Y. Li, B. Pan, S.-H. Kim, Z. Liu, M.M. Tentzeris, J. Papapolymerou, and M.G. Allen, "RF evanescent-mode cavity resonator for passive wireless sensor applications," Sensors and Actuators: A Physical, v 161, n 1-2, p 322-8, June 2010. (PDF)
  62. J.M. Caves, V.A. Kumar, W. Xu, N. Naik, M.G. Allen, and E.L. Chaikof, "Microcrimped collagen fiber-elastin composites," Advanced Materials, v 22, n 18, p 2041-2044, May 2010. (PDF)
  63. S.-O Choi, Y. Kim, J.-H. Park, J. Hutcheson, H.S. Gill, Y.-K. Yoon, M.R. Prausnitz, and M.G. Allen, "An electrically active microneedle array for electroporation," Biomedical Microdevices, v 12, n 2, p 263-273, Apr. 2010. (PDF)
  64. Z. Liu, D.G. Bucknall, and M.G. Allen, "Absorption performance of iodixanol-imprinted polymers in aqueous and blood plasma media," Acta Biomaterialia, vol.6, p 2003-2012, 2010. (PDF)
  65. F. Herrault, B.C. Yen, C.-H. Ji, Z.S. Spakovszky, J.H. Lang, and M.G. Allen, "Fabrication and performance of silicon-embedded permanent-magnet microgenerators," Journal of Microelectromechanical Systems, v 19, n 1, p 4-13, Feb. 2010. (PDF)
  66. Conference

  67. A. Armutlulu, Y. Fang, S.-H. Kim, C.-H. Ji, S.A. B. Allen, and M.G. Allen, "High-current Zn-Air microbattery based on a micromachined multilayer lateral metallic scaffold," 10th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2010), p 107-110, 2010. (PDF)
  68. P. Hidalgo, F. Herrault, A. Glezer, M.G. Allen, S. Kaslusky, and B.S. Rock, " Heat transfer enhancement in high-power heat sinks using active reed technology," 16th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC), Page(s): 1-6, v 19, Oct. 2010. (PDF)
  69. F. Herrault, W.P. Galle, and M.G. Allen, "High speed axial flux permanent magnet micromotors with electroplated windings," Solid State Sensors, Actuators, and Microsystems Conference, (Hilton Head), p. 404-408, June 2010. (PDF)
  70. J.J. Norman, S.-O Choi, A.R. Aiyar, S.N. Andrews, M.R. Prausnitz, and M.G. Allen, "Sharp-tipped hollow metal microneedles fabricated by sacrificial micromolding." First International Conference on Microneedles, May 23-25, 2010. (PDF)
  71. S.-J. Paik, S.-H. Kim, P.-C. Wang, B. Wester, and M.G. Allen, "Dissolvable-tipped, drug-reservoir integrated microneedle array for transdermal drug delivery," 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), p 312 - 315, Jan. 2010. (PDF)
  72. Z. Liu, N. Naik, D.G. Bucknall, and M.G. Allen, "Mechanosynthesis of three-dimensional replicated nanostructures by nanolithography-based molecular manipulation," 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), p 452 - 455, Jan. 2010. (PDF)
  73. W. Xu, S. Choi, M. G. Allen, "Hairlike carbon-fiber-based solar cell," 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), p 1187 - 1190, Jan. 2010. (PDF)
  74. W.P. Galle, S.-H. Kim, U. Shah, and M.G. Allen, "Micromachined capacitors based on sequential multilayer electroplating," 23nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Jan. 2010. (PDF)
  75. 2009

    Journal

  76. W. Xu, C.-H. Ji, R. Shafer, and M.G. Allen, "Fast and controlled integration of carbon nanotubes into microstructures," Microelectromechanical Systems - Materials and Devices II, p 59-64, 2009. (PDF)
  77. C.-H. Ji, F. Herrault and M.G. Allen, "Micro projection lithography using microlens on a mask," Journal of Micromechanics and Microengineering, v 19, n 10, p 127003 (6pp), 2009. (PDF)
  78. A.R. Aiyar, C. Song, S.-H. Kim and M. G. Allen, "An all-polymer air-flow sensor array using a piezoresistive composite elastomer," Smart Materials and Structures, 18, 115002, 2009. (PDF)
  79. M.A. McClain, M.C. LaPlaca, and M.G. Allen, "Spun-cast micromolding for etchless micropatterning of electrically functional PDMS structures," Journal of Micromechanics and Microengineering, v 19, n 10, p 107002 (6 p), Oct. 2009. (PDF)
  80. S.-H. Kim, C.-H. Ji, W.P. Galle, F. Herrault, Z. Wu, J.-H. Lee, C.-A. Choi, and M.G. Allen, "An electromagnetic energy scavenger from direct airflow," Journal of Micromechanics and Microengineering, v 19, n 9, p 094010 (8 p), Sept. 2009. (PDF)
  81. C.-H. Ji, F. Herrault, P. Hopper, P. Smeys, P. Johnson, M.G. Allen, "Electroplated metal buried interconnect and through-wafer metal-filled via technology for high-power integrated electronics," IEEE Transactions on Advanced Packaging, Vol. 32, Issue 3, p 695-702, Aug. 2009. (PDF)
  82. Y. Zhao, Y.K. Yoon, S.O. Choi, X. Wu, Z. Liu, and M.G. Allen, "Three dimensional metal pattern transfer for replica molded microstructures," Applied Physics Letters, vol. 94, no. 2, 023301, 2009. (PDF)
  83. Conference

  84. W. Xu, M. Kranz, S.-H. Kim, and M.G. Allen, "Micropatternable Elastic Carbon Nanotube/PDMS Electrets," PowerMEMS 2009, Dec. 2009. (PDF)
  85. P.-C. Wang, B. A. Wester, S. Rajaraman, S.-J. Paik, S.-H. Kim, and M.G. Allen, "Hollow polymer microneedle array fabricated by photolithography process combined with micromolding technique," IEEE EMBC conference, Sept. 2009. (PDF)
  86. B.A. Wester, J.D. Ross, S. Rajaraman, and M.G. Allen, "Packaging and characterization of mechanically actuated microtweezers for biomedical applications," IEEE EMBC Conference, Sept. 2009. (PDF)
  87. Z. Liu, D.G. Bucknall, and M.G. Allen, "Fabrication of molecular-scale patterns with chemically tunable functionalities," Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2009), p 449-452, June 2009. (PDF)
  88. W. Xu, and M.G. Allen, "Fabrication of patterned carbon nanotube (CNT) / elastomer bilayer material and its utilization as force sensors," Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2009), p 2242-2245, June 2009. (PDF)
  89. C.-H. Ji, F. Herrault, and M.G. Allen, "Micro projection lithography inside deep trenches using microlens on a mask," Solid-State Sensors, Actuators and Microsystems Conference, 2009 (TRANSDUCERS 2009), p 1908-1911, June 2009. (PDF)
  90. C. Song, A. R. Aiyar, S.-H. Kim, and M.G. Allen, "Exploitation of aeroelastic effects for drift reduction in an all-polymer air flow sensor," Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2009), p 1545-1548, June 2009. (PDF)
  91. N. Naik, J. Caves,V. Kumar,E. Chaikof, and M.G. Allen, "A template-based fabrication technique for spatially-designed polymer micro/nanofiber composites," Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2009), p 1869-1872, June 2009. (PDF)
  92. F. Herrault, S. Yorish, T. Crittenden, and M.G. Allen, "Microfabricated, ultra-dense, three-dimensional metal coils," Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2009), p 1718-1721, June 2009. (PDF)
  93. A. Aiyar, C. Song, S.-H. Kim, and M.G. Allen, "An all polymer air-flow sensor array using a piezoresistive composite elastomer," 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), p 447-451, Jan. 2009. (PDF)
  94. 2008

    Journal

  95. F. Herrault, C.-H. Ji, and M.G. Allen, "Ultraminiaturized, high-speed, permanent-magnet generators for milliwatt-level power generation," Journal of Microelectromechanical Systems, Vol. 17, No. 6, p 1376-1387, 2008. (PDF)
  96. F. Herrault, D.P. Arnold, I. Zana, P. Galle, and M.G. Allen, "High temperature operation of multi-watt, axial-flux, permanent-magnet microgenerators," Sensors and Actuators A: Physical, Vol. 148, Issue 1, p 299-305, Nov. 2008. (PDF)
  97. C.-H Ji, F. Herrault, and M.G. Allen, "A metallic buried interconnect process for through-wafer interconnection," Journal of Micromechanics and Microengineering, v 18, n 7, p 085016 (10 p), Aug. 2008. (PDF)
  98. Y. Choi, B. Wester, and M.G. Allen, "Mechanically driven microtweezers with integrated microelectrodes," Journal of Micromechanics and Microengineering, v 18, n 6, p 065004 (9 p), June 2008. (PDF)
  99. Y.-H. Joung, and M.G. Allen, "A micromachined chip-to-board interconnect system using electroplating bonding technology," IEEE Transactions on Advanced Packaging, v 31, n 2,p 357-66, May 2008. (PDF)
  100. Y.-H. Joung, and M.G. Allen, "Inter-substrate microstructure formation by electroplating bonding technology," Journal of Micromechanics and Microengineering, v 18, n 4, p 045020-1-12, April 2008. (PDF)
  101. X. Wu, G. Yuan, Y.-K. Yoon, and M.G. Allen, "Kinematically Stabilized Microbubble Actuator Arrays," Journal of Microelectromechanical Systems, vol. 17, issue 1, p 124 - 132, Feb. 2008. (PDF)
  102. Conference

