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MicroSensors and MicroActuators

Georgia Tech MEMS group

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Micro Power Convertor

Ultraminiaturized Magnetic Generator

Micro-compass

Miniaturized RF Passive Components

Released Jet from Microcombustor

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The MSMA Group is a part of the School of Electrical and Computer Engineering at the Georgia Institute of Technology.

Prof Mark Allen’s research group MSMA focuses on the designs, fabrications, tests and packaging of Micro Electro-Mechanical Systems (MEMS) for applications ranging from high temperature wireless pressure sensor integrated in jet engines to microneedles for painless drug delivery. By combining standard IC microfabrication processes with alternative micro-manufacturing techniques such as laser machining, polymer casting, metal electroplating and materials lamination, the MSMA group has developed devices for a large number of applications.

The MSMA Group is a unit member of the Center for MEMS and Microsystems Technologies (CMMT)

Micromachined in-plane Silicon Nozzle

High Temperature Wireless Pressure Sensor

PMMA Microneedles

3-D Multielectrode Arrays

Corrugated Pattern Array on SLA Manifold Substrate

visitors since February 3, 2006.

Last modified on July 22, 2008

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