  103. W. Xu, C.-H. Ji, R. Shafer, M.G. Allen, "Fast and controlled integration of carbon nanotubes into microstructures," Materials Research Society conference, Vol. 1139, No.:1139-GG03-06, Boston, Dec. 2008. (PDF)
  104. Z. Liu, D. Bucknall, M.G. Allen, "Recognition and Absorption of the water-soluble X-ray contrast medium iodixanol using molecularly imprinted polymers for biomedical applications," Materials Research Society conference, Boston, Dec. 2008. (PDF)
  105. S.-H. Kim, C.-H. Ji, W.P. Galle, F. Herrault, X. Wu, J.-H. Lee, C.-A. Choi, and M.G. Allen, "An Electromagnetic Energy Scavenger from Direct Airflow," PowerMEMS 2008, p 133-136, Nov. 2008. (PDF)
  106. B. C. Yen, F. Herrault, K.J. Hillman, M.G. Allen, F.F. Ehrich, S. Jacobson, C.-H. Ji, J.H. Lang, H. Li, Z.S. Spakovszky, and D.R. Veazie, "Characterization of a fully-integrated permanent-magnet turbine generator," PowerMEMS 2008, p 121-124, Nov. 2008. (PDF)
  107. M. McClain, M. C LaPlaca, and M.G. Allen, "An integrated elastomer mesh and microelectrode array for neurophysiology," Georgia Life Sciences Summit, September 2008.
  108. S. Rajaraman, Y. Zhao, X. Wu, S.-H. Kim, and M.G. Allen, "Metal transfer micromolding (MTM) process for high-aspect-ratio 3-D structures with functional metal surfaces," International Symposium on Flexible Automation (ISFA 2008), Atlanta, USA, June 2008. (PDF)
  109. Y. Zhao, S.-H. Kim, Y. Li, B. Pan, X. Wu, E.M. Tentzeris, J. Papapolymerou, and M.G. Allen, "A micromachined airflow sensor based on RF evanescent-mode cavity tesonator," International Microwave Symposium (IMS 2008), Atlanta, USA, June 2008. (PDF)
  110. F. Herrault, T. Crittenden, S. Yorish, E. Birdsell, A. Glezer, and M.G. Allen, "A self-resonant, MEMS-fabricated, air-breathing engine," Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2008), p 348-351, June 2008. (PDF)
  111. X. Wu, S.-H. Kim, C.-H. Ji, and M.G. Allen,"A piezoelectrically-driven high flow rate axial polymer microvalve with solid hydraulic amplification," 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), p523-526, Tucson, USA, January 2008. (PDF)
  112. J.K. Kim, M.G. Allen, and Y.-K. Yoon, "Automated dynamic mode multidirectional UV lithography for complex 3-D microstructures," 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), p399-402, Tucson, USA, January 2008. (PDF)
  113. F. Herrault, C.-H. Ji, S.-H. Kim, X. Wu, and M.G. Allen, "A microfluidic-electric package for Power MEMS generators," 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), p112-115, Tucson, USA, January 2008. (PDF)
  114. 2007

    Journal

  115. J.-H Park, S.-O Choi, R. Kamath, J.-K. Yoon, M.G. Allen, and M.R. Prausnitz, "Polymer particle-based micromolding to fabricate novel microstructures," Biomedical Microdevices, v 9, n 2, p 223-34, April 2007. (PDF)
  116. Y. Choi, M.A. McClain, M.C. LaPlaca, A.B. Frazier, and M.G. Allen, "Three dimensional MEMS microfluidic perfusion system for thick brain slice cultures," Biomedical Microdevices, v 9, n 1, p 7-13, Feb. 2007. (PDF)
  117. J.-H. Park, Y.-K. Yoon, S.-O Choi, M.R. Prausnitz, and M.G. Allen, "Tapered conical polymer microneedles fabricated using an integrated lens technique for transdermal drug delivery," IEEE Transactions on Biomedical Engineering, v 54, n 5, p 903-13, May 2007. (PDF)
  118. Y.-H. Joung, and M.G. Allen, "Chip-to-board micromachining for interconnect layer passive components," IEEE Transactions on Components and Packaging Technologies, v 30, n 1, p 15-23, March 2007. (PDF)
  119. J. Lee, K. Naeli, H. Hunter, J. Berg, T. Wright, C. Courcimault, N. Naik, M.G. Allen, O. Brand, A. Glezer, and W.P. King, "Characterization of liquid and gaseous micro- and nanojets using microcantilever sensors," Sensors and Actuators A: Physical, v. 134, issue 1, p 128-139, Feb. 2007. (PDF)
  120. N. Naik, C. Courcimault, H. Hunter, J. Berg, J. Lee, K. Naeli, T. Wright, M.G. Allen, O. Brand, A. Glezer, and W.P. King, "Microfluidics for generation and characterization of liquid and gaseous micro- and nanojets," Sensors and Actuators A: Physical, v. 134, issue 1, p 119-127, Feb. 2007. (PDF)
  121. S. Rajaraman, S.-O Choi, R.H. Shafer, J.D. Ross, J. Vukasinovic, Y. Choi, S.P. DeWeerth, A. Glezer, and M.G. Allen., "Microfabrication technologies for a coupled three-dimensional microelectrode, microfluidic array," Journal of Micromechanics and Microengineering, v 17, n 1, p 163-71, Jan. 2007. (PDF)
  122. Conference

  123. M.A. McClain, M.C. LaPlaca, and M.G. Allen, " The development of strand-like microelectrode arrays for in vitro neuron culture," Society for Neuroscience, Nov. 2007.
  124. Z. Liu, D.G. Bucknall, and M.G. Allen, "Fabrication of three-dimensional nano-patterns by inclined nanoimprinting lithography," Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, p1621-1624, Lyon, France, June 2007. (PDF)
  125. S. Rajaraman, M.A. McClain, S.-O Choi, J.D. Ross, S.P. DeWeerth, M.C. LaPlaca, and M.G. Allen, "Three-dimensional metal transfer micromolded microelectrode arrays (MEAS) for in-vitro brain slice recordings," Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, p1251-1254, Lyon, France, June 2007. (PDF)
  126. F. Herrault, C.-H. Ji, R.H. Shafer, S.-H. Kim, and M.G. Allen "Ultraminiaturized milliwatt-scale permanent magnet generators," Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, p899-902, Lyon, France, June 2007. (PDF)
  127. F. Herrault, C.-H. Ji, S. Rajaraman, R.H. Shafer, and M.G. Allen, "Electrodeposited metal structures in high aspect ratio cavities using vapor deposited polymer molds and laser micromachining" Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, p513-516, Lyon, France, June 2007. (PDF)
  128. S. Choi, S.-H. Kim, Y.-K. Yoon, and M.G. Allen "Exploitation of nonlinear effects for enhancement of the sensing performance of resonant sensors" Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, p745-748, Lyon, France, June 2007. (PDF)
  129. P.D. Gadiraju, J.-H. Park, J.W. Lee, and M.G. Allen, "Micro-ablation of skin by arc-discharge jet ejection for transdermal drug delivery" Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, p1947-1950, Lyon, France, June 2007. (PDF)
  130. X. Wu, H. Zhu, S.-H. Kim, and M.G. Allen, "A portanle pneumatically-actuated refreshable Braille cell," Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, France, June 2007. (PDF)
  131. Y. Zhao, Y.-K. Yoon, X. Wu, and M.G. Allen, "Metal-transfer-micromolding of air-lifted RF components," Transducers 2007: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, France, June 2007. (PDF)
  132. Y. Zhao, Y.-K. Yoon, and M.G. Allen, "Metal-transfer-micromolded RF components for System-On-Package (SOP)," 57 Electronic Components and Technology Conference (ECTC '07), 2007. (PDF)
  133. P. Galle, X. Wu, L. Milner, S.-H. Kim, P. Johnson, P. Smeys, P. Hopper, K. Hwang, and M.G. Allen, "Ultra-compact power conversion based on a CMOS-compatible microfabricated power inductor with minimized core losses," 57 Electronic Components and Technology Conference (ECTC '07), 2007. (PDF)
  134. 2006

    Journal

  135. B. Pan, Y.-K. Yoon, G.E. Ponchak, M.G. Allen, J. Papapolymerou, and M.M. Tentzeris, "Analysis and Characterization of a High-Performance Ka-Band Surface Micromachined Elevated Patch Antenna," Antennas and Wireless Propagation Letters, v 5, issue 1, p. 511–514, Dec. 2006. (PDF)
  136. Y. Wang, G. Yuan, Y.-K. Yoon, M.G. Allen, and S.A. Bidstrup, "Optimization of synthetic jet fluidic structures in printed wiring boards," Transactions of the ASME. Journal of Electronic Packaging, v 128, n 4, p 353-9, Dec. 2006. (PDF)
  137. D.J. Coe, M.G. Allen, C.S Rinehart, and A. Glezer, "Pneumatically actuated micromachined synthetic jet modulators," Sensors and Actuators A (Physical), v 132, n 2, p 689-700, Nov. 2006. (PDF)
  138. D.P. Arnold, S. Das, J.-W. Park, I. Zana, J.H. Lang, and M.G. Allen, "Microfabricated high-speed axial-flux multiwatt permanent-magnet Generators-part II: design, fabrication, and testing," Journal of Microelectromechanical Systems, v 15, n 5, p 1351-63, Oct. 2006. (PDF)
  139. S. Das, D.P. Arnold, I. Zana, J.-W. Park, M.G. Allen, and J.H. Lang, "Microfabricated high-speed axial-flux multiwatt permanent-magnet Generators-part I: modeling," Journal of Microelectromechanical Systems, v 15, n 5, p 1330-50, Oct. 2006. (PDF)
  140. S. Choi, S.-H. Kim, Y.-K. Yoon, and M.G. Allen. "A magnetically excited and sensed MEMS-based resonant compass," IEEE Transaction on Magnetics, v 42, issue 10, p 3506-3508, Oct. 2006. (PDF)
  141. Y.-K. Yoon, J.-H. Park, and M.G. Allen, "Multidirectional UV lithography for complex 3-D MEMS structures," Journal of Microelectromechanical Systems, v 15, n 5, p 1121-30, Oct. 2006. (PDF)
  142. C.C. Chung, and M.G. Allen, "Thermomigration-based junction isolation of bulk silicon MEMS devices," Journal of Microelectromechanical Systems, v 15, n 5, p 1131-8, Oct. 2006. (PDF)
  143. D.P. Arnold, F. Herrault, I. Zana, P. Galle, J.-W. Park, S. Das, J.H. Lang, and M.G. Allen, "Design optimization of an 8 W, microscale, axial-flux, permanent-magnet generator," Journal of Micromechanics and Microengineering, v 16, n 9, p S290-6, Sept. 2006. (PDF)
  144. S.A. Bidstrup, Y. Wang, G. Yuan, Y.-K. Yoon, and M.G. Allen, "Large eddy simulation (LES) for synthetic jet thermal management," International Journal of Heat and Mass Transfer, v 49, n 13-14, p 2173-9, July 2006. (PDF)
  145. F. Cros, H. Koser, M.G. Allen, and J.H. Lang, "Magnetic induction micromachine-part II: fabrication and testing," Journal of Microelectromechanical Systems, v 15, n 2, p 427-39, Apr. 2006. (PDF)
  146. D.P. Arnold, S. Das, F. Cros, I. Zana, J.H. Lang, and M.G. Allen, "Magnetic induction machines integrated into bulk-micromachined silicon," Journal of Microelectromechanical Systems, v 16, n 2, p 406-414, Apr. 2006. (PDF)
  147. Y.-K. Yoon, J.S. Kenney, A.T. Hunt, and M.G. Allen, "Low-loss microelectrodes fabricated using reverse-side exposure for a tunable ferroelectric capacitor application," Journal of Micromechanics and Microengineering, v 16, n 2, p 225-34, Feb. 2006. (PDF)
  148. Conference

  149. B. Pan, G. DeJean, J. Papapolymerou, M.M. Tentzeris, Y.-K. Yoon, and M.G. Allen, "High performance system-on-package integrated Yagi-Uda antennas for W-band applications and mm-wave ultra-wideband data links," 56th Electronic Components & Technology Conference, 2006. (PDF)
  150. E.D. Birdsell, and M.G. Allen, "Wireless chemical sensors for high temperature environments," Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF)
  151. S.-O. Choi, S. Rajaraman, Y.-K. Yoon, X. Wu, and M.G. Allen, "3-D metal patterned microstructure using inclined UV exposure and metal transfer micromolding technology," Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF)
  152. M.A. Fonseca, J. Kroh, J. White, and M.G. Allen, "Flexible wireless passive pressure sensors for biomedical applications," Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF)
  153. X. Wu, G. Yuan, S.-O. Choi, Y. Zhao, S.-H. Kim, Y-K. Yoon, and M. G. Allen, "Lateral lamination approach for multilayer piezoelectric microactuator," Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF)
  154. Y.-K. Yoon, and M.G. Allen, "Proximity mode inclined UV lithography," Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2006), June 2006. (PDF)
  155. F. Herrault, D.P. Arnold, I. Zana, P. Galle, and M.G. Allen, "Multi-watt, microscale, axial-flux, permanent-magnet generators operating at high temperatures," Intermag Conference, May 2006. (PDF)
  156. S. Choi, S.-H. Kim, Y.-K. Yoon, and M.G. Allen, "A magnetically excited and sensed MEMS-based resonant compass," Intermag Conference, May 2006. (PDF)
  157. X. Wu, Y. Zhao, Y.-K. Yoon, S.-O Choi, J.-H. Park and M.G. Allen, "Enhanced wettability polymer micromolding by a 3-D metal transfer process," ACS conference, March 2006. (PDF)
  158. J.S. Kenney, Y-.K. Yoon, M. Ahn, M.G. Allen, Z. Zhao, X. Wang, A. Hunt, and D. Kim, "Low-voltage ferroelectric phase shifters from L- to C-band," IEEE Aerospace Conference, March 2006. (PDF)
  159. B.A. English, P. Gadiraju, C.S. Rinehart, A. Glezer, and M.G. Allen, "Gas generator actuator arrays for flight control Of spinning body projectiles" 19th IEEE International Conference MicroElectro Mechanical Systems (MEMS 2006), Jan. 2006. (PDF)
  160. W. Ye, Y.-K Yoon, and M. G. Allen, "Investigation of gas separation induced by thermal loading," IEEE Nano/Micro Engineered and Molecular Systems (NEMS) conference, Jan. 2006. (PDF)
  161. 2005

    Journal

  162. Y.-K. Yoon, J.-W. Park, and M.G. Allen, "Polymer-core conductor approaches for RF MEMS," Journal of Microelectromechanical Systems, v. 14, n. 5, Oct, 2005. (PDF)
  163. Y. Wang, G. Yuan, Y.-K. Yoon, M.G. Allen, and S.A. Bidstrup, "Active cooling substrates for thermal management of microelectronics," IEEE Transactions on Components and Packaging Technologies, v 28, n 3, p 477-83, Sept. 2005. (PDF)
  164. Yong-Kyu Yoon, M.G. Allen "Embedded conductor technology for micromachined RF elements," Journal of Micromechanics and Microengineering, v 15, n 6, June 2005, p 1317-26. (PDF)
  165. D.P. Arnold, I. Zana, and M.G. Allen, "Analysis and optimization of vertically oriented, through-wafer, laminated magnetic cores in silicon," Journal of Micromechanics and Microengineering, vol. 15, p 971-977, May 2005. (PDF)
  166. C. Chung, and M.G. Allen, "Uncrosslinked SU-8 as a sacrificial material," Journal of Micromechanics and Microengineering, v 15, n 1, p N1-N5, 2005. (PDF)
  167. J.-H. Park, M.G. Allen, and M.R. Prausnitz, "Biodegradable polymer microneedles: fabrication, mechanics and transdermal drug delivery," Journal of Controlled Release, 104:51-66, 2005. (PDF)
  168. S.P. Davis, W. Martanto, M.G. Allen, and M.R. Prausnitz, "Hollow metal microneedles for insulin delivery to diabetic rats," IEEE Transactions on Biomedical Engineering, v. 52, no. 5, p 909-15, 2005. (PDF)
  169. Conference

  170. B. Pan, Y.-K. Yoon, J. Papapolymerou, M.M. Tentzeris, and M.G. Allen, "Design and fabrication of substrate-independent integrated antennas utilizing surface micromachining," Asian-Pacific Microwave Conference (APMC), Dec. 2005. (PDF)
  171. I. Zana, F. Herrault, D.P. Arnold, and M.G. Allen, "Magnetic patterning of permanent-magnet rotors for microscale motor/generators," 5th International Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), Nov. 2005. (PDF)
  172. D.P. Arnold, P. Galle, F. Herrault, S. Das, J.H. Lang, and M.G. Allen, "A self-contained, flow-powered microgenerator system," 5th International Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), p 113-115, Nov. 2005. (PDF)
  173. D.P. Arnold, I. Zana, F. Herrault, P. Galle, J.-W. Park, S. Das, J.H. Lang, and M.G. Allen, "Optimization of a microscale, axial-flux, permanent-magnet generator," 5th International Workshop Micro Nanotechnology For Power Generation and Energy Conversion Apps. (PowerMEMS 2005), p 165-168, Nov. 2005. (PDF)
  174. Y. Zhao, X. Wu, Y.-K. Yoon, J.-H. Park, S.J. Kennedy, Z. Schwartz, B.D. Boyan, and M.G. Allen, "Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates," ASME IMECE, paper number IMECE2005-81991, p1-7, Nov. 2005. (PDF)
  175. N.Naik, C. Courcimault, H. Hunter, J. Berg, J. Lee, K. Naeli, T. Wright, M.G. Allen, O. Brand, A. Glezer, and W. King, "Fabrication and characterization of liquid and gaseous micro-and nanojets," ASME IMECE, paper number IMECE2005-81698, Nov. 2005. (PDF)
  176. J. Lee, K. Naeli, H. Hunter, J. Berg, T. Wright, C. Courcimault, N.Naik, M.G. Allen, O. Brand, A. Glezer, and W. King, "Micro-cantilever based metrology tool for flow characterization of liquid and gaseous micro/nanojets," ASME IMECE, paper number IMECE2005-81732, Nov. 2005. (PDF)
  177. X. Wu, Y. Zhao, Y.-K. Yoon, S.-O. Choi, J.-H. Park, and M.G. Allen, "Wafer-scale Micromolding of Unitary Polymeric Microstructures with Simultaneously Formed Functional Metal Surface," International Conference on micro Total Analysis Systems (microTAS), p205-207, Oct. 2005. (PDF)
  178. J.H. Park, J.-W. Park, Y.-K. Yoon, Y. Joung, S. Choi, J. Lee, M.G. Allen, and M.R. Prausnitz, "Wireless thermal micro-ablation of skin for transdermal drug delivery," BMES conference, Sept. 2005. (PDF)
  179. M.G. Allen, "Implantable micromachined wireless pressure sensors: approach and clinical demonstration," 2nd International Workshop on Wearable and Implantable Body Sensor Networks, p 40-1, 2005.
  180. Y.-K. Yoon, B. Pan, J. Papapolymerou, M.M. Tentzeris, and M.G. Allen, "A Vertical W-band Surface-Micromachined Yagi-Uda Antenna," IEEE AP-S International Symposium and USNC/URSI National Raid Science Meeting, July 2005. (PDF)
  181. B. Pan, Y.-K. Yoon, J. Papapolymerou, M.M. Tentzeris, and M.G. Allen, "A High Performance Surface-Micromachined Elevated Patch Antenna," IEEE AP-S International Symposium and USNC/URSI National Raid Science Meeting, July 2005. (PDF)
  182. S.O. Choi, J.H. Park, Y. Choi, Y. Kim, H.S. Gill, Y.K. Yoon, M.R. Prausnitz and M.G. Allen, "An electrically active microneedle array for electroporation of skin for gene delivery," 13th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers '05), June 2005. (PDF)
  183. Y.-K. Yoon, B. Pan, M.M. Tentzeris, J. Papapolymerou, and M.G. Allen, "Surface-Micromachined Millimeter-Wave Antennas," 13th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers 05), vol. 1, p 1986-1989, June 2005. (PDF)
  184. D.P. Arnold, I. Zana, J.-W. Park, S. Das, Y.-H. Joung, D. Veazie, J.H. Lang, and M.G. Allen, "High-speed characterization and mechanical modeling of microscale, axial-flux, permanent-magnet generators," 13th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers '05), vol. 1, p 701-704, June 2005. (PDF)
  185. Y. Choi, S. Choi, R.H. Shafer, and M.G. Allen, "Highly inclined electrodeposited metal lines using an excimer laser patterning technique," 13th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers '05), June 2005. (PDF)
  186. W. Martanto, Y. Choi, Y. Joung, M.G. Allen, and M.R. Prausnitz, "Side-opening hollow microneedles for transdermal drug delivery," 32nd Annual Meeting of the Controlled Release Society (CRS), June 2005. (PDF)
  187. S.O. Choi, J.H. Park, Y. Kim, H.S. Gill, Y. Choi, M.G. Allen and M.R. Prausnitz, "Microneedle electrode array for electroporation of skin for gene therapy," 32nd Annual Meeting & Exposition of the Controlled Release Society (CRS), 2005. (PDF)
  188. B. Pan, Y.-K. Yoon, Y. Zhao, J. Papapolymerou, M.M. Tentzeris, and M.G. Allen, "A broadband surface-micromachined 15-45 GHz microstrip coupler," IEEE International Microwave Symposium, June 2005. (PDF)
  189. G. Yuan, X. Wu, Y.-K. Yoon, and M.G. Allen, "Kinematically-stabilized microbubble actuator arrays," 18th IEEE International Conference on MicroElectro Mechanical Systems (MEMS 2005), p 411-414, Jan. 2005.(PDF)
  190. S. Das, D.P. Arnold, I. Zana, J.-W. Park, J.H. Lang, and M.G. Allen, "Multi-watt electric power from a microfabricated permanent-magnet generator," 18th IEEE International Conference on MicroElectro Mechanical Systems (MEMS 2005), p 287-290, Jan. 2005. (PDF)
  191. M.G. Allen, "Micromachined endovascularly-implantable wireless pressure sensors: From concept to clinic," 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’05), p 275-278, 2005. (PDF)
  192. C. Courcimault, and M.G. Allen, "High-Q mechanical tuning of MEMS resonators using a metal deposition-annealing technique," 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’05), p 875-878, 2005. (PDF)
  193. 2004

    Journal

  194. D.P. Arnold, F. Cros, I. Zana, D. Veazie, and M.G. Allen, "Electroplated metal microstructures embedded in fusion-bonded silicon: conductors and magnetic materials," Journal of Microelectromechanical Systems, vol. 13, no. 5, p 791- 798, Oct. 2004. (PDF)
  195. Sung-Pil Chang, and M.G. Allen, "Demonstration for integrating capacitive pressure sensors with read-out circuitry on stainless steel substrate," Sensors and Actuators A (Physical), v A116, n 2, 15 Oct. 2004, p 195-204. (PDF)
  196. S.P. Davis, B.J. Landis, Z.H. Adams, M.G. Allen, and M.R. Prausnitz, "Insertion of microneedles into skin: measurement and prediction of insertion force and needle fracture force," Journal of Biomechanics, v 37, n 8, p 1155-63, Aug. 2004. (PDF)
  197. D.P. Arnold, I. Zana, F. Cros, and M.G. Allen, "Vertically-laminated magnetic cores by electroplating Ni-Fe into micromachined Si," IEEE Transactions on Magnectics, v 40, no. 4, p 3060-3062, July 2004. (PDF)
  198. J.-W. Park, F. Cros, and M.G. Allen, "Planar spiral inductors with multilayer micrometer-scale laminated cores for compact-packaging power converter applications," IEEE Transactions on Magnetics, v 40, no. 4, July 2004. (PDF)
  199. T.C. Leichle, M. Von Arx, S. Reiman, I. Zana, W. Ye, and M.G. Allen, "A low-power resonant micromachined compass," Journal of Micromechanics and Microengineering, v 14, n 4, p 462-70, April 2004. (PDF)
  200. S.-P. Chang, and M.G. Allen, "Capacitive pressure sensors with stainless steel diaphragm and substrate," Journal of Micromechanics and Microengineering, v 14, n 4, p 612-18, Apr. 2004. (PDF)
  201. H.H. DiBiaso, B.A. English, and M.G. Allen, "Solid-phase conductive fuels for chemical microactuators," Sensors and Actuators A (Physical), v A111, n 2-3, p 260-6, March 2004,. (PDF)
  202. Conference

  203. S.A. Jacobson, S. Das, N. Savoulides, J.L. Steyn, J.H. Lang, H.Q. Li, C. Livermore, M.A. Schmidt, C.J. Teo, S.D. Umans, A.H. Epstein, D.P. Arnold, J.-W. Park, I. Zana, and M.G. Allen, "Progress toward a microfabricated gas turbine generator for soldier portable power applications," 24th Army Science Conference, Nov. 2004. (PDF)
  204. E. Birdsell, J. Park, and M.G. Allen, "Wireless ceramic sensors operating in high temperature environments," 40th AIAA Joint Propulsion Conference, July 2004. (PDF)
  205. D.P. Arnold, S. Das, F. Cros, I. Zana, J.H. Lang, and M.G. Allen, "Magnetic induction machines embedded in fusion-bonded silicon," Solid-State Sensor, Actuator, and MicrosystemsWorkshop (Hilton Head), p 129-132, June 2004. (PDF)
  206. Y. Choi, S. Choi, R. Powers, and M.G. Allen, "Three-dimensional tower structures with integrated cross-connects for 3-D culturing of neurons," Solid-State Sensor, Actuator, and MicrosystemsWorkshop (Hilton Head), June 2004. (PDF)
  207. Y.-K. Yoon, B. Pan, P. Kirby, J. Papapolymerou, M.M. Tentzeris, and M.G. Allen, "Surface micromachined electromagnetically radiating RF MEMS," Solid-State Sensor, Actuator, and MicrosystemsWorkshop (Hilton Head), June 2004. (PDF)
  208. I. Zana, D.P. Arnold, and M.G. Allen, "Large volume, high performance electroplated Co-Pt micromagnets for MEMS applications," 205th Meeting Electrochemical Society, May 2004. (PDF)
  209. D.P. Arnold, F. Cros, I. Zana, M.G. Allen, S. Das, and J.h. Lang, "Second-generation, silicon-based magnetic induction machines for microengine power generation," Army Research Lab Collaborative Technology Alliances Conference, May 2004.
  210. Choi, S.O., Yoon, Y.K., M.G. Allen, Hunt, A.T., "A tunable capacitor using an immiscible bifluidic dielectric," IEEE MTT-S International Microwave Symposium, pt. 2, p 873-6, 2004. (PDF)
  211. B. Pan, Y, Yoon, P. Kirby, J. Papapolymerou, M.M. Tentzeris, and M.G. Allen, "A W-band surface micromachined monopole for low-cost wireless communication systems," IEEE MTT-S International Microwave Symposium, 2004. (PDF)
  212. J.-H. Park, M.G. Allen, Prausnitz, M.R., "Biodegradable polymer microneedles: fabrication, mechanics and transdermal drug delivery," 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, pt. 4, p 2654-7, 2004. (PDF)
  213. Y. Zhao, B.A. English, Y. Choi, H. DiBiaso, Y. Guang, and M.G. Allen, "Polymeric microcombustors for solid-phase conductive fuels," 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), p 498-501, 2004. (PDF)
  214. D.P. Arnold, I. Zana, F. Cros, and M.G. Allen, "Vertically-laminated magnetic cores by electroplating Ni-Fe into micromachined Si," 9th Joint MMM-Intermag Conference, Jan. 2004. (PDF)
  215. J.-H. Park, Y.-K. Yoon, M.R. Prausnitz, and M.G. Allen, "High-aspect-ratio tapered structures using an integrated lens technique," 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), p 383-6, 2004. (PDF)
  216. S.J. Hong, S. Choi, Y. Choi, M.G. Allen, and G.S. May "Characterization of low-temperature SU-8 photoresist processing for MEMS applications," ASMC Conference, 2004. (PDF)
  217. 2003

    Journal

  218. Y.-K. Yoon, D. Kim, M.G. Allen, J.S. Kenney, and A.T. Hunt, "A reduced intermodulation distortion tunable ferroelectric capacitor-architecture and demonstration," IEEE Transactions on Microwave Theory and Techniques, v 51, n 12, p 2568-76, Dec. 2003. (PDF)
  219. J.-W. Park, and M.G. Allen, "Ultra low-profile micromachined power Inductors with highly laminated Ni/Fe cores: Application to low-megahertz DC-DC converters," IEEE Transactions on Magnectics, vol. 39, no. 5, p 3184-3186, Sept. 2003. (PDF)
  220. D. Kim, Y. Choi, M. Ahn, M.G. Allen, and J.S. Kenney, "Monolithic 180° and 360° analog phase shifters based on barium strontium titanate coated sapphire substrates," IEICE Transactions on Electronics, v E86-C, n 8, p 1607-12, Aug. 2003.
  221. D.S. Kercher, J.-B. Lee; O. Brand, M.G. Allen, and A. Glezer, "Microjet cooling devices for thermal management of electronics," IEEE Transactions on Components and Packaging Technologies, v 26, n 2, p 359-66, June 2003. (PDF)
  222. T.J. Kaiser, and M.G. Allen, "A pendulous oscillating gyroscopic accelerometer fabricated using deep-reactive ion etching," Journal of Microelectromechanical Systems, v 12, n 1, p 21-8, Feb. 2003. (PDF)
  223. Conference

  224. B.A.English, H. Hude, and M.G. Allen, "Microcombustors based on controllable solid fuel elements," ASME International Mechanical Engineering Conference and Exposition, paper number IMECE2003-42823, Nov. 2003. (PDF)
  225. Y. Choi, R. Powers, V. Vernekar, A.B. Frazier, M.C. LaPlaca, and M.G. Allen, "High aspect ratio SU-8 structures for 3-D culturing of neurons," ASME International Mechanical Engineering Conference and Exposition paper number IMECE2003-42794, Nov. 2003. (PDF)
  226. D.P. Arnold, F. Cros, T. Glover, M.G. Allen, K. Hillman, and D. Veazie, "Materials and fabrication methods for high-temperature micro-magnetic machines for micro-turbine power generation," Army Research Lab Collaborative Technology Alliances Conference, p 77-81, Apr. 2003. (PDF)
  227. F. Cros, D.P. Arnold, M.G. Allen, S. Das, H. Koser, and J.H. Lang, "Micro-magnetic induction machines for portable power applications," Army Research Lab Collaborative Technology Alliances Conference, p 17-21, Apr. 2003. (PDF)
  228. H. Koser, F. Cros, M.G. Allen, and J.H. Lang, "Magnetic diffusion modeling in nonlinear micro-media: a modified finite-difference time-domain approach," Nanotechnology Conference and Trade Show (Nanotech 2003), v 1, p 280-3, 2003.
  229. C.G. Courcimault, D.S. Kercher, and M.G. Allen, "Microsystems for the fabrication of nano-scale structures," 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '03), v 1, p 730-3, 2003. (PDF)
  230. Davis, S.P., Prausnitz, M.R.; M.G. Allen, "Fabrication and characterization of laser micromachined hollow microneedles," 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '03), v 2, p 1435-8, 2003. (PDF)
  231. H.-S. Noh, Y. Choi; C.-F, Wu, P.J. Hesketh, and M.G. Allen, "Rapid, low-cost fabrication of parylene microchannels for microfluidic applications," 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '03), v 1, p 798-801, 2003. (PDF)
  232. Y. Choi, R. Powers, Y. Yoon, M.G. Allen, "A three-dimensional microfluidic network for cellular perfusion," 7th International Conference on Miniaturized Chemical and BioChemical Analysis Systems (microTAS), Oct. 2003. (PDF)
  233. J. Ross, G. Prado, Y. Choi, M.G. Allen, M.C. LaPlaca, and S. DeWeerth, "A novel system for measurement of electrophysiological signals associated with traumatic neuronal injury," 7th International Conference on Miniaturized Chemical and BioChemical Analysis Systems (microTAS), Oct. 2003. (PDF)
  234. Y.-K. Yoon, R. Powers, Y. Choi, C. Courcimault, and M.G. Allen, "Micromachined polymeric microvasculatures: A three-dimensional microfluidic system using inclined SU-8 structures and laser machining," 226th American Chemical Society National Meeting, September 2003. (PDF)
  235. M.G. Allen, "MEMS technology for the fabrication of RF magnetic components," International Magnetics Conference (INTERMAG), p FC-05, 2003. (PDF)
  236. J.-W. Park, and M.G. Allen, "Ultra-low-profile micromachined power inductors with highly laminated NiFe cores: application to low MHz DC-DC converters," International Magnetics Conference (INTERMAG), p EA-04, 2003. (PDF)
  237. Y.-H. Joung, and M.G. Allen, "High density electroplating bonding interconnect technology: chip packaging and high aspect ratio passive elements," 53rd Electronic Components and Technology Conference (ECTC), p 640-6, 2003. (PDF)
  238. Y.-K. Yoon, and M.G. Allen, "Tunable ferroelectric capacitor with low-loss electrodes fabricated using reverse side exposure," 53rd Electronic Components and Technology Conference (ECTC), p 1534-40, 2003. (PDF)
  239. Y.-K. Yoon, J.-H. Park, F. Cros, and M.G. Allen, "Integrated vertical screen microfilter system using inclined SU-8 structures," 16th Annual International Conference on Micro Electro Mechanical Systems (MEMS), p 227-30, 2003. (PDF)
  240. J.-H. Park, S. Davis, Y.-K. Yoon, M.R. Prausnitz, and M.G. Allen, "Micromachined biodegradable microstructures," 16th Annual International Conference on Micro Electro Mechanical Systems (MEMS), p 371-4, 2003. (PDF)
  241. T.C. Leichle, W. Ye, and M.G. Allen, "A sub-μW micromachined magnetic compass," 16th Annual International Conference on Micro Electro Mechanical Systems (MEMS), p 514-17, 2003. (PDF)
  242. S. Pinel, F. Cros, S. Nuttinck, S.-W. Yoon, M.G. Allen, and J. Laskar, "Very high-Q inductors using RF-MEMS technology for System-On-Package wireless communication integrated module," IEEE MTT-S International Microwave Symposium, v 3, p 1497-500, 2003. (PDF)
  243. 2002

    Journal

  244. D. Kim, Y. Choi, M.G. Allen, J.S. Kenney, and D. Kiesling, "A wide-band reflection-type phase shifter at S-band using BST coated substrate" IEEE Transactions on Microwave Theory and Techniques, v. 50, issue 12, Page(s):2903–2909, Dec. 2002. (PDF)
  245. J.W. Park, J. Park, Y.-H. Joung, and M.G. Allen, "Fabrication of high current and low profile micromachined inductor with laminated Ni/Fe core," IEEE Transactions on Components and Packaging Technologies, vol. 25, no. 1, p. 106-111, 2002. (PDF)
  246. M.A. Fonseca, J.M. English, M. von Arx, and M.G. Allen, "Wireless micromachined ceramic pressure sensor for high temperature applications," Journal of Microelectromechanical Systems, vol. 11, no.4, p. 337-43, 2002. (PDF)
  247. S.P. Chang, J.B. Lee, and M.G. Allen, "A robust capacitive pressure sensor array," Sensors and Actuators A (Physical), vol. A101, no. 1-2, p. 231-8, 2002. (PDF)
  248. Conference

  249. Y.-K. Yoon, J.-W. Park, and M.G. Allen, "RF MEMS based on epoxy-core conductors," Solid-State Sensor, Actuator, and Microsystems Workshop, (Hilton Head), p374-375, 2002. (PDF)
  250. D. Kim, Y. Choi, M.G. Allen, J.S. Kenney, D.W. Stollberg, and D. Kiesling, "An S-band reflection-type phase shifter-a design example using ferroelectrics," Materials Issues for Tunable RF and Microwave Devices III. Materials Research Society Symposium, vol.720, p 154-9, 2002.
  251. S.P. Davis, M.G. Allen, and M.R. Prausnitz, "The mechanics of microneedles," Second Joint EMBS-BMES Conference, pt. 1, p 498-9, v 1, 2002.
  252. Y.-H. Joung, S. Nuttinck, S.-W. Yoon, M.G. Allen, and J. Laskar, "Integrated inductors in the chip-to-board interconnect layer fabricated using solderless electroplating bonding," IEEE MTT-S International Microwave Symposium, p.1409-12, v 3, 2002. (PDF)
  253. D. Kim, Y. Choi, M.G. Allen, J.S. Kenney, and D. Kiesling, "A wide bandwidth monolithic BST reflection-type phase shifter using a coplanar waveguide Lange coupler," IEEE MTT-S International Microwave Symposium, p.1471-4, v 3, 2002. (PDF)
  254. Y. Choi, K. Kim, and M.G. Allen, "Continuously-varying, three-dimensional SU-8 structures: fabrication of inclined magnetic actuators," 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), p.176-9, 2002. (PDF)
  255. J.-W. Park, F. Cros, and M.G. Allen, "A sacrificial layer approach to highly laminated magnetic cores," 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), p.380-3, 2002. (PDF)
  256. T. Crittenden, A. Glezer, E. Birdsell, and M.G. Allen, "Microfabricated, combustion-driven jet actuators for flow control applications," 2002. (PDF)
  257. 2001

    Journal

  258. P. Seriburi, D. Kercher, and M.G. Allen, "An experimental study of microfabricated spark gaps: wear and erosion characteristics," Journal of Micromechanics and Microengineering, v 11, n 3, p 165-74, May 2001. (PDF)
  259. Conference

  260. Y. Choi, K. Kim, and M.G. Allen, "A magnetically actuated, electrostatically clamped high current MEMS switch," ASME International Mechanical Engineering Congress and Exposition, p 83-7, 2001.
  261. M.A. Fonseca, J.M. English, M. von Arx, and M.G. Allen, "High temperature characterization of ceramic pressure sensors," 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '01), v 1, p 486-9, 2001. (PDF)
  262. C. Marquordt, and M.G. Allen, "Fabrication of micromechanical structures of titania and titanium with electrophoretic deposition," 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '01), v 1, p 616-19, 2001. (PDF)
  263. H. Koser, F. Cros, M.G. Allen, and J.H. Lang, "A high torque density MEMS magnetic induction machine," 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '01), v 1, p 284-7, 2001. (PDF)
  264. Y.-K. Yoon, E. Chen, M.G. Allen, and J. Laskar, "Embedded solenoid inductors for RF CMOS power amplifiers," 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '01), v 2, p 1114-17, 2001. (PDF)
  265. T.C. Leichle, M. von Arx, and M.G. Allen, "A micromachined resonant magnetic field sensor," 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), p 274-7, 2001. (PDF)
  266. D.P. O'Brien, T.R. Nichols, and M.G. Allen, "Flexible microelectrode arrays with integrated insertion devices," 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), p 216-19, 2001. (PDF)
  267. Y.-K. Yoon, and M.G. Allen, "Pt heater/sensor microarray for distributed fluidic cooling assessment," ASME International Mechanical Engineering Congress and Exposition, p 669-75, 2001. (PDF)
  268. Y.-H. Joung, and M.G. Allen, "Micromachined flexible interconnect for wafer level packaging," ASME International Mechanical Engineering Congress and Exposition, p 745-9, 2001. (PDF)
  269. Y.E. Chen, Y.-K. Yoon, J. Laskar, and M.G. Allen, "A 2.4GHz integrated CMOS power amplifier with micromachined inductors," International microwave symposium digest (IEEE MTT-s), v 1, p 523-526, 2001. (PDF)
  270. 2000

    Journal

  271. J.Y. Park, and M.G. Allen, "Integrated electroplated micromachined magnetic devices using low temperature fabrication processes," IEEE Transactions on Electronics Packaging Manufacturing, vol. 23, no. 1, p. 48-55 ,2000. (PDF)
  272. S.K. Bhattacharya, J.Y. Park, R.R. Tummala, and M.G. Allen, "Fabrication of a fully integrated passive module for filter application using MCM-D compatible processes," Journal of Materials Science: Materials in Electronics, vol.11, no.6, p.455-60 ,2000. (PDF)
  273. D.V. McAllister, M.G. Allen, and M.R. Prausnitz, "Microfabricated microneedles for gene and drug delivery," Annual Review of Biomedical Engineering, vol. 2, p. 289-313, 2000. (PDF)
  274. P. Seriburi, D. Kercher, and M.G. Allen, "An experimental study of microfabricated spark gaps: Wear and erosion characteristics," Journal of Micromechanics and Microengineering, 2000. (PDF)
  275. Conference

  276. M.G. Allen, and A. Glezer, "Alternative micromachining technologies for the realization of robust MEMS," American Institute of Aeronautics and Astronautics (AIAA), paper 2000-0248, Jan. 2000 (invited address). (PDF)
  277. C.C. Chung, and M.G. Allen, "Electrical isolation of bulk silicon MEMS devices via thermomigration," IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (MEMS), p.153-7, Jan. 2000. (PDF)
  278. F. Cros, K. Kim, and M.G. Allen, "A single-mask process for micromachined magnetic devices," Solid-State Sensor and Actuator Conference (Hilton Head), p. 138-141, June 2000. (PDF)
  279. T.J. Kaiser, and M.G. Allen, "A micromachined pendulous oscillating gyroscopic accelerometer," Solid State Sensor and Actuator Conference (Hilton Head), p. 85-88, June 2000. (PDF)
  280. 1999

    Journal

  281. L.K. Lagorce, O. Brand, and M.G. Allen, "Magnetic microactuators based on polymer magnets," Journal of Microelectromechanical Systems, vol.8, no.1, p.2-9, March 1999. (PDF)
  282. W.P. Taylor, M. Schneider, H. Baltes, and M.G. Allen, "A NiFeMo electroplating bath for micromachined structures," Electrochemical and Solid-State Letters, vol.2, no.12, p.624-6, 1999. (PDF)
  283. Y.J. Kim, and M.G. Allen, "In situ measurement of mechanical properties of polyimide films using micromachined resonant string structures," IEEE Transactions on Components and Packaging Technologies, vol.22, no.2, p.282-90, 1999. (PDF)
  284. J.Y. Park, S.H. Han, and M.G. Allen, "Batch-fabricated microinductors with electroplated magnetically anisotropic and laminated alloy cores," IEEE Transactions on Magnetics, vol.35, no.5, pt.3, p.4291-4300, 1999. (PDF)
  285. J.Y. Park, and M.G. Allen, "Packaging-Compatible High Q-Microinductors and Microfilters for Wireless Applications," IEEE Transactions on Components, Packaging, and Manufacturing Technology (IEEE CPMT-part B), 1999. (PDF)
  286. J.Y. Park, and M.G. Allen, "High Q spiral-type microinductors on silicon substrates," IEEE Transactions on Magnetics, vol.35, no.5, pt.2, p.3544-6 (1999) (PDF)
  287. J.Y. Park, and M.G. Allen, "New micromachined inductors on silicon substrates," IEEE Transactions on Magnetics, v 35, n 5, pt.2, Sept. 1999, p 3547-9. (PDF)
  288. Conference

  289. D.V. McAllister, S. Kaushik, P.N. Patel, J.L. Mayberry, M.G. Allen, and M.R. Prausnitz, "Microneedles for transdermal delivery of macromolecules," 1st Joint BMES/EMBS Conference, vol. 2, p. 836, 1999. (PDF)
  290. D.V. McAllister, F. Cros, S.P. Davis, L.M. Matta, M.R. Prausnitz, and M.G. Allen, "Three dimensional hollow microneedle and microtube arrays,", Transducers ’99, vol. 2, p. 1098-1101 (1999) (PDF)
  291. J.M. English, and M.G. Allen, "Wireless micromachined ceramic pressure sensors," 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), p.511-16, 1999. (PDF)
  292. D.S. Kercher, P. Seriburi, and M.G. Allen , "An experimental study of microfabricated nickel spark plugs," Transducers ’99, vol. 2, p. 1412-1415, 1999. (PDF)
  293. J.Y. Park, and M.G. Allen, "Micromachined inductors with electroplated magnetically anisotropic alloy cores," 5th International Symposium on Magnetic Materials, Processes, and Devices Applications to Storage and Microelectromechanical Systems (MEMS), p 389-401, 1999.
  294. 1998

    Journal

  295. W.P. Taylor, O. Brand, and M.G. Allen, "Fully integrated magnetically actuated micromachined relays," Journal of Microelectromechanical Systems, vol. 7, no.2, p 181-191, 1998. (PDF)
  296. Y.J. Kim, and M.G. Allen, "Surface micromachined solenoid inductors for high frequency applications," IEEE Transactions on Components, Packaging & Manufacturing Technology, Part C (Manufacturing), vol. 21, no. 1, p 26-33, 1998. (PDF)
  297. P. Chahal, R.R. Tummala, M.G. Allen, and M. Swaminathan, "A novel integrated decoupling capacitor for MCM-L technology," IEEE Transactions on Components, Packaging and Manufacturing Technology, Part B: Advanced Packaging, vol. 21, no. 2, p184-193, 1998. (PDF)
  298. S. Henry, D.V. McAllister, M.G. Allen, and M.R. Prausnitz, "Microfabricated microneedles: A novel approach to transdermal drug delivery," Journal of Pharmaceutical Sciences, vol. 87, no. 8, p 922-925, 1998. (PDF)
  299. J.Y. Park, and M.G. Allen, "Development of magnetic materials and processing techniques applicable to integrated micromagnetic devices," Journal of Micromechanics and Microengineering, Dec. 1998. (PDF)
  300. J.Y. Park, and M.G. Allen, "Packaging-compatible microinductors and microtransformers with screen-printed ferrite using low temperature processes," IEEE Transactions on Magnetics, vol.34, no.4, pt.1, p.1366-8, 1998. (PDF)
  301. C.H. Ahn, and M.G. Allen "Micromachined planar inductors on silicon wafers for MEMS applications," IEEE Transactions on Industrial Electronics, vol.45, no.6, p.866-76, 1998. (PDF)
  302. Conference

  303. P. Chahal, R.R. Tummala, M.G. Allen; G.E. White, "Electroless Ni-P/Ni-W-P thin-film resistors for MCM-L based technologies," 48th Electronic Components and Technology Conference (ECTC), p 232-239, 1998. (PDF)
  304. M.G. Allen, W.P. Taylor, and K. Kim, "Integrated magnetic microrelays: multiple device configurations," National Association of Relay Manufacturers, Apr. 1998.
  305. J.Y. Park, and M.G. Allen, "Electroplated and screen-printed magnetic materials applicable to micromachined magnetic devices," Micromachining & Microfabrication '98 Conference, SPIE, vol. 3512, p 154-167, 1998.
  306. J.Y. Park, and M.G. Allen, "Micromachined high Q inductors for high frequency applications," Micromachining & Microfabrication '98 Conference, SPIE, vol. 3514, p 218-228, 1998. (PDF)
  307. S.P. Chang, J.B. Lee, and M.G. Allen, "A robust 8x8 capacitive pressure sensor array," American Society of Mechanical Engineers Winter Annual Meeting, p. 513-517, 1998. (PDF)
  308. V. Agarwal, P. Chahal, R.R. Tummala, and M.G. Allen, "Improvements and recent advances in nanocomposite capacitors using a colloidal technique," 48th Electronic Components and Technology Conference (ECTC), p 165-70, 1998. (PDF)
  309. Y.-J. Kim, and M.G. Allen, "Integrated solenoid-type inductors for high frequency applications and their characteristics," 48th Electronic Components and Technology Conference (ECTC), p 1247-52, 1998. (PDF)
  310. 1997

    Journal

  311. J.B. Lee, J.M. English, C.-H. Ahn, and M.G. Allen, "Planarization techniques for vertically integrated metallic MEMS on silicon foundry circuits," Journal of Micromechanics and Microengineering, vol. 7, no. 2, p 44-54, 1997. (PDF)
  312. L.K. Lagorce, and M.G. Allen, "Magnetic and mechanical properties of micromachined strontium ferrite/polyimide composites," Journal of Microelectromechanical Systems, vol. 6, no. 4, p 307-312, 1997. (PDF)
  313. A.B. Frazier, and M.G. Allen, "Uses of electroplated aluminum for the development of microstructures and micromachining processes," Journal of Microelectromechanical Systems, vol. 6, no. 2, p 91-98, 1997. (PDF)
  314. J.Y. Park, L.K. Lagorce, and M.G. Allen, "Ferrite-based integrated planar inductors and transformers fabricated at low temperature," IEEE Transactions on Magnetics, vol. 33, no.5, pt. 1, p 3322-3324, 1997. (PDF)
  315. Conference

  316. M.G. Allen, "Micromachined intermediate and high frequency inductors," IEEE International Symposium on Circuits and Systems (ISCAS), p 2829-32, vol.4, 1997. (PDF)
  317. O. Brand, J.M. English, S.A. Bidstrup, and M.G. Allen, "Micromachined viscosity sensor for real-time polymerization monitoring," 9th International Conference on Solid State Sensors and Actuators (Transducers '97), p 121-124, vol. 1, June 1997. (PDF)
  318. W.P. Taylor, and M.G. Allen, "Integrated magnetic microrelays: Normally open, normally closed, and multi-pole devices," 9th International Conference on Solid State Sensors and Actuators (Transducers '97), p 1149-1152, vol.2, June 1997. (PDF)
  319. W.P. Taylor, M. Schneider, H. Baltes, and M.G. Allen, "Electroplated soft magnetic materials for microsensors and microactuators," 9th International Conference on Solid State Sensors and Actuators (Transducers '97), p 1445-8, vol. 2, June 1997. (PDF)
  320. W.P. Taylor, C.R. Dauwalter, and M.G. Allen, "Fully integrated magnetically actuated microrelays," National Association of Relay Manufacturers, Apr. 1997.
  321. J.Y. Park, and M.G. Allen, "Low temperature fabrication and characterization of integrated packaging-compatible, ferrite-core magnetic devices," IEEE Applied Power Electronics Conference (APEC), p 361-367, vol. 1, Feb. 1997. (PDF)
  322. J.Y. Park, S. Bhattacharya, and M.G. Allen, "Fully integrated passives modules for filter applications using low temperature processes," International Symposium on Microelectronics, SPIE, vol. 3235, p 592-597, Oct. 1997. (PDF)
  323. Y.J. Kim, and M.G. Allen, "Surface micromachined solenoid inductors for high frequency applications," International Symposium on Microelectronics, SPIE, vol. 3235, p 1-6, Oct. 1997. (PDF)
  324. 1996

    Journal

  325. C. Carter-Coman, A.S. Brown, R. Bicknell-Tassius, N.M. Jokerst, and M.G. Allen, "Strain-modulated epitaxy: A flexible approach to 3-D band structure engineering without surface patterning," Applied Physics Letters, vol. 69, no. 2 p 257-259, 1996. (PDF)
  326. C.H. Ahn, and M.G. Allen, "A comparison of two micromachined inductors (bar- and meander-type) for fully integrated boost DC/DC power converters," IEEE Transactions on Power Electronics, vol. 11, no. 2, p 239-245, 1996. (PDF)
  327. C.H. Ahn, M.G. Allen, W. Trimmer, Y.-N. Jun, and S. Erramilli, "A fully integrated micromachined magnetic particle separator," Journal of Microelectromechanical Systems, vol. 5, no. 3, p 151-158, 1996. (PDF)
  328. Z. Nami, C.H. Ahn, and M.G. Allen, "An energy-based design criterion for magnetic microactuators," Journal of Micromechanics and Microengineering, vol. 6, no. 3, p 337-44, 1996. (PDF)
  329. J.B. Lee, M.G. Allen, T.C. Hodge, S.A. Bidstrup, and P.A. Kohl, "Modeling of substrate-induced anisotropy in through-plane thermal behavior of polymeric thin films," Journal of Polymer Science, Part B (Polymer Physics), vol. 34, no. 9, p 1591-6, 1996. (PDF)
  330. Conference

  331. Y. Konaka, Y. and M.G. Allen, "Single and multilayer electroplated microaccelerometers," IEEE Microelectromechanical Systems Workshop, p168-173, Feb. 1996. (PDF)
  332. L.K. Lagorce, and M.G. Allen, "Micromachined polymer magnets," IEEE Microelectromechanical Systems Workshop, p 85-90, Feb. 1996. (PDF)
  333. L.K. Lagorce, and M.G. Allen, "Ferrite filled polymers for integrated power conversion devices," International Symposium on Microelectronics, SPIE, vol. 2920, p 176-180, Oct. 1996. (PDF)
  334. W.P. Taylor, M.G. Allen, and C.R. Dauwalter, "A fully integrated magnetically actuated micromachined relay," Solid State Sensor and Actuator Workshop (Hilton Head), p 231-234, June 1996. (PDF)
  335. P. Chahal, R.R. Tummala, M.G. Allen, and M. Swaminathan, "A novel integrated decoupling capacitor for MCM-L technology," 46th Electronic Components and Technology Conference (ECTC), p 125-132, May 1996. (PDF)
  336. P. Chahal, R.R. Tummala, and M.G. Allen, "Integrated capacitors using polymer-ceramic Ccomponents for MCM-L," International Symposium on Microelectronics, SPIE, vol. 2920, p 126-131, Oct. 1996. (PDF)
  337. M. Baker, O. Brand, M.G. Allen, and G.S. May, "A Micromachined sensor for in-situ monitoring of plasma etching," 54th Device Research Conference, p 120-121, June 1996. (PDF)
  338. J.Y. Park, and M.G. Allen, "A comparison of micromachined inductors with different magnetic core materials," 46th Electronic Components and Technology Conference (ECTC), p 120-125, May 1996. (PDF)
  339. J.Y. Park, and M.G. Allen, "High current integrated microinductors and microtransformers using low temperature fabrication processes," International Symposium on Microelectronics, SPIE, vol. 2920, p 120-125, Oct. 1996. (PDF)
  340. 1995

    Journal

  341. J.B. Lee, Z. Chen, M.G. Allen, A. Rohatgi, and R. Arya, "A miniaturized high-voltage solar cell array as an electrostatic MEMS power supply," Journal of Microelectromechanical Systems, vol. 4, no. 3,p 102-108, 1995. (PDF)
  342. Conference

  343. M.G. Allen, "Integrated inductors for low cost electronic packages", International Electron Devices Meeting (IEDM), p 137-141, Dec. 1995.(invited address to Novel Technologies and Opportunities Symposium of IEDM). (PDF)
  344. M. Schneider, R. Castagnetti, M.G. Allen, H. and Baltes, "Integrated flux concentrator improves CMOS magnetotransistors," IEEE Microelectromechanical Systems Workshop (MEMS), p 151-156, 1995. (PDF)
  345. C.H. Ahn, and M.G. Allen, "Fluid micropumps based on rotary magnetic actuators," IEEE Microelectromechanical Sstems Workshop (MEMS), p 408-412, 1995. (PDF)
  346. C.H. Ahn, and M.G. Allen, "Micromachined planar inductors with electroplated nickel-iron permalloy cores (spiral type, solenoid type, and toroidal-meander type)," 4th International Symposium on Magnetic Materials, Processes, and Devices (Electrochemical Society Fall Meeting), p 411-425, Oct. 1995. (PDF)
  347. D.J. Coe, M.G. Allen, B.L. Smith, and A. Glezer, "Addressable micromachined jet arrays," 8th International Conference on Solid State Sensors and Actuators (Transducers '95), vol. 2, p 329-332, June 1995.
  348. 1994

    Journal

  349. C.H. Ahn, and M.G. Allen, "New toroidal-meander-type integrated inductor with a multilevel meander magnetic core," IEEE Transactions on Magnetics, vol. 30, no. 1, p 73-79, 1994. (PDF)
  350. C.H. Ahn, Y.J. Kim, and M.G. Allen, "A fully integrated planar toroidal inductor with a micromachined nickel-iron magnetic bar," IEEE Transactions on Components, Packaging, and Manufacturing Technology, Part A, vol. 17, no. 3, p 463-469, 1994. (PDF)
  351. A.B. Frazier, C.S. Olson, S.P. Turner, and M.G. Allen, "Characterization of graphite-filled polyimide thin films using micromachining techniques," International Journal of Microcircuits and Electronic Packaging, vol. 17, no. 1, p 37-49, 1994.
  352. A.B. Frazier, C.H. Ahn, and M.G. Allen, "Development of micromachined devices using polyimide-based processes," Sensors and Actuators A (Physical), vol. A45, no. 1, p 47-55, 1994. (PDF)
  353. S.T. Wilkinson, Y.W. Kim, N.M. Jokerst, and M.G. Allen, "Integration of thin film optoelectronic devices onto micromachined movable platforms," IEEE Photonics Technology Letters, vol. 6, no. 9, p 1115-1118, 1994. (PDF)
  354. Conference

  355. A.B. Frazier, R.M. Powers, and M.G. Allen, "Thin film programmable arrays," MEMS’04. (PDF)
  356. S.A. Bidstrup, T.C. Hodge, L. Linn, P.A. Kohl, J.B. Lee and M.G. Allen, "Anisotropy in thermal, electrical and mechanical properties of spin-coated polymer dielectrics," Materials Research Society Symposium, no. 338, p 577-587, 1994. (PDF)
  357. M.G. Allen, "Design, fabrication, and application of magnetic microactuators," 5th International Symposium on Micro Machine and Human Science, p.5, Oct. 1994. (invited plenary address). (PDF)
  358. C. Chung, and M.G. Allen, "Measurement of mechanical properties of electroplated nickel-iron alloys," American Society of Mechanical Engineers Dynamic Systems and Control Division, vol. 55, p 453-457, 1996.
  359. C.H. Ahn, and M.G. Allen, "A comparison of two micromachined inductors (bar-type and meander-type) for fully integrated boost DC/DC power converters," IEEE 9th Applied Power Electronics Conference (APEC), vol. 1, p 10-16, Feb. 1994. (invited plenary address) (PDF)
  360. C.H. Ahn, and M.G. Allen, "A fully integrated micromachined magnetic particle manipulator and separator," IEEE Microelectromechanical Systems Workshop, p 91-96, 1994. (PDF)
  361. J.B. Lee, Z. Chen, M.G. Allen, A. Rohatgi, and R. Arya, "A high voltage solar cell array as an electrostatic MEMS power supply," IEEE Microelectromechanical Systems Workshop, p 331-336, 1994. (PDF)
  362. D. Coe, M.A. Trautman, M.G. Allen, and A. Glezer, "Micromachined jets for manipulation of macro flows," Solid State Sensor and Actuator Workshop (Hilton Head), p 243-247, 1994.
  363. Y. Wang, S. Fike, M.G. Allen, and N.M. Jokerst, "Measurement of adhesion of GaAs thin films using the blister test," Annual Meeting of the Adhesion Society, Feb. 1994.
  364. T.C. Hodge, S.A. Bidstrup, P.A. Kohl, J.B. Lee, and M.G. Allen, "An in-situ measurement technique for through-plane thermal properties of thin dielectric films," International Conference and Exhibition on Multichip Modules, SPIE, vol. 2256, p 344-349, 1994. (PDF)
  365. T.C. Hodge, P.A. Kohl, S.A. Bidstrup, J.B. Lee, and M.G. Allen, "In-situ thermal expansion measurements of interlevel dielectric polymer films," 5th International Conference on Polyimide Films, Nov. 1994.
  366. 1993

    Journal

  367. A.B. Frazier, and M.G. Allen, "Piezoresistive graphite/polyimide thin gilms for micromachining applications," Journal of Applied Physics, v 73, p 4428-4433, 1993. (PDF)
  368. A.B. Frazier, and M.G. Allen, "Metallic microstructures fabricated using photosensitive polyimide rlectroplating molds," Journal of Microelectromechanical Systems, vol. 2, no. 2, p 87-94, 1993.(PDF)
  369. C.H. Ahn, and M.G. Allen, "A planar micromachined spiral inductor for integrated magnetic microactuator applications," Journal of Micromechanics and Microengineering, vol. 3, no. 2, p 37-44, 1993. (PDF)
  370. C.H. Ahn, and M.G. Allen, "A fully integrated surface micromachined magnetic microactuator with a multilevel meander magnetic core," Journal of Microelectromechanical Systems, vol. 2, no. 1, p 15-22, 1993. (PDF)
  371. C.H. Ahn, Y.J. Kim, and M.G. Allen, "A planar variable reluctance magnetic micromotor with fully integrated stator and coils," Journal of Microelectromechanical Systems, vol. 2, no. 4, p 165-73, 1993. (PDF)
  372. Conference

  373. M.G. Allen, "Polyimide-based processes for the fabrication of thick electroplated microstructures," 7th International Conference On Solid State Sensors and Actuators (Transducers '93), p 60-65, June 1993. (PDF)
  374. Z. Nami, C.H. Ahn, and M.G. Allen, "Magnetic analysis of an overlapped cantilever beam using finite elements," American Society of Mechanical Engineers Dynamic Systems and Control Division, vol. 46, p 1-6, 1993.
  375. C.H. Ahn, Y.J. Kim, and M.G. Allen, "A planar variable reluctance micromotor with fully integrated stator and wrapped Coils," IEEE Microelectromechanical Systems Workshop (MEMS), p 1-6, Feb. 1993. (PDF)
  376. C.H. Ahn, and M.G. Allen, "A fully integrated micromachined toroidal inductor with a nickel-iron magnetic core," 7th International Conference on Solid State Sensors and Actuators (Transducers '93), p 70-73, June 1993. (PDF)
  377. B. Rashidian, and M.G. Allen, "Electrothermal microactuators based on dielectric loss heating," IEEE Microelectromechanical Systems Workshop (MEMS), p 24-29, Feb. 1993. (PDF)
  378. A.B. Frazier, D. O'Brien, and M.G. Allen, "Two dimensional metallic microelectrode arrays for recording and stimulation of neurons,"IEEE Microelectromechanical Systems Workshop (MEMS), p 195-200, Feb. 1993. (PDF)
  379. S. Wilkinson, Y.W. Kim, M.G. Allen, and N.M. Jokerst, "Integration of thin film compound semiconductor photonic devices onto micromachined movable platforms," 7th International Conference on Solid State Sensors and Actuators (Transducers '93), p 148-151, June 1993. (PDF)
  380. S> Wilkinson, Y. Kim, N.M. Jokerst, and M.G. Allen, "Integration of thin film devices onto micromachined movable platforms," IEEE Lasers and Electro Optics Society Annual Meeting, p 98-99, Nov. 1993. (PDF)
  381. 1992

    Journal

  382. Y.W. Kim, and M.G. Allen, "Single and multilayer surface micromachined platforms using electroplated sacrificial layers," Sensors and Actuators, A35, p 61-68, 1992. (PDF)
  383. C. Camperi-Ginestet, Y.W. Kim, N.M. Jokerst, M.G. Allen, and M. Brooke, "Vertical electrical interconnection of compound semiconductor thin-film devices to underlying silicon circuitry," IEEE Photonics Technology Letters, vol. 4, no. 9, p 1003-6, 1992. (PDF)
  384. Conference

  385. A.B. Frazier, M.R. Kahn, and M.G. Allen, "Mechanical and piezoresistive properties of graphite-filled polyimide," Materials Research Society Symposium Series, no. 317, p 295-301, Apr. 1992.
  386. A.B. Frazier, and M.G. Allen, "Mechanical and piezoresistive properties of graphite-filled polyimide for hybrid micromachined systems," International Symposium on Microelectronics, SPIE, vol. 1847, p41-46, Oct. 1992. (PDF)
  387. C. Camperi-Ginestet, N.M. Jokerst, G. Augustine, M. Hargis, and M.G. Allen, "Alignable deposition of thin film semiconductor materials for integrated micro-opto-electronic systems," Materials Research Society Symposium, no. 317, p 131-136, Apr. 1992. (PDF)
  388. C.H. Ahn, and M.G. Allen, "A fully integrated micromagnetic actuator with a multilevel meander inductive dore," EEE Solid State Sensor and Actuator Workshop (Hilton Head), p 14-18, June 1992. (PDF)
  389. Y.W. Kim, M.G. Allen, and N.F. Hartman, "Micromechanically based integrated optic modulators and switches," SPIE meeting, vol. 1793, p 183-189, Sept. 1992. (PDF)
  390. 1991

    Journal

  391. Camperi-Ginestet, C., Hargis, M., Jokerst, N., and M.G. Allen, "Alignable epitaxial liftoff of gallium arsenide materials with selective deposition using polyimide diaphragms," IEEE Photonics Technology Letters, vol. 3, no. 12, p 1123-1125, 1991. (PDF)
  392. Conference

  393. A.B. Frazier, J.W. Babb, M.G. Allen, and D.G. Taylor, "Design and fabrication of electroplated micromotor structures," American Society of Mechanical Engineers Dynamic Systems and Control Division, vol. 32, p 135-148, 1991.
  394. B. Rashidian, and M.G. Allen, "Integrated piezoelectric polymers for microsensing and microactuation applications," American Society of Mechanical Engineers Dynamic Systems and Control Division, vol. 32, p 171-179, 1991 (PDF)
  395. Y.W. Kim, and M.G. Allen, "Surface micromachined platforms using electroplated sacrificial layers," 6th International Conference On Solid State Sensors and Actuators (Transducers '91), p 651-654, June 1991. (PDF)
  396. C.H. Ahn, and M.G. Allen, "Measurement of polymer mechanical properties using microfabricated resonant structures," American Chemical Society Division of Polymeric Materials: Science and Engineering, vol. 64, 1991. (PDF)
  397. C. Camperi-Ginestet, M. Hargis, N.M. Jokerst, M.G. Allen, and T. Drabik, "Alignable epitaxial lift off GaAs materials using polyimide diaphragms," Integrated Photonics Research Topical Meeting, vol. 8, p 27-28, Apr. 1991.
  398. 1990

    Journal

  399. M.G. Allen, A. Nikolich, M. Scheidl, and R.L Smith, "Movable micromachined silicon plates with integrated position sensing," Sensors and Actuators, A21-A23, p 211-214, 1990. (PDF)
  400. Conference

  401. M.G. Allen, P. Nagarkar, and S.D. Senturia, "An XPS analysis of polymide/substrate fracture surfaces," Society of Plastics Engineers Annual Technical Conference, vol. 36, May 1990. (PDF)
  402. 1989

    Journal

  403. M.G. Allen, and S.D. Senturia, "Application of the island blister test for thin film adhesion measurement," Journal of Adhesion, vol. 29, p 219-231, 1989. (PDF)
  404. Conference

  405. M.G. Allen, M. Scheidl, and R.L. Smith, "Design and fabrication of movable silicon plates suspended by flexible supports,"IEEE Microelectromechanical Systems Workshop, p 76-81, Feb. 1989. (PDF)
  406. M.G. Allen, A. Nikolich, M. Scheidl, and R.L. Smith, "Movable micromachined silicon plates with integrated position sensing," 5th International Conference On Solid State Sensors and Actuators (Transducers '89), June 1989. (PDF)
  407. P.V. Nagarkar, P.C. Searson, F. Belluci, M.G. Allen, and R.M. Latanision, "Interfacial interactions affecting polyimide reliability," 39th Electronic Components Conference, p 160-166, May 1989. (PDF)
  408. 1988

    Journal

  409. M.G. Allen and S.D. Senturia, "Analysis of critical debonding pressures of stressed thin films in the blister test," Journal of Adhesion, vol. 25, p 303-315, 1988. (PDF)
  410. Conference

  411. F. Maseeh, M.A. Schmidt, M.G. Allen, and S.D. Senturia, "Calibrated maasurements of elastic limit, modulus, and residual stress of thin films using micromachined suspended membranes," IEEE Solid State Sensors Workshop (Hilton Head), p 84-87, June 1988. (PDF)
  412. M.G. Allen and S.D. Senturia, "Polyimide-metal adhesion measurement using microfabricated structures," Society of Plastics Engineers Annual Technical Conference, vol. 34, p 997-999, April 1988. (PDF)
  413. M.G. Allen and S.D. Senturia, "Measurement of polyimide interlayer adhesion using microfabricated structures," Symposium on Polymeric Materials for Electronic Packaging of the American Chemical Society, vol. 59, p 352-356, Sept. 1988. (PDF)
  414. 1987

    Journal

  415. M.G. Allen, M. Mehregany, R.T. Howe, and S.D. Senturia, "Microfabricated structures for the in-situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films," Applied Physics Letters, vol. 51, no. 4, p 241- 244, 1987. (PDF)
  416. Conference

  417. M.G. Allen and S.D. Senturia, "Microfabricated structures for the measurement of adhesion and mechanical properties of polymer films," American Chemical Society Division of Polymeric Materials: Science and Engineering, vol. 56, p735-739, Apr. 1987. (PDF)
  418. 1986

    Conference

  419. M. Mehregany, M.G. Allen, and S.D. Senturia, "The use of microfabricated structures for the measurement of mechanical properties and adhesion of polymer films," IEEE Solid State Sensors Workshop (Hilton Head), p 58-61, June 1986. (PDF)
  420. 1985

    Journal

  421. T. Hasan, M.G. Allen, and B.S. Cooperman, "Anhydrotetracycline is a major product of tetracycline photolysis," Journal of Organic Chemistry, vol. 50, no. 10, p 311-313, 1985. (PDF)

Thesis

  1. "MEMS-based fabrication of power electronics compoenents for advanced power converters" by Galle, William Preston (2012)
  2. "Carbon material based microelectromechanical system (MEMS): Fabrication and devices" by Xu, Wenjun (2011)
  3. "Micro-mechanical sensor for the spectral decomposition of acoustic signals" by Kranz, Michael (2011)
  4. "Development and characterization of mechanical actuated microtweezers for use in a single-cell injury model" by Wester, Brock (2010)
  5. "Micro/nanopatterning approaches for molecular manipulation" by Liu, Zhan (Jennifer) (2010)
  6. "MEMS-based nozzles and templates for the fabrication of rngineered tissue constructs" by Naik, Nisarga (2010)
  7. "Elastomer-based microcable electrodes for electrophysiological applications" by McClain, Maxine (2010)
  8. "Micromachined three-dimensional electrode arrays for in-vitro and in-vivo electrogenic cellular networks" by Rajaraman, Swaminathan (2009)
  9. "Microfabricated air-turbine and heat-engine-driven permanent magnet generators" by Herrault, Florian (2009)
  10. "Laminated chemical and physical microjet actuators based on conductive media" by Gadiraju, Priya (2008)
  11. "A reconfigurable tactile display based on polymer MEMS technology" by Wu, Xiaosong (2008)
  12. "A micromachined magnetic field sensor for low power electronic compass applications" by Choi, Seungkeun (2007)
  13. "An electrically active microneedle electroporation array for intracellular delivery of biomolecules" by Choi, Seong-O (2007)
  14. "Polymer/ceramic wireless MEMS pressure sensors for harsh environments: High temperature and biomedical applications" by Fonseca, Michael A.(2007)
  15. "Laminated gas generator actuator arrays" by English, Brian Alan (2006)
  16. "Magnetic machines for microengine power generation" by Arnold, David Patrick (2004)
  17. "Core lamination technology for micromachined power inductive components" by Park, Jin-Woo (2004)
  18. "Micromachined components for RF systems" by Yoon, Yong-Kyu (2004)
  19. "Hollow microneedles for molecular transport across skin" by Davis, Shawn Paul (2003)
  20. "Electroplating bonding technology for chip interconnect, wafer level packaging and interconnect layer structures" by Joung, Yeun-Ho (2003)
  21. "Robust micromachined capacitive pressure sensors for mechanically harsh environments" by Chang, Sung Pil (2002)
  22. "Fabrication technology approaches to micromachined synthetic jets" by Coe, David James (2002)
  23. "Wireless micromachined ceramic pressure sensors for high temperature environments" by English, Jennifer Marie (2000)
  24. "A micromachined pendulous oscillating gyroscopic accelerometer" by Kaiser, Todd Jeffrey (2000)
  25. "Microfabricated needles for transdermal drug delivery" by McAllister, Devin Vincent (2000)
  26. "Micromachined microelectrode arrays for stimulation of neural tissue" by O'Brien, David Patrick (2000)
  27. "Integral resistors and capacitors for mixed-signal packages using electroless plating and polymer-ceramic nanocomposites" by Chahal, Premjeet (1999)
  28. "Application of polymer/metal multilayer processing techniques to microelectromechanical systems" by Kim, Yong-Jun (1997)
  29. "Micromachined movable platforms as integrated optic devices" by Kim, Young Woon (1997)
  30. "Strategies for realization of integrated microelectromechanical systems: On-board power, silicon circuitry, multichip modules" by Lee, Jeong-Bong (1997)
  31. "Packaging-compatible micromachined magnetic devices: Integrated passive components and modules" by Park, Jae Yeong (1997)
  32. "The design and fabrication of fully integrated magnetically actuated micromachined relays" by Taylor, William Patrick (1997)
  33. "Micromachined components as integrated inductors and magnetic microactuators" by Ahn, Chong-Hyuk (1993)
  34. "The use of polyimide for the development of micromachined materials, processes and devices" by Frazier, Albert Bruno (1993)
  35. "Micromachined devices based on polyvinylidene fluoride-trifluoroethylene" by Rashidian, Bizhan (1993